CN100412520C - Amorphous Alloy Strain Gauge - Google Patents
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- CN100412520C CN100412520C CNB2006100880632A CN200610088063A CN100412520C CN 100412520 C CN100412520 C CN 100412520C CN B2006100880632 A CNB2006100880632 A CN B2006100880632A CN 200610088063 A CN200610088063 A CN 200610088063A CN 100412520 C CN100412520 C CN 100412520C
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- 229910000808 amorphous metal alloy Inorganic materials 0.000 title claims abstract description 46
- 230000005291 magnetic effect Effects 0.000 claims abstract description 45
- 230000005284 excitation Effects 0.000 claims abstract description 14
- 238000005259 measurement Methods 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 22
- 230000008859 change Effects 0.000 abstract description 10
- 230000035945 sensitivity Effects 0.000 abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 2
- 230000035882 stress Effects 0.000 description 27
- 230000035699 permeability Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明涉及一种用于机械应力的测量的装置,特别是一种非晶态合金应变计。The invention relates to a device for measuring mechanical stress, in particular to an amorphous alloy strain gauge.
背景技术 Background technique
测量应力的技术和方法有多种,与非晶态合金应变计相近的是电阻应变计,又称为电阻应变片,电阻应变片的工作原理是基于它的应变效应。使用应变片测量构件应力或应变时,将电阻应变片粘贴于被测构件表面,应变片和零件一起变形,由于片内金属丝尺寸和电阻率都产生变化,金属丝的电阻值也产生变化,通过测量电路(电阻应变仪)测出电阻值的变化即可求得应变或应力的大小。电阻应变计是目前测量应变、荷重、拉力、压力等物理量的常用技术,但也存在一些缺点:常规应变片在大应变状态下,电阻变化率与应变的关系呈现较大的非线性,半导体应变片更为显著。常规应变片输出信号较小,对信号连接导线要进行认真屏蔽.。应变片有一定的尺寸。所以实际测出的是某一面积上的平均应变,不能完全显示应力场中应力梯度的情况。受温度的影响比较大。不适合在恶劣的环境下长期工作。There are many techniques and methods for measuring stress. Similar to amorphous alloy strain gauges are resistance strain gauges, also known as resistance strain gauges. The working principle of resistance strain gauges is based on its strain effect. When using strain gauges to measure component stress or strain, the resistance strain gauge is pasted on the surface of the measured component, and the strain gauge and the part deform together. Since the size and resistivity of the metal wire in the sheet change, the resistance value of the metal wire also changes. The strain or stress can be obtained by measuring the change of the resistance value through the measuring circuit (resistance strain gauge). Resistance strain gauge is a common technology for measuring physical quantities such as strain, load, tension, and pressure at present, but there are also some disadvantages: the relationship between the resistance change rate and strain of conventional strain gauges is relatively nonlinear in the state of large strain, and the semiconductor strain gauge piece is more pronounced. The output signal of conventional strain gauges is small, and the signal connecting wires should be carefully shielded. Strain gauges have a certain size. Therefore, what is actually measured is the average strain on a certain area, which cannot fully display the stress gradient in the stress field. It is greatly affected by temperature. Not suitable for long-term work in harsh environments.
发明内容 Contents of the invention
本发明要解决的技术问题是针对现有技术的不足,提出了一种测量灵敏度高、温度误差小的非晶态合金应变计。The technical problem to be solved by the invention is to propose an amorphous alloy strain gauge with high measurement sensitivity and small temperature error in view of the deficiencies of the prior art.
本发明要解决的技术问题是通过以下技术方案来实现的,一种非晶态合金应变计,其特点是:非晶态合金薄带的中部向一侧凸起形成拱桥形磁极,磁极的桥面与非晶态合金薄带本体平行设置,磁极凸起的高度为h,0<h<0.5mm,在磁极上并排缠绕有励磁线圈和测量线圈,励磁线圈磁场强度为0.01~0.05A/mm。The technical problem to be solved in the present invention is achieved through the following technical scheme, an amorphous alloy strain gauge, which is characterized in that: the middle part of the amorphous alloy thin strip protrudes to one side to form an arch bridge-shaped magnetic pole, and the bridge of the magnetic pole The surface is set parallel to the main body of the amorphous alloy thin strip, the height of the magnetic pole protrusion is h, 0<h<0.5mm, the excitation coil and the measurement coil are wound side by side on the magnetic pole, and the magnetic field strength of the excitation coil is 0.01~0.05A/mm .
本发明要解决的技术问题还可以通过以下技术方案来进一步实现,励磁线圈的匝数为5~8匝,测量线圈的匝数为8~10匝。The technical problem to be solved by the present invention can be further realized through the following technical solutions, the number of turns of the exciting coil is 5-8 turns, and the number of turns of the measuring coil is 8-10 turns.
使用非晶态合金应变计测量应力时,将非晶态合金应变计牢固地附着在被测材料的表面,使其整体沿纵向与被测工件同时发生变形,从而引起铁芯中磁导率的变化,导致电感值改变,实现工件应变的检测。其工作原理是基于压磁效应,所谓压磁效应是指,当磁化的被测材料受到应力作用时,由于磁致伸缩的各向异性,拉应力将使λs为正的材料磁化方向转向拉应力的平行方向,也即与拉应力平行方向的磁导率增大(磁阻减小),而在与拉应力垂直方向难以磁化,也即与拉应力垂直方向的磁导率减小(磁阻增大);压应力的情况则相反。非晶态合金是一种新型材料,由于其具有独特的性能,在传感器技术中应用的越来越多。本发明利用非晶态合金良好的软磁特性和稳定的温度性能,与传统的电阻应变计相比,它具有一下主要优点:(1)具有较高的测量灵敏度,尤其适合微力或者微小位移的测量;(2)温度误差小;(3)测量电路简单;(4)可以在恶劣环境下工作,使用寿命长。(5)结构简单,制作方便。When using an amorphous alloy strain gauge to measure stress, the amorphous alloy strain gauge is firmly attached to the surface of the measured material, so that the entire body deforms along the longitudinal direction at the same time as the workpiece under test, thereby causing a change in the magnetic permeability in the iron core. The change causes the inductance value to change, and realizes the detection of workpiece strain. Its working principle is based on the piezomagnetic effect. The so-called piezomagnetic effect means that when the magnetized material to be tested is subjected to stress, due to the anisotropy of magnetostriction, the tensile stress will make the magnetization direction of the material whose λs is positive turn to the tensile stress. The parallel direction, that is, the magnetic permeability in the direction parallel to the tensile stress increases (reluctance decreases), and it is difficult to magnetize in the direction perpendicular to the tensile stress, that is, the magnetic permeability in the direction perpendicular to the tensile stress decreases (reluctance increase); the opposite is true for compressive stress. Amorphous alloys are a new class of materials that are increasingly being used in sensor technology due to their unique properties. The invention utilizes the good soft magnetic characteristics and stable temperature performance of the amorphous alloy, and compared with the traditional resistance strain gauge, it has the following main advantages: (1) It has higher measurement sensitivity, especially suitable for micro force or micro displacement (2) The temperature error is small; (3) The measurement circuit is simple; (4) It can work in harsh environments and has a long service life. (5) The structure is simple and easy to manufacture.
附图说明Description of drawings
附图为本发明的结构简图。Accompanying drawing is the structural diagram of the present invention.
具体实施方式 Detailed ways
一种非晶态合金应变计,非晶态合金薄带1的中部向一侧凸起形成拱桥形磁极2,磁极2的桥面与非晶态合金薄带1本体平行设置,磁极2凸起的高度为h,0<h<0.5mm,此值越小越好,以减小附加弯矩。在磁极2上并排缠绕有励磁线圈4和测量线圈3。此时凸起部分相当于线圈铁芯。应变计的具体的尺寸主要由所选非晶态合金材料的允许应力决定。目前国内安泰科技股份有限公司所提供的非晶态合金薄带的规格为:宽度5~100mm,厚度0.03mm,长度可根据需要裁剪,用户也可以根据需求订做特殊规格。当主要测量拉应力时,可以采用比较薄的非晶态合金薄带;当主要测量压应力时,则可以采用比较厚的非晶态合金薄带。用户可以通过特殊订制,或通过叠加来增加非晶态合金薄带的厚度。An amorphous alloy strain gauge, the middle part of the amorphous alloy thin strip 1 protrudes to one side to form an arch bridge-shaped magnetic pole 2, the bridge surface of the magnetic pole 2 is arranged parallel to the main body of the amorphous alloy thin strip 1, and the magnetic pole 2 protrudes The height is h, 0<h<0.5mm, the smaller the value, the better to reduce the additional bending moment. An exciting coil 4 and a measuring coil 3 are wound side by side on the magnetic pole 2 . At this time, the raised portion corresponds to the coil core. The specific size of the strain gauge is mainly determined by the allowable stress of the selected amorphous alloy material. At present, the specifications of the amorphous alloy thin strips provided by Antai Technology Co., Ltd. in China are: width 5-100mm, thickness 0.03mm, the length can be cut according to needs, and users can also customize special specifications according to needs. When the tensile stress is mainly measured, a relatively thin amorphous alloy strip can be used; when the compressive stress is mainly measured, a relatively thick amorphous alloy strip can be used. Users can increase the thickness of amorphous alloy thin strips by special order or by stacking.
应变计材料选择Strain Gauge Material Selection
根据磁弹性理论,铁磁材料的相对磁导率变化与应力σ之间的关系为According to the theory of magnetoelasticity, the relationship between the relative permeability change of ferromagnetic materials and the stress σ is
式中,μ为铁磁材料的磁导率;Bm为饱和磁感应强度。由上式可知,为了保证应变计具有较高的测量灵敏度,所选非晶态合金材料应该具有较大的磁致伸缩系数和磁导率,较小的饱和磁感应强度。在目前技术上得到广泛应用的三类非晶态合金中,具有上述特性的材料,当属TM-M型的Fe基非晶态合金。这种材料具有很高的机电转换效率,经过适当的退火处理,其机电转换效率还可以进一步提高。除此之外,TM-M型非晶态合金具有良好温度稳定性和时效稳定性,可加工性好,价格便宜,很适合制作应变计。目前国内安泰科技股份有限公司生产的Fe基非晶态合金薄带的主要物理性能为:饱和磁感应强度Bs=1.56T;居里温度Tc=410℃;饱和磁致伸缩系数λs=27×10-6;电阻率ρ=130Ωμ-cm;最大导磁率μ>25×104。In the formula, μ is the magnetic permeability of the ferromagnetic material; B m is the saturation magnetic induction. It can be seen from the above formula that in order to ensure a high measurement sensitivity of the strain gauge, the selected amorphous alloy material should have a large magnetostriction coefficient and permeability, and a small saturation magnetic induction. Among the three types of amorphous alloys that are widely used in the current technology, the material with the above characteristics is undoubtedly the TM-M type Fe-based amorphous alloy. This material has high electromechanical conversion efficiency, and its electromechanical conversion efficiency can be further improved after proper annealing treatment. In addition, the TM-M type amorphous alloy has good temperature stability and aging stability, good machinability and low price, and is very suitable for making strain gauges. At present, the main physical properties of the Fe-based amorphous alloy ribbon produced by Antai Technology Co., Ltd. in China are: saturation magnetic induction intensity Bs = 1.56T; Curie temperature Tc = 410°C; saturation magnetostriction coefficient λs = 27×10 - 6 ; resistivity ρ=130Ωμ-cm; maximum magnetic permeability μ>25×10 4 .
应变计主要参数确定Determination of the main parameters of the strain gauge
非晶态合金应变计的主要参数为励磁线圈和测量线圈的匝数N1、N2,励磁电流强度I,磁场强度H,其中磁场强度H对应变计的测量灵敏度影响最大。确定磁场强度H要使非晶态合金应变计工作在最大磁导率和磁化曲线(B-H)的线性段。磁芯材料时通常所施加的磁场强度H值,非晶态合金应变计的励磁磁场强度0.01~0.05A/mm。当磁场强度H确定后,可由下式求其他参数:The main parameters of the amorphous alloy strain gauge are the turns N 1 and N 2 of the exciting coil and the measuring coil, the exciting current I, and the magnetic field H, among which the magnetic field H has the greatest influence on the measurement sensitivity of the strain gauge. Determine the magnetic field strength H to make the amorphous alloy strain gauge work in the linear segment of the maximum permeability and magnetization curve (BH). The magnetic field strength H value usually applied when the magnetic core material is used, and the excitation magnetic field strength of the amorphous alloy strain gauge is 0.01-0.05A/mm. When the magnetic field strength H is determined, other parameters can be calculated by the following formula:
式中,Nl为励磁线圈匝数;l为非晶态合金应变计凸起长度;I为励磁电流强度。励磁线圈的匝数为5~8匝左右,测量线圈的匝数为8~10匝左右。可测力范围为(1~100)×104N。当励磁线圈匝数Nl确定后,励磁电流强度I即可确定。In the formula, N l is the number of turns of the excitation coil; l is the protrusion length of the amorphous alloy strain gauge; I is the excitation current intensity. The number of turns of the exciting coil is about 5 to 8 turns, and the number of turns of the measuring coil is about 8 to 10 turns. The measurable force range is (1~100)×10 4 N. When the number of turns N l of the excitation coil is determined, the intensity of the excitation current I can be determined.
非晶态合金应变计的磁路分析如下。将非晶态合金应变计牢固地附着于被测材料表面时,二者便形成了闭合磁路。当励磁线圈通入具有一定频率的交流电时,便在励磁线圈中产生了交变磁通φ。根据磁路定律,磁路中的瞬时磁通为:The magnetic circuit analysis of the amorphous alloy strain gauge is as follows. When the amorphous alloy strain gauge is firmly attached to the surface of the material under test, the two form a closed magnetic circuit. When the excitation coil is fed with alternating current with a certain frequency, an alternating magnetic flux φ is generated in the excitation coil. According to the law of magnetic circuit, the instantaneous magnetic flux in the magnetic circuit is:
而
式中,I——励磁电流强度;Nl——励磁线圈匝数;In the formula, I——excitation current intensity; N l ——number of turns of excitation coil;
RAB——非晶态合金应变计凸起部分的磁阻;R AB ——Reluctance of convex part of amorphous alloy strain gauge;
RCD——被测材料表面CD段磁阻;R CD ——CD segment magnetoresistance on the surface of the tested material;
r0——应变计与被测材料之间气隙磁阻,如果二者附着紧密牢固,气隙磁阻可忽略。r 0 ——air gap reluctance between the strain gauge and the material to be tested. If the two are tightly attached, the air gap reluctance can be ignored.
lAB——应变计凸起部分的长度;μAB——非晶态合金绝对磁导率;l AB - the length of the raised part of the strain gauge; μ AB - the absolute magnetic permeability of the amorphous alloy;
h——非晶态合金应变计的厚度;h—thickness of amorphous alloy strain gauge;
b——非晶态合金应变计凸起部分的宽度;b——the width of the convex part of the amorphous alloy strain gauge;
lCD——被测材料表面CD间的长度;l CD - the length between CDs on the surface of the material to be tested;
μCD——被测材料的绝对磁导率;μ CD ——absolute magnetic permeability of the tested material;
α——磁力线在被测材料表面的渗透深度;α——The penetration depth of the magnetic field line on the surface of the material to be tested;
δ0——非晶态合金应变计与被测材料表面间的气隙厚度;δ 0 ——The thickness of the air gap between the amorphous alloy strain gauge and the surface of the tested material;
μ0——空气磁导率;μ 0 ——air magnetic permeability;
s0——非晶态合金应变计与被测材料表面间的附着长度。s 0 ——the attachment length between the amorphous alloy strain gauge and the surface of the tested material.
根据法拉第电磁感应定律知,测量线圈中的感应电压为According to Faraday's law of electromagnetic induction, the induced voltage in the measuring coil is
式中f——励磁电流频率;M2——测量线圈匝数。In the formula, f——exciting current frequency; M 2 ——number of turns of measuring coil.
根据压磁效应,当被测材料表面有应力作用时,对于λs>0的铁磁材料,应力为拉应力时,磁导率μ提高,即μAB变为μAB+ΔμAB,μCD变为μCD+ΔμCD,则磁阻降低;当应力为压应力时,即μAB变为μAB-ΔμAB,μCD变为μCD-ΔμCD,则磁阻增加。磁阻的变化引起磁通量变化,测量线圈中的感应电压U也会变化。According to the piezomagnetic effect, when there is stress on the surface of the material to be tested, for ferromagnetic materials with λ s > 0, when the stress is tensile stress, the magnetic permeability μ increases, that is, μ AB becomes μ AB + Δμ AB , μ CD When the stress becomes μ CD +Δμ CD , the magnetoresistance decreases; when the stress is compressive stress, that is, μ AB becomes μ AB -Δμ AB , and μ CD becomes μ CD -Δμ CD , the magnetoresistance increases. The change of reluctance causes the magnetic flux to change, and the induced voltage U in the measuring coil also changes.
由于非晶态合金的磁导率远大于普通铁磁测量的磁导率,另外,如果能严格保证气隙厚度δ0为零,则上式变为Since the magnetic permeability of amorphous alloys is much larger than that measured by ordinary ferromagnetic, in addition, if the air gap thickness δ 0 can be strictly guaranteed to be zero, the above formula becomes
即测量线圈中的输出感应电压与被测材料的表面磁特性无关。That is, the output induced voltage in the measuring coil has nothing to do with the surface magnetic properties of the measured material.
非晶态合金应变计与被测材料之间结合质量对应力测量精度有很大的影响。采用粘贴的方法将非晶态合金应变计附着于被测构件表面,简单、方便,便于现场操作,但要合理选择粘结剂,高质量地对结合面进行处理。所选粘结剂既要有很高的粘度,固化时又不应该产生较大的体积收缩,另外,与非晶态合金应变计材料,以及与被测构件材料之间的热膨胀悉数要一致,否则在应变计内部会产生不均匀应力,影响测量稳定性。参考目前常采用的金属粘结工艺,要先对应变计粘贴处用砂轮打磨,然后用一定浓度的硅酸钠溶液清洗浸泡数分钟,然后进行粘贴。The quality of bonding between the amorphous alloy strain gauge and the measured material has a great influence on the accuracy of stress measurement. Attaching the amorphous alloy strain gauge to the surface of the measured component by pasting is simple, convenient, and convenient for on-site operation, but it is necessary to choose a reasonable adhesive and treat the joint surface with high quality. The selected binder should not only have a high viscosity, but also should not produce a large volume shrinkage during curing. In addition, the thermal expansion between the amorphous alloy strain gauge material and the measured component material must be consistent. Otherwise, uneven stress will be generated inside the strain gauge, which will affect the measurement stability. Referring to the metal bonding process commonly used at present, the sticking part of the strain gauge should be polished with a grinding wheel, then cleaned and soaked with a certain concentration of sodium silicate solution for several minutes, and then pasted.
在测量应力之前,要对非晶态合金应变计灵敏度系数进行标定,即对同一类型材料制成的应变计,只选其中一个进行标定。Before measuring the stress, the sensitivity coefficient of the amorphous alloy strain gauge should be calibrated, that is, only one of the strain gauges made of the same type of material should be selected for calibration.
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CN102937705B (en) * | 2012-11-20 | 2015-07-08 | 重庆大学 | Direct-current magnetic sensor with composite structure |
CN104122324B (en) * | 2014-08-06 | 2016-09-07 | 淮海工学院 | A kind of steel wire rope Stress On-Line sensor |
CN113008419A (en) * | 2021-02-20 | 2021-06-22 | 浙江驰拓科技有限公司 | Magneto-resistance type integrated stress sensor and preparation method and application thereof |
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