CN100404203C - Preparation method of diamond grinding polishing sheet - Google Patents
Preparation method of diamond grinding polishing sheet Download PDFInfo
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- CN100404203C CN100404203C CNB2004100419721A CN200410041972A CN100404203C CN 100404203 C CN100404203 C CN 100404203C CN B2004100419721 A CNB2004100419721 A CN B2004100419721A CN 200410041972 A CN200410041972 A CN 200410041972A CN 100404203 C CN100404203 C CN 100404203C
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- diamond
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- grinding polishing
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention discloses a preparation method of a diamond grinding polishing sheet, which comprises the following steps: diamond gel balls are prepared by dropping sodium alginate salt solution with diamond super fineness powder in solution with Ca<2+> on the basis of the principle of chemical gel; the grinding polishing sheet is prepared by adding bonding agent in the gel balls and bonding up the gel balls. The preparation method of a diamond grinding polishing sheet can fundamentally solve the problem of the hard agglomeration of the diamond fineness powder in consolidation and can achieve the process of processing grinding polishing silicon sheets of diamond tools with high efficiency.
Description
Technical field
The present invention proposes the preparation method of a kind of silicon chip nanoprocessing with ultra-fine granularity diamond grinding and polishing sheet.
Background technology
The processing of silicon chip comprises multiple working procedures such as section, chamfering, grinding, burn into cleaning, polishing, but technological difficulties mainly concentrate on grinding.Owing to adopt free abrasive, grinding efficiency is low, and surface tear is serious, and rate of corrosion is difficult to stable control in the erosion removal scoring layer process, silicon chip surface precision after not only influence is ground, increase final polishing time, abrasive waste liquid and burn into clean waste liquid also can serious environment pollution.Therefore, countries such as U.S., day, moral begin diamond abrasive is anchored at the large-sized silicon wafers of grinding and polishing 300mm in the bond.But, adopt size little to 1-5 μ m with interior ultra-fine diamond abrasive material, the non-uniform Distribution of abrasive particle in bond that causes because of the reunion of ultra-fine abrasive material becomes the major obstacle that influences working (machining) efficiency.Because continued to use the powder metallurgical technique when the coarseness grinding tool is made in the manufacturing of grinding and polishing instrument, the uniform difficult problem of abrasive particle is solved as yet at all.
Summary of the invention
The preparation method who the purpose of this invention is to provide a kind of diamond grinding and polishing sheet, it can make diamond abrasive grain evenly distribute in bond.
Technical scheme of the present invention is such: a kind of preparation method of diamond grinding and polishing sheet, it is based on na alginate soln that the chemical gel principle will contain the diamond super fine and drips to and contain Ca
2+Solution in be prepared into the diamond gel ball, then above-mentioned gel ball is added binding agent and bonds to dry and be prepared into the grinding and polishing sheet at 60 ℃.
The maximum difference of the fixed manufacture method of the present invention and traditional diamond is, in advance the diamond super fine is positioned in the na alginate soln, through stirring, the diamond super fine can scatter in solution uniformly, and the na alginate soln that will contain the diamond super fine then drips to and contains Ca
2+Solution in, reaction generates the diamond gel ball, in the process of the manufacturing of gel ball, because gelation rate is very fast, is about 0.5-1 second, therefore can not cause the deposition of diadust.Gel ball adding binding agent with gained bonds again, just can make diamond grinding and polishing sheet after the oven dry.Method provided by the present invention can fundamentally solve the agglomeration traits of diadust in consolidation process, thereby can realize the high-efficiency milling and casting processing silicon chip of diamond tool.
The specific embodiment
The preparation method of a kind of diamond grinding and polishing of the present invention sheet, realize as follows:
The first step at normal temperatures and pressures, is that the diamond super fine of 1-5 micron is put into the sodium alginate soln that weight percent concentration is 1-5% with granularity, stirs with agitator, makes the diamond super fine can evenly disperse in sodium alginate soln.
Second step splashed into the sodium alginate soln that contains diamond superfine powder of first step gained in the calcium chloride solution that weight percent concentration is 0.5-2.0%, thereby formed the gel ball that contains diamond abrasive grain.
The 3rd goes on foot, and the weight percent concentration that the gel ball of gained adds as binding agent in going on foot second is in the sodium alginate soln of 2-3%, and gel ball is bonded together.
The 4th step, the good gel ball of bonding of the 3rd step gained to be put into baking oven dry, bake out temperature is 60 ℃, the oven dry back is carried out shaping with emery wheel to it, just obtains diamond grinding and polishing sheet.
Claims (5)
1. the preparation method of a diamond grinding and polishing sheet, it is characterized in that: the na alginate soln that will contain the diamond super fine drips to and contains Ca
2+Solution in be prepared into the diamond gel ball, then above-mentioned gel ball is added binding agent and bonds, the gel ball that above-mentioned bonding is good is put into baking oven dries at 60 ℃ and is prepared into the grinding and polishing sheet.
2. the preparation method of a kind of diamond grinding and polishing sheet according to claim 1 is characterized in that: the above-mentioned na alginate soln concentration that is weight percentage is the sodium alginate soln of 1-5%.
3. the preparation method of a kind of diamond grinding and polishing sheet according to claim 1 is characterized in that: the above-mentioned Ca of containing
2+The solution concentration that is weight percentage be the calcium chloride solution of 0.5-2.0%.
4. the preparation method of a kind of diamond grinding and polishing sheet according to claim 1 is characterized in that: the above-mentioned binding agent concentration that is weight percentage is the sodium alginate soln of 2-3%.
5. the preparation method of a kind of diamond grinding and polishing sheet according to claim 1 is characterized in that: the granularity of above-mentioned diamond super fine is 1-5 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100419721A CN100404203C (en) | 2004-09-08 | 2004-09-08 | Preparation method of diamond grinding polishing sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100419721A CN100404203C (en) | 2004-09-08 | 2004-09-08 | Preparation method of diamond grinding polishing sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1597259A CN1597259A (en) | 2005-03-23 |
| CN100404203C true CN100404203C (en) | 2008-07-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100419721A Expired - Fee Related CN100404203C (en) | 2004-09-08 | 2004-09-08 | Preparation method of diamond grinding polishing sheet |
Country Status (1)
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| CN (1) | CN100404203C (en) |
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| CN100417495C (en) * | 2006-04-30 | 2008-09-10 | 华侨大学 | Method for preparing ultrafine micro-powdered polishing film |
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| CN105081991A (en) * | 2015-08-27 | 2015-11-25 | 安徽威铭耐磨材料有限公司 | High anti-corrosion and temperature-changing resistant cubic boron nitride (CBN) grinding wheel with superfine granularity and preparation method thereof |
| CN105196192A (en) * | 2015-08-27 | 2015-12-30 | 安徽威铭耐磨材料有限公司 | Tourmaline-containing high-activity high-porosity superfine-granularity CBN grinding wheel and preparation method thereof |
| CN105127915A (en) * | 2015-08-27 | 2015-12-09 | 安徽威铭耐磨材料有限公司 | High-grinding precision and high-strength CBN grinding wheel with ultrafine granularity and containing nanometer carbon fibers and preparation method thereof |
| CN105108664A (en) * | 2015-08-28 | 2015-12-02 | 安徽威铭耐磨材料有限公司 | High-grinding-precision ultra-fine granularity CBN grinding wheel with damping and noise reduction functions and preparing method thereof |
| CN105563353B (en) * | 2016-02-18 | 2018-05-22 | 郑州磨料磨具磨削研究所有限公司 | A kind of preparation method of vitrified bond fine granularity grinding tool |
| CN107502199B (en) * | 2017-08-29 | 2020-05-05 | 华侨大学 | Preparation method of surface single-layer abrasive particle gel ball |
| CN111673932B (en) * | 2020-04-21 | 2022-05-20 | 广州领拓仪器科技有限公司 | Preparation method of silicon wafer section sample |
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| CN1597259A (en) | 2005-03-23 |
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