CN100401026C - Laser energy meter - Google Patents
Laser energy meter Download PDFInfo
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- CN100401026C CN100401026C CNB2005101055356A CN200510105535A CN100401026C CN 100401026 C CN100401026 C CN 100401026C CN B2005101055356 A CNB2005101055356 A CN B2005101055356A CN 200510105535 A CN200510105535 A CN 200510105535A CN 100401026 C CN100401026 C CN 100401026C
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- energy meter
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- hollow chamber
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Abstract
The present invention discloses a laser energy meter. A detector, an amplifier electrically connected with the detector, and a signal output unit are arranged in a tubular metal casing in turn. A ceramic hollow cavity is arranged between a laser entrance port of the casing and the detector; the ceramic hollow cavity is a closed hollow cylindrical body; the axial direction of the cylindrical body is parallel to the direction that laser enters the casing. Because the present invention designs the diffusion type hollow cylindrical surface ceramic cavity as an attenuator before the detector, the laser transmits a uniform field after passing through the ceramic attenuation cavity; thus, a small-sized detector can be used for detecting any one position in the uniform field. Meanwhile, the local damage problem of the detector can be effectively avoided. The laser energy meter of the present invention can be used for measuring laser with high energy density.
Description
Technical field:
The invention belongs to the laser detection field, be specifically related to a kind of detector of laser energy.
Background technology:
In the laser detection process, the detection of laser energy is unusual part and parcel.Existing laser energy meter, comparatively advanced is as thermal detector with pyroelectric electric device, it has response speed and the sensitivity higher than general thermal detector, and only the temperature signal of alternation is had response output, therefore is suitable as very much pulsed laser radiation energy-probe spare.Under the situation of laser pulse width less than certain value (being generally hundreds of microseconds), its output signal is proportional to incident laser energy.But existing laser energy meter only can be measured the laser energy below hundred joules, and when exceeding this laser energy, detector wherein will cause damage; For adapting to the measurement of high-energy-density laser, existing solution is to add that before pyroelectric detector potsherd (referring to patent ZL9721512.4, Wang Weiping) makes the laser energy decay, thereby protects detector injury-free.This type of potsherd attenuator by the laser energy of reflecting part incident, weakens the outgoing energy, makes emitting laser present diffusive property simultaneously, reduces the energy density of shoot laser, thereby reduces the damage capability of laser.But the shortcoming of this method is an output intensity presents cosine distribution, also is outgoing light field non homogen field, and therefore requiring must be very close between detector and the ceramic attenuator sheet, and the area of detector must be more than or equal to the potsherd area, to receive whole energy.Under the bigger situation of incident laser beam diameter, for being difficult to obtain large-area detector, this method promptly can't be used.
Summary of the invention:
The object of the present invention is to provide and a kind ofly can improve the resisting laser damage ability, be suitable for the laser energy meter that the laser to high density energy detects, this laser energy meter can use the small size detector, is applicable to the detection to various incident laser light beams.
Laser energy meter provided by the invention, the amplifier and the signal output unit that in a tubular metal shell, be provided with detector successively, are electrically connected with this detector, and between the laser entrance port and described detector of described shell, be provided with a ceramic hollow chamber.
Described ceramic hollow chamber is the hollow cylinder of sealing, and it is parallel that axial and the laser of described cylinder enters housing direction;
Described ceramic hollow chamber column side face is connected with the metal shell inwall is closely knit, connects through common assembling.
The laser energy meter of said structure, the test surface size of described detector is unrestricted, generally can select in φ 5mm～φ 25mm.
The laser energy meter of said structure, described detector can place optional position, rear, described ceramic hollow chamber.As on the axis of rear, ceramic hollow chamber or the place of off-axis, apart from arbitrary position of ceramic hollow chamber 2～30mm.
The laser energy meter of said structure, described detector adopt the lead zirconate titanate pyroelectric electric device as sensor.
Adopt technique scheme, laser energy meter provided by the invention, owing to before detector, designed the hollow cylinder pottery of diffuse type chamber as attenuator, outgoing is uniform field after making laser through the ceramic attenuator chamber, the outgoing density of field energy than the ceramic wafer cosine distribution is more even, thereby can use the small size detector, and arbitrary position sensing that can be in this uniform field, thereby make on the designing technique of laser energy meter more feasible, can effectively avoid simultaneously the local damage problem of detector, make laser energy meter of the present invention can be used for the measurement of high-energy-density laser.
Description of drawings:
Fig. 1 is a structural representation of the present invention.
Embodiment:
The present invention is for overcoming the shortcoming of prior art, a kind of novel laser energy meter being provided.
Laser energy meter structure of the present invention is referring to Fig. 1, this laser energy is in respect of a tubular metal shell 1, rear portion in this shell 1, be equiped with detector 2, amplifier 3 and signal output unit 4 successively, and, front portion in this shell 1 (before referring to detector 2) is distance and position suitably, is equiped with a ceramic hollow chamber 5.
Described ceramic hollow chamber 5 is the hollow cylinder of sealing, and it is parallel that axial and the laser of described cylinder enters housing direction, and promptly the front surface in ceramic hollow chamber 5 receives the laser that enters outside housing 1; And ceramic hollow chamber 5 column side faces and closely knit connection of metal shell 1 inwall.
In the present invention, used detector 2 usefulness lead zirconate titanate pyroelectric electric devices are as sensor, detector 2 is by being electrically connected amplifier 3, amplifier 3 exports signal to an outernal display unit or computing unit by signal output unit 4 again, this part-structure be connected the technology that all can adopt existing laser energy meter, the present invention repeats no more.
The present invention adopts the hollow cylinder pottery of diffuse type chamber as attenuator, because the high reflectance that stupalith itself has, the major part of incident laser energy is directly by the diffuse reflection of cavity front surface, have only less energy to enter damping chamber, same because the high reflectance of stupalith, after making the light beam that incides in the chamber in the chamber, pass through repeatedly diffuse reflection, the uniform outgoing light field of final formation, therefore, the present invention can adopt the method Laser Measurement energy of sampling and measuring in its outgoing light field, thereby can select to satisfy measurement requirement, avoid the technological difficulties and the great number cost of development large area detector than the detector of small size.In addition, more even because the outgoing field is a uniform field than the outgoing density of field energy of prior art cosine distribution, effectively avoided the local damage problem.
The effect experiment
One, laser is through the experiment of different modes decay back outgoing field uniformity
Experimental technique: adopting a diameter is the photodetector of 2mm, Laser Measurement (beam diameter 5mm, energy 25mJ) incides outgoing light field behind the ceramic chamber attenuator of existing ceramic wafer attenuator (diameter 40mm) and the present invention (cylinder diameter 40mm) respectively, measurement point is respectively the center (optical axis) of laser emitting field and apart from position, 8mm upper and lower, left and right, this center, measurement result is as follows:
Table 1-1 detector distance attenuator exit facet 2mm
Can see from table 1-1 data, diverse location at the central optical axis of distance outgoing field, the laser intensity that detector records, ceramic wafer group relative deviation is 14%, and ceramic chamber group deviation only is 1.1%, this explanation is relatively poor through the laser light field homogeneity behind the ceramic wafer, and better through the laser light field homogeneity behind the ceramic chamber.
Table 1-2 detector distance attenuator exit facet 10mm
Can see from table 1-2 data, diverse location at the central optical axis of distance outgoing field, the laser intensity that detector records, ceramic wafer group relative deviation is 10%, and ceramic chamber group deviation is 1.4%, this explanation is relatively poor through the laser light field homogeneity behind the ceramic wafer, and better through the laser light field homogeneity behind the ceramic chamber.
Table 1-3 detector distance attenuator exit facet 30mm
Can see from table 1-3 data, diverse location at the central optical axis of distance outgoing field, the laser intensity that detector records, ceramic wafer group relative deviation is 23%, and ceramic chamber group deviation is 1.1%, this explanation is relatively poor through the laser light field homogeneity behind the ceramic wafer, and better through the laser light field homogeneity behind the ceramic chamber.
More than three groups of data show that the unevenness of laser light field behind ceramic wafer is maximum to surpass 20%, and through the unevenness of light field behind the present invention's pottery chamber within 1.4%; And laser is also relevant with detector distance attenuator exit facet distance through the unevenness of light field behind the ceramic wafer, and through light field homogeneity behind the ceramic chamber remain unchanged substantially (the numerical value deviation is within 1.4%).Thereby as can be seen, the emergent light homogeneity in ceramic attenuator chamber obviously is better than ceramic wafer.
This experimental verification laser be uniform field through outgoing behind the ceramic attenuator chamber of setting of the present invention, the outgoing density of field energy than the ceramic wafer cosine distribution is more even, thereby can use the small size detector, and arbitrary position sensing that can be in this uniform field, thereby make on the designing technique of laser energy meter more feasiblely, can effectively avoid the local damage problem of detector simultaneously.
Two, the resisting laser damage ability is measured
Method: solid state laser (wavelength 1064nm, output energy 800mJ, pulsewidth 8ns) output beam scioptics are converged, and move along optical axis in tested ceramic hollow chamber, because the beam diameter difference, and obtains different peak power densities at the diverse location place.Degree of impairment by measured piece surface after the stereomicroscope observation laser action.
Its peak power density that can bear has been measured in three ceramic hollow chambeies respectively, result such as table 2:
Table 2
| Ceramic hollow chamber numbering | 1# | 2# | 3# |
| Peak power density (MW/cm 2) | 405 | 447 | 431 |
Illustrate that the peak power density that the ceramic attenuator chamber can be born is higher than 400MW/cm
2, can be used for the measurement of high laser energy fully.
Claims (7)
1. laser energy meter, the amplifier and the signal output unit that in a tubular metal shell, be provided with detector successively, are electrically connected with this detector, it is characterized in that, between the laser entrance port and described detector of described shell, be provided with a ceramic hollow chamber;
Described ceramic hollow chamber is the hollow cylinder of sealing, and it is parallel that axial and the laser of described cylinder enters housing direction.
2. according to the described laser energy meter of claim 1, it is characterized in that described ceramic hollow chamber column side face is connected with the metal shell inwall is closely knit, connect through common assembling.
3. according to claim 1 or 2 described lasers energy meter, it is characterized in that described detector is to be selected from the detector that specification is arbitrary size of φ 5mm～φ 25mm.
4. according to claim 1 or 2 described lasers energy meter, it is characterized in that described detector places the position on the central axis of rear, described ceramic hollow chamber.
5. according to claim 1 or 2 described lasers energy meter, it is characterized in that described detector places the position of rear, described ceramic hollow chamber off-center axis.
6. according to claim 1 or 2 described lasers energy meter, it is characterized in that described detector is apart from the distance in the ceramic hollow chamber arbitrary place in 2～30mm scope.
7. according to claim 1 or 2 described lasers energy meter, it is characterized in that described detector adopts the lead zirconate titanate pyroelectric electric device as sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101055356A CN100401026C (en) | 2005-09-27 | 2005-09-27 | Laser energy meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101055356A CN100401026C (en) | 2005-09-27 | 2005-09-27 | Laser energy meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1740761A CN1740761A (en) | 2006-03-01 |
| CN100401026C true CN100401026C (en) | 2008-07-09 |
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| CNB2005101055356A Expired - Fee Related CN100401026C (en) | 2005-09-27 | 2005-09-27 | Laser energy meter |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101603859B (en) * | 2009-07-23 | 2010-07-28 | 北京理工大学 | Femtojoule level laser micro energy meter |
| CN101603860B (en) * | 2009-07-23 | 2010-11-10 | 北京理工大学 | Femtojoule level laser micro energy meter with optical system |
| CN101825491B (en) * | 2010-05-18 | 2012-07-04 | 江苏大学 | Method for detecting Q-switching energy and amplified spontaneous emission simultaneously for laser |
| CN102062636A (en) * | 2010-11-12 | 2011-05-18 | 中国兵器工业第二〇五研究所 | Portable site laser energy measuring device |
| CN102141436B (en) * | 2010-12-15 | 2012-07-04 | 北京理工大学 | Femtojoule-level laser micro energy meter having automatic tracking function |
| CN103453997B (en) * | 2013-09-04 | 2016-09-21 | 中国科学院上海光学精密机械研究所 | Wide spectrum weak pulse measurement of laser energy system |
| CN103528674A (en) * | 2013-09-29 | 2014-01-22 | 南京林业大学 | Method and device for widening measurement range of light intensity acquirer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2071334U (en) * | 1989-12-06 | 1991-02-13 | 中国科学院物理研究所 | Lead zirconium titanate heat discharge laser power meter |
| JPH07225150A (en) * | 1994-02-14 | 1995-08-22 | Mitsubishi Electric Corp | Laser beam detector |
| CN2290040Y (en) * | 1997-04-29 | 1998-09-02 | 王慰平 | Ceramic attenuation type laser energy gauge |
-
2005
- 2005-09-27 CN CNB2005101055356A patent/CN100401026C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2071334U (en) * | 1989-12-06 | 1991-02-13 | 中国科学院物理研究所 | Lead zirconium titanate heat discharge laser power meter |
| JPH07225150A (en) * | 1994-02-14 | 1995-08-22 | Mitsubishi Electric Corp | Laser beam detector |
| CN2290040Y (en) * | 1997-04-29 | 1998-09-02 | 王慰平 | Ceramic attenuation type laser energy gauge |
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| CN1740761A (en) | 2006-03-01 |
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