CN100394140C - Subdivision device of position detection signal - Google Patents
Subdivision device of position detection signal Download PDFInfo
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- CN100394140C CN100394140C CNB2006100199538A CN200610019953A CN100394140C CN 100394140 C CN100394140 C CN 100394140C CN B2006100199538 A CNB2006100199538 A CN B2006100199538A CN 200610019953 A CN200610019953 A CN 200610019953A CN 100394140 C CN100394140 C CN 100394140C
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Abstract
The invention discloses a kind of subdivision device of the location detecting signal. It includes a line source laser device, a light target, CCD, a signal treating device and two optical scanning lenses. The rotation axises of two lenses are set parallel on the same plane. The reflection surfaces are set oppositely. The normal direction and the plane on which is the rotation axises of two optical scanning lenses form 45degreeangle. The line emergent laser beam of the line source laser device is vertical with the plane on which is the rotation axises of two optical scanning lenses. The line laser beam radiates into the reflection surface of the lens and goes through the rotation axis. The light target is on the parallel plane with the plane on which is the rotation axises of two optical scanning lenses. CCD is on the other side of the light target and parallel with the plane on which is the rotation axises of two optical scanning lenses. The signal treating device is connected with CCD and used to receive CCD signal and treat data. The invention adopts fourfold frequency subdivision circuit to realize the high power subdivision of the location detecting signal in one cycle and increase the distinguishability and the measure precision of the location detecting device.
Description
Technical field
The invention belongs to the location detecting technology field, be specifically related to a kind of subdividing device of position detection signal, particularly can carry out the device of high power segmentation the position detection signal of motion execution unit.
Background technology
Position detecting device is mainly used in the measurement of straight-line displacement and angular displacement, is the important component part of numerically-controlled machine, fine measuring instrument and robot system.Especially in the closed loop numerically-controlled machine, its machining precision is determined by the precision of position detecting system to a great extent.Position detecting device has forms such as rotary transformer, inductosyn, stop position pick-up unit, magnetic scale position detecting device and pulse encoder, and the position detection signal of its output mostly is two-way sine and cosine signal.
For improving the resolving power and the accuracy of detection of position detecting device, under the technical conditions of existing position detecting device, people have carried out deep research to the divided method of position detecting device output signal.Be subdivided into example with grating chi position detection signal, the electronic subdivision method of Moire fringe is divided into amplitude modulation(PAM) segmentation, phase modulation (PM) segmentation and phase locking frequency multiplying segmentation.The amplitude modulation(PAM) segmentation comprises that quadruple segmentation, vector calculus segmentation, the segmentation of shifting resistance chain and amplitude division formula are electronic fine-grained.The phase modulation (PM) close classification comprises carrier modulation method and electron scanning method etc.Segmentation of shifting resistance chain and the electronic fine-grained application of amplitude division formula are comparatively extensive, generally are used to segment under the lower situation of multiple.The quadruple segmentation can realize reversible counting and dynamic and static measurement to four times of segmentations of signal.The circuit of quadruple segmentation is simple, and signal is not had strict demand.It is many electronic fine-grained bases that the signal of quadruple close classification obtains method.
Requiring the segmentation of signal high power, adopting phase locking frequency multiplying segmentation and carrier modulation segmentation usually.Phase locking frequency multiplying segments the segmentation that phaselock technique is used for Moire fringe, adopts the phase locked track frequency multiplier to realize frequency multiplication and phase locked track, reach the purpose that high power is segmented with simple circuit, but it can only be used for kinetic measurement, and require grating speed substantially constant.When the change of grating movement velocity makes the frequency input signal variation exceed certain limit, just can cause phase lock circuitry to can't lock phase signal, segmentation can't correctly be carried out.The carrier modulation segmentation is modulated the two-way input signal with one group of auxiliary carrier signal that exchanges, two paths of signals addition after the modulation is after mirror zero shaping, delivering to phase comparator with the standard sine signal compares mutually, obtain the square wave that the pulsewidth corresponding with the phasing degree is H, insert high-frequency impulse in pulsewidth is the square wave of H, the umber of pulse of filling down with the counter meter has promptly realized phase subdivision.But it is quite strict that it requires quality of signals, and since its again phase place is segmented with phase demodulation method detected phase, the factor of influential phase place all will bring error to segmentation.When signal quality was bad, the practical significance that carries out the high power segmentation was little.
Summary of the invention
Technical matters to be solved by this invention is, a kind of subdividing device of position detection signal is provided, and this subdividing device combines with the quadruple sub-circuit, can be used for dynamic and static measurement, can improve the resolving power and the measuring accuracy of position detecting device.
The subdividing device of a kind of position detection signal provided by the invention is characterized in that: this device comprises line source laser instrument, first optical scan vibration lens, light target, charge-coupled device, signal processor and second optical scan vibration lens; The rotation axis O of first optical scan vibration lens
1Rotation axis O with second optical scan vibration lens
2Parallel placement in same plane, the reflecting surface of first optical scan vibration lens and second optical scan vibration lens is staggered relatively, and first optical scan vibration lens and second optical scan vibration lens normal direction of initial position separately are parallel, separately the normal direction of initial position and angle at 45, plane, two optical scan vibration lens rotation axis places; The linear laser beam of line source laser instrument is perpendicular to the rotation axis O of two scanning galvanometers
1And O
2The plane, place, the reflecting surface of linear laser beam directive first optical scan vibration lens and by its pivot center; Light target and is positioned at pivot center O with two galvanometers between second optical scan vibration lens and charge-coupled device
1And O
2In the parallel plane plane, place, charge-coupled device is positioned on the exit direction behind the linear laser beam directive light target, and with the rotation axis O of two galvanometers
1And O
2The place plane parallel is placed; Signal processor links to each other with CCD, and the signal that is used to the to obtain CCD line data of going forward side by side is handled.
The present invention has overcome the shortcoming of existing position detection signal high power subdividing device, and segmentation can only be used for kinetic measurement and require the movement velocity substantially constant as phase locking frequency multiplying; Carrier modulation segmentation phase demodulation method detected phase, but to the demand on signal quality strictness.Position detection signal after the present invention adopts line source laser instrument, high speed optical scanning galvanometer and light target to carrier modulation carries out conversion, obtain the deviation post of light signal on light target after the conversion by charge-coupled device, realize the high power segmentation of signal again in conjunction with the quadruple close classification.The present invention combines with the quadruple sub-circuit, can realize the high power segmentation to the position detection signal in the one-period, thereby improves the resolving power and the measuring accuracy of position detecting device.
Description of drawings
Fig. 1 is the structural representation of subdividing device of the present invention;
Fig. 2 is the flow chart of data processing figure of signal processor;
Fig. 3 is the synoptic diagram of an example of subdividing device of the present invention;
Fig. 4 is that the peak excursion of luminous point on the light target is apart from D
MaxWith the phasing degree
Corresponding relation figure.
Embodiment
The present invention is further described below in conjunction with drawings and Examples.
As shown in Figure 1, apparatus of the present invention comprise line source laser instrument 1, first optical scan vibration lens 2, light target 3, charge-coupled device (CCD) 4, signal processor 5 and second optical scan vibration lens 6.The rotation axis O of first optical scan vibration lens 2
1Rotation axis O with second optical scan vibration lens 6
2Parallel placement in same plane.The reflecting surface of first optical scan vibration lens 2 and second optical scan vibration lens 6 is staggered relatively, and first optical scan vibration lens 2 and second optical scan vibration lens 6 normal direction of initial position separately are parallel, normal direction and angle at 45, plane, two optical scan vibration lens rotation axis places.The linear laser beam of line source laser instrument 1 is perpendicular to the rotation axis O of two scanning galvanometers
1And O
2The plane, place, the reflecting surface of linear laser beam directive first optical scan vibration lens 2 and by its pivot center.Light target 3 is placed on pivot center O with two galvanometers
1And O
2In the parallel plane plane, place.Along the rear of the light target 3 of optical path direction, with the rotation axis O of two galvanometers
1And O
2Place CCD4 in the parallel plane plane, place, and make the rotating shaft direction of the CCD cell orientation of wire perpendicular to galvanometer.Connect signal processor 5 behind the CCD4, after signal processor 5 obtains the signal of CCD4,, just can carry out amplitude division formula high power signal subdivision in conjunction with the signal of quadruple sub-circuit.
CCD4 can adopt line array CCD or area array CCD, but is good with line array CCD.Signal processor 5 can adopt single-chip microcomputer or DSP to realize.
Two-way quadrature sine and cosine output signal with position detecting device
With
Use carrier signal A respectively
2Cos ω t and A
2Sin ω t carries out carrier modulation and addition, obtains modulating the back signal
A=A wherein
1* A
2The carrier signal Asin ω t that amplitude is amplified is added on first optical scan vibration lens 2, simultaneously with modulation signal
Be added on second optical scan vibration lens 6, the deflection angle that makes two galvanometers changes according to input signal amplitude rule separately.The linear laser beam that the line source laser instrument sends is mapped on the light target 3 after first optical scan vibration lens 2 and 6 reflections of second optical scan vibration lens.Laser beam is because of the periodic deflection of first optical scan vibration lens 2 and second optical scan vibration lens 6 produces periodic scanning motion up and down, and the linear laser beam that can be observed level on light target 3 comes flyback retrace up and down at a high speed.Obtain the deviation range of laser beam flying campaign on the light target 3 with CCD4, adjust the position of the relative light target 3 of CCD4, make luminous point peak excursion more than the luminous point initial position of light target 3 apart from D
MaxThe interval is imaged on the pixel as much as possible of CCD4.
If the corner input signal of first optical scan vibration lens 2 and second optical scan vibration lens 6 be respectively Asin ω t and
The corner phase of input signals differs a phasing degree
Be the phasing degree of position detection signal.The following formula of can deriving as calculated:
Wherein, c is the spacing of the rotation axis of two optical scan vibration lens, and d is the plane at light target 3 places and the pivot center O of two optical scan vibration lens
1And O
2Distance between the plane at place; D is the offset distance of luminous point on the light target 3 when luminous point is with respect to two galvanometer initial positions on a certain moment light target 3, θ
1=Asin ω t,
The maximal value D of the offset distance D of the luminous point when luminous point is with respect to two galvanometer initial positions on the light target 3
MaxWith the phasing degree
Become monotonic functional relationship in two intervals of [0 π] and [π 2 π], the image that CCD4 is received is handled and can be obtained D
MaxObtain the phasing degree by the quadruple sub-circuit
Interval on 0～2 π, signal processor 5 is according to the phasing degree
Search in this interval D in the interval at place
Max-
Curve carries out the D that amplitude division obtains in advance
Max-
Table obtains D according to dull corresponding relation
MaxPairing phasing degree
, the multiple of signal subdivision is by to D
Max-
Curve carries out the multiple decision of amplitude division.
The corner input signal of first optical scan vibration lens 2 and second optical scan vibration lens 6 can be according to the position detecting device output signal different, be taken as θ respectively
1=Asin ω t and
Or θ
1=Acos ω t and
Different angles deflection input signal θ for two galvanometers
1And θ
2, can draw D according to above-mentioned formula
MaxWith the phasing degree
Dull corresponding relation in each is interval, thus pairing phasing degree obtained
According to inner laser bundle offset distance maximal value D between each phase region
MaxWith the phasing degree
Monotonic functional relationship, determine that current peak excursion is apart from D
MaxPairing phasing degree.By to peak excursion apart from D
MaxAmplitude division formula high power segmentation, realize the high power segmentation of position detection signal.
The quadruple sub-circuit is used for realizing the counting and the sensing of four times of segmentations, and between the phase region at definite current demand signal phasing degree, doubly segments for superelevation and prepares.This device obtains according to the result of quadruple segmentation between the phase region at signal phase angle [0 π] or [π 2 π], and according to the D on this interval
Max-
Table carries out the high power segmentation with this interval.The counting of semiperiod is carried out in the quadruple segmentation, and this device carries out the counting of high power segmentation in the half period.Counting combination with the high power segmentation in the semiperiod of the semiperiod counting of quadruple segmentation and this device just can realize high power segmentation and dynamic and static measurement to signal.
Example:
Grating chi moire frange signal is segmented, and after adding the respective angles defection signal on two optical scan vibration lens, the index path after the galvanometer deflection in a certain moment as shown in Figure 3.Distance between the rotation axis of first optical scan vibration lens 2 and second optical scan vibration lens 6 is 30mm, distance is 30mm between the rotation axis of two optical scan vibration lens and the light target 3, the width of first optical scan vibration lens 2 is 5mm, and the width of second optical scan vibration lens 6 is 50mm.Output signal on second optical scan vibration lens 6 after the loading wave modulation
Loading wave signal kU on first optical scan vibration lens 2
mSin ω t.Obtaining the scope that luminous point on the light target 3 departs from the ultimate range of initial position according to above-mentioned formula is 10.26～38.56mm.Line array CCD 4 is 4096 pixels (10 * 5 μ m, its spacing are 10 μ m), and the total length of its CCD unit is 40.96mm.The luminescent spot track that the 28.30mm of the above 10.26mm of luminous point initial position on the light target 3～38.56mm scope is long is imaged on 3000 pixels in centre of line array CCD.Consider the segmentation homogeneity adjustment of peak excursion apart from amplitude division, can with
[0 π] or [π 2 π] segments more than 1000 times between the location, angle,
Whole interval on just realized the segmentation more than 2000 times, reached the purpose of the high power segmentation of position detection signal.
The distance D that the scanning motion that Figure 4 shows that light beam on the light target 3 departs from initial position with
Corresponding relation, every vertical line is represented two defection signal phase phasic differences of galvanometer
The time, the luminescent spot track scope of CCD in the process of defection signal variation one-period.As shown in Figure 4,
The angle is on [0 π] and [π 2 π] interval the time, and the peak excursion of luminous point is apart from D on the light target 3
MaxWith
Become monotonic functional relationship, so this subdividing device need combine and differentiates with quadruplicated frequency circuit
The interval, on [0 π] and [π 2 π] interval according to D
MaxWith
Monotonic functional relationship signal is segmented.Adjusting of rotation axis that the peak excursion of luminous point distance can be by adjusting distance c between two optical scan vibration lens, two optical scan vibration lens on the light target 3 and light target 3 apart from d and the amplitude size that is added in two angular deflection signals on two optical scan vibration lens.Owing to utilize peak excursion to laser spot apart from D
MaxCarry out amplitude division formula segmentation, for the CCD pixel that makes full use of line array CCD 4 to improve measurement resolution, the scope of the unidirectional peak excursion distance of luminous point on the light target is imaged on the pixel as much as possible.
In above-mentioned example, on first optical scan vibration lens 2, apply angular deflection signal θ
1=Asin ω t applies the angular deflection signal on second optical scan vibration lens 6
After, resulting corresponding to each out of phase angle
On the light target 3 luminous point the scanning shift scope.When on first optical scan vibration lens 2, applying angular deflection signal θ
1=Acos ω t applies the angular deflection signal on second optical scan vibration lens 6
After, because the phase differential of two angular deflection signals is constant still be
So the peak excursion of luminous point is apart from D on the light target 3
MaxWith the phasing degree
Corresponding relation also as shown in Figure 4.
Claims (1)
1. the subdividing device of a position detection signal, it is characterized in that: this device comprises line source laser instrument (1), first optical scan vibration lens (2), light target (3), charge-coupled device (4), signal processor (5) and second optical scan vibration lens (6); The rotation axis O of first optical scan vibration lens (2)
1Rotation axis O with second optical scan vibration lens (6)
2Parallel placement in same plane, first optical scan vibration lens (2) is staggered relatively with the reflecting surface of second optical scan vibration lens (6), and first optical scan vibration lens (2) and second optical scan vibration lens (6) normal direction of initial position separately are parallel, separately the angle at 45, plane, two rotation axis places of the normal direction of initial position and two optical scan vibration lens; The linear laser beam-emergence direction of line source laser instrument (1) is perpendicular to the rotation axis O of two scanning galvanometers
1And O
2The plane, place, the reflecting surface of linear laser beam directive first optical scan vibration lens (2) and by its pivot center; Light target (3) is positioned at the pivot center O with two galvanometers
1And O
2In the parallel plane plane, place; Charge-coupled device (4) is positioned on the exit direction behind the linear laser beam directive light target (3), and with the rotation axis O of two galvanometers
1And O
2The place plane parallel is placed;
Signal processor (5) links to each other with charge-coupled device (4), and the signal that is used to obtain charge-coupled device (4) line data of going forward side by side is handled.
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| CN104280879A (en) * | 2013-07-09 | 2015-01-14 | 厦门超旋光电科技有限公司 | Laser performance system |
| CN103994973B (en) * | 2014-06-16 | 2017-06-16 | 中国农业大学 | A kind of Raman spectrum detection head and detection method |
| CN104020153B (en) * | 2014-06-16 | 2017-02-01 | 中国农业大学 | Raman spectrum detection system and method |
| CN104913734B (en) * | 2015-06-17 | 2018-03-02 | 西安交通大学 | A kind of mirror-vibrating line laser structured light apparatus for measuring three-dimensional profile and method |
| CN110686773B (en) * | 2019-11-08 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | Solar irradiance simulation light source based on laser galvanometer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223003A (en) * | 1982-06-21 | 1983-12-24 | Hitachi Ltd | Measuring method utilizing optical interference |
| CN1458535A (en) * | 2003-05-07 | 2003-11-26 | 天津大学 | Active laser scanning far distance coordinate detecting method |
| CN2758757Y (en) * | 2004-10-27 | 2006-02-15 | 天津大学 | FS laser clamping device for trapping biological cells |
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- 2006-08-09 CN CNB2006100199538A patent/CN100394140C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58223003A (en) * | 1982-06-21 | 1983-12-24 | Hitachi Ltd | Measuring method utilizing optical interference |
| CN1458535A (en) * | 2003-05-07 | 2003-11-26 | 天津大学 | Active laser scanning far distance coordinate detecting method |
| CN2758757Y (en) * | 2004-10-27 | 2006-02-15 | 天津大学 | FS laser clamping device for trapping biological cells |
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Assignee: Wuhan Zhongguang Connector Co., Ltd. Assignor: Huazhong University of Science and Technology Contract fulfillment period: 2009.10.12 to 2014.10.12 contract change Contract record no.: 2009420000111 Denomination of invention: Subdivision device of position detection signal Granted publication date: 20080611 License type: Exclusive license Record date: 20091020 |
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Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.10.12 TO 2014.10.12; CHANGE OF CONTRACT Name of requester: WUHAN ZHONGGUANG CONNECTOR CO., LTD. Effective date: 20091020 |