CN103994973B - A kind of Raman spectrum detection head and detection method - Google Patents
A kind of Raman spectrum detection head and detection method Download PDFInfo
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- CN103994973B CN103994973B CN201410267191.8A CN201410267191A CN103994973B CN 103994973 B CN103994973 B CN 103994973B CN 201410267191 A CN201410267191 A CN 201410267191A CN 103994973 B CN103994973 B CN 103994973B
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Abstract
The present invention provides a kind of Raman spectrum detection head and detection method, including：Light shield, light shield includes slit and detection mirror, and slit is used to make Raman diffused light outgoing to sample, and makes the flashlight that sample surfaces are produced inject, and detection mirror is used for output signal light；Also include in light shield：Laser line light source, for launching linear laser；Filtering optical filter, for filtering the Rayleigh scattering light in linear laser, remaining Raman diffused light；Beam splitting filter, for Raman diffused light to be reflexed into scanning mirror, and makes the flashlight that scanning mirror is reflected back by detecting mirror outgoing；Scanning mirror, scanning mirror reflects the Raman diffused light reflected by beam splitting filter by mode of reciprocating vibration, to obtain uniform wire Raman diffused light, slit outgoing is passed to sample surfaces, and the flashlight of the Raman detection of the sample surfaces generation that will be injected through slit reflexes to beam splitting filter.The present invention can carry out quick mobile detection and signal acquisition to sample.
Description
Technical field
The present invention relates to field of optical detection, more particularly to a kind of Raman spectrum detection head and detection method.
Background technology
Raman scattering be light by medium when the frequency that causes because incident light and molecular motion interact become
The scattering of change, Raman spectrum is often used in characterizing the architectural feature of molecule, also referred to as " dactylogram " of molecule.Raman spectrum skill
Art analysis means mainly have the technologies such as Fourier transformation, high temperature, resonance, surface enhanced, confocal microscopy, solid optoacoustic.Raman light
Spectrum has a wide range of applications in many fields, and especially it can provide quick, simple, lossless, repeatable qualitative, quantitative point
Analysis technology, without cumbersome pre-treatment step, it is to avoid destruction to sample, realizes the rapid of examination speed.Certainly draw
Graceful technology there is also some shortcomings, and such as spectral peak is easily overlapped, and easily be influenceed by factors such as instrument parameters, and when determining, tool is fluorescent
During material, fluorescence can be produced to disturb, Ramam effect is too weak, about 10-6 times of incident intensity.Although the quick hair of nanometer technology
Open up as Raman spectrum detection provides new direction, but strengthened the weaker limitation of Raman signal by means of nanometer technology and also had
Treat in in-depth study.
In the prior art, a spectral detection can only be carried out using Raman technology, it is because Raman signal is fainter and glimmering
Light background signal is stronger, thus while Raman spectrum has very big advantage for the chemical bond identification of material, but often
Because test limit can not reach standard method, i.e. gas-phase spectrum and the spectrometric minimum content test limit of liquid phase, cause fixed
Also there is clearly disadvantageous and inferior position in amount analysis.Also, the detection means of Raman spectrum is complex, to optical path requirements compared with
Height, and movement is not easy to, the practical application to Raman detection causes certain obstruction.
The content of the invention
(1) technical problem to be solved
The present invention provides Raman spectrum detection head and detection method, can only be carried out a little with solving Raman technology in the prior art
Spectral detection, and detection means is not easy to mobile technical problem.
(2) technical scheme
In order to solve the above technical problems, the present invention provides a kind of Raman spectrum detection head, including：Light shield, the shading
Cover includes slit and detection mirror, and the slit is used to make Raman diffused light outgoing to sample, and makes what the sample surfaces were produced
Flashlight is injected, and the detection mirror is used for flashlight described in outgoing；
Also include in the light shield：
Laser line light source, for launching linear laser；
Filtering optical filter, for filtering the Rayleigh scattering light in the linear laser, remaining Raman diffused light；
Beam splitting filter, for will reflex to scanning mirror by the Raman diffused light of the filtering optical filter, and makes scanning
The flashlight that mirror is reflected back is by the detection mirror outgoing；
Scanning mirror, the scanning mirror reflects the Raman reflected by the beam splitting filter and dissipates by mode of reciprocating vibration
Light is penetrated, to obtain uniform wire Raman diffused light, the slit outgoing is passed to sample surfaces, and will be injected through slit
The flashlight of Raman detection that produces of sample surfaces reflex to the beam splitting filter.
Further, also include between the laser line light source and the filtering optical filter：
Collimation lens, the linear laser collimation for the laser line light source to be launched is converged as uniform directional light.
Further, the laser line light source is：
785nm laser line light sources, the laser rays of peak power output 5w, maximum output 1mm × 20cm long.
Further,
The laser line light source includes multiple laser point light sources being arranged in a row.
Further,
The laser line light source includes 9 laser point light sources being arranged in a row.
Further,
The laser line light source, collimation lens, filtering optical filter and beam splitting filter are sequentially distributed point-blank；
The scanning mirror, beam splitting filter and detection mirror are sequentially distributed on the another straight line vertical with the straight line；
The scanning mirror and beam splitting filter are parallel to each other, respectively with this two straight lines in angle of 45 degrees.
Further, the light shield also includes：
Handle, for moving and carrying the detection head.
On the other hand, the present invention also provides a kind of Raman spectra detection process, using the Raman light described in as above any one
Spectrum detection head carries out Raman spectrum detection, including：
Linear laser is launched by laser line light source；
Using the Rayleigh scattering light filtered during optical filter filters the linear laser, remaining Raman diffused light；
Raman diffused light after filtering is reflexed into scanning mirror using beam splitting filter；
The Raman diffused light is reflected by mode of reciprocating vibration using scanning mirror, uniform wire Raman scattering is obtained
Light, by uniform wire Raman diffused light by the slit outgoing of light shield to sample surfaces；
The flashlight for making uniform wire Raman diffused light be radiated at the Raman detection of sample surfaces generation is entered by slit
Scanning mirror is incident upon, the flashlight is reflected after beam splitting filter by the detection mirror outgoing on light shield using scanning mirror.
(3) beneficial effect
It can be seen that, in the Raman spectrum detection head and detection method that the present invention is provided, laser line light source, filtering are filtered
Piece, beam splitting filter and scanning mirror are integrated in the light shield of Raman spectrum detection head, there is provided a kind of portable integrated drawing
Graceful spectral detection head, can carry out quick mobile detection and signal acquisition to sample.Also, the present invention is by linear laser to sample
Product are detected, the technical problem that a spectral detection can only be carried out in the Raman detection technology of prior art are solved, with very
Application value high.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are this hairs
Some bright embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can be with root
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the basic structure schematic diagram of embodiment of the present invention Raman spectrum detection head；
Fig. 2 is a preferred structure schematic diagram of embodiment of the present invention Raman spectrum detection head；
Fig. 3 is the basic procedure schematic diagram of embodiment of the present invention Raman spectra detection process.
Specific embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
The embodiment of the present invention provides a kind of Raman spectrum detection head first, referring to Fig. 1, including：Light shield 1, light shield 1 is wrapped
Slit 2 and detection mirror 3 are included, slit 2 is used to make Raman diffused light outgoing to sample 4, and makes the flashlight that the surface of sample 4 produces penetrate
Enter, detection mirror 3 is used for output signal light；
Also include in light shield 1：
Laser line light source 5, for launching linear laser；
Filtering optical filter 6, for filtering the Rayleigh scattering light in linear laser, remaining Raman diffused light；
Beam splitting filter 7, for will reflex to scanning mirror 8 by the Raman diffused light of filtering optical filter 6, and makes scanning mirror
8 flashlights being reflected back are by detecting the outgoing of mirror 3；
Scanning mirror 8, scanning mirror 8 reflects the Raman diffused light reflected by beam splitting filter 7 by mode of reciprocating vibration,
To obtain uniform wire Raman diffused light, the outgoing of slit 2 to the surface of sample 4, and the sample that will be injected through slit 2 are passed to
The flashlight of the Raman detection that 4 surfaces produce reflexes to beam splitting filter 7.
In order to obtain more uniform linear laser, it is preferable that can be between laser line light source 5 and filtering optical filter 6
Including：Collimation lens 9, is shown in Fig. 2, and the linear laser collimation for laser line light source 5 to be launched is converged as uniform directional light.
Preferably, laser line light source 5 can be：785nm laser line light sources, its peak power output is 5w, laser output
The laser rays of 1mm (MAX) × 20cm long.
Preferably, the laser point light source that laser line light source 5 can be arranged in a row by multiple pools line source to excite,
Wherein, the number of laser point light source can be 9.
Preferably, as shown in Fig. 2 laser line light source 5, collimation lens 9, filtering optical filter 6 and beam splitting filter 7 can be according to
Secondary distribution is point-blank；And scanning mirror 8, beam splitting filter 7 and detection mirror 3 can be sequentially distributed vertical with above-mentioned straight line
Another straight line on；Wherein scanning mirror 8 and beam splitting filter 7 is parallel to each other, respectively with this two straight lines in angle of 45 degrees.And
And, because the Raman diffused light of the reflection of scanning mirror 8 needs to be shone on sample 4 by slit 2, the flashlight on the surface of sample 4
Need to be incided on scanning mirror 8 by slit 2, therefore, scanning mirror 8, slit 2 and sample 4 are also sequentially distributed point-blank,
Scanning mirror 8 is by of reciprocating vibration in being circulated centered on 45 degree of angles with straight line.
In order that the Raman spectrum detection head obtained in the embodiment of the present invention is easy to carry and moves, it is preferable that on light shield 1
Handle can also be included, so that the sample for being directed to different occasions carries out quick mobile inspection using the Raman spectrum detection head of integrated form
Survey and signal acquisition.
Wherein, sample 4 can be placed in two dimension flat by the Raman spectrum detection head in the embodiment of the present invention when sample is detected
Move on sample stage, it is whole to obtain so as to carry out two-dimensional laser line scanning to its whole surface by moving in two dimensional directions sample 4
The profile information of individual sample surfaces, obtains more comprehensive accurate Raman spectrum detection data.
The embodiment of the present invention also provides a kind of Raman spectra detection process, is examined using the Raman spectrum in the embodiment of the present invention
Gauge head carries out Raman spectrum detection, such as Fig. 3, and specific steps include：
Step 301：Linear laser is launched by laser line light source；
Step 302：Using the Rayleigh scattering light filtered during optical filter filters the linear laser, remaining Raman diffused light；
Step 303：Raman diffused light after filtering is reflexed into scanning mirror using beam splitting filter；
Step 304：The Raman diffused light is reflected by mode of reciprocating vibration using scanning mirror, uniform wire is obtained
Raman diffused light, by uniform wire Raman diffused light by the slit outgoing of light shield to sample surfaces；
Step 305：The flashlight for making uniform wire Raman diffused light be radiated at the Raman detection of sample surfaces generation leads to
Cross slit and be incident to scanning mirror, the flashlight is reflected after beam splitting filter by the detection mirror on light shield using scanning mirror
Outgoing.
It can be seen that, the embodiment of the present invention at least has the advantages that：
In Raman spectrum detection head provided in an embodiment of the present invention and detection method, laser line light source, filtering are filtered
Piece, beam splitting filter and scanning mirror are integrated in the light shield of Raman spectrum detection head, there is provided a kind of portable integrated drawing
Graceful spectral detection head, can carry out quick mobile detection and signal acquisition to sample.Also, the embodiment of the present invention is swashed by wire
Light detects to sample, solves the technical problem that a spectral detection can only be carried out in the Raman detection technology of prior art,
With application value very high.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
The present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those within the art that：It still may be used
Modified with to the technical scheme described in foregoing embodiments, or equivalent is carried out to which part technical characteristic；
And these modification or replace, do not make appropriate technical solution essence depart from various embodiments of the present invention technical scheme spirit and
Scope.
Claims (6)
1. a kind of Raman spectrum detection head, it is characterised in that including：Light shield, the light shield includes slit and detection mirror, institute
Slit is stated for making Raman diffused light outgoing to sample, and makes the flashlight that the sample surfaces are produced inject, the detection mirror
For flashlight described in outgoing；
Also include in the light shield：
Laser line light source, for launching linear laser；
Filtering optical filter, for filtering the Rayleigh scattering light in the linear laser, remaining Raman diffused light；
Beam splitting filter, for will reflex to scanning mirror by the Raman diffused light of the filtering optical filter, and makes scanning mirror anti-
The flashlight being emitted back towards is by the detection mirror outgoing；
Scanning mirror, the scanning mirror reflects the Raman scattering reflected by the beam splitting filter by mode of reciprocating vibration
Light, to obtain uniform wire Raman diffused light, be passed to the slit outgoing to sample surfaces, and will be injected through slit
The flashlight of the Raman detection that sample surfaces are produced reflexes to the beam splitting filter；
Also include between the laser line light source and the filtering optical filter：Collimation lens, for the laser line light source to be sent out
The linear laser collimation penetrated is converged as uniform directional light；
The laser line light source, collimation lens, filtering optical filter and beam splitting filter are sequentially distributed point-blank；
The scanning mirror, beam splitting filter and detection mirror are sequentially distributed on the another straight line vertical with the straight line；
The scanning mirror and beam splitting filter are parallel to each other, respectively with this two straight lines in angle of 45 degrees；The scanning mirror with
Straight line is of reciprocating vibration in being circulated centered on 45 degree of angles.
2. Raman spectrum detection head according to claim 1, it is characterised in that the laser line light source is：
785nm laser line light sources, the laser rays of peak power output 5w, maximum output 1mm × 20cm long.
3. Raman spectrum detection head according to claim 1, it is characterised in that：
The laser line light source includes multiple laser point light sources being arranged in a row.
4. Raman spectrum detection head according to claim 3, it is characterised in that：
The laser line light source includes 9 laser point light sources being arranged in a row.
5. Raman spectrum detection head according to any one of claim 1 to 4, it is characterised in that the light shield is also wrapped
Include：
Handle, for moving and carrying the detection head.
6. a kind of Raman spectra detection process, it is characterised in that using the Raman light as any one of claim 1 to 5
Spectrum detection head carries out Raman spectrum detection, including：
Linear laser is launched by laser line light source；
Using the Rayleigh scattering light filtered during optical filter filters the linear laser, remaining Raman diffused light；
Raman diffused light after filtering is reflexed into scanning mirror using beam splitting filter；
The Raman diffused light is reflected by mode of reciprocating vibration using scanning mirror, uniform wire Raman diffused light is obtained,
By uniform wire Raman diffused light by the slit outgoing of light shield to sample surfaces；
The flashlight for making uniform wire Raman diffused light be radiated at the Raman detection of sample surfaces generation is incident to by slit
Scanning mirror, the flashlight is reflected after beam splitting filter by the detection mirror outgoing on light shield using scanning mirror.
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| CN201410267191.8A CN103994973B (en) | 2014-06-16 | 2014-06-16 | A kind of Raman spectrum detection head and detection method |
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| CN104390952A (en) * | 2014-12-15 | 2015-03-04 | 中国科学院重庆绿色智能技术研究院 | Linear focus Raman scattering probe |
| CN106706597A (en) * | 2017-01-10 | 2017-05-24 | 上海理工大学 | Device and method for detecting platelet-derived growth factor based on raman spectrum |
| CN109073559B (en) * | 2018-01-16 | 2020-10-09 | 深圳达闼科技控股有限公司 | Method and terminal for Raman detection of substance to be detected |
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| WO2004058058A1 (en) * | 2002-12-30 | 2004-07-15 | Koninklijke Philips Electronics N.V. | Analysis apparatus and method |
| CN101166957A (en) * | 2004-04-30 | 2008-04-23 | 阿胡拉公司 | Method and apparatus for conducting Raman spectroscopy |
| US7659977B2 (en) * | 2006-04-21 | 2010-02-09 | Intel Corporation | Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS) |
| CN100394140C (en) * | 2006-08-09 | 2008-06-11 | 华中科技大学 | Subdivision device of position detection signal |
| US20100220316A1 (en) * | 2008-07-14 | 2010-09-02 | Moshe Finarov | Method and apparatus for thin film quality control |
| CN102773610A (en) * | 2012-06-07 | 2012-11-14 | 江阴德力激光设备有限公司 | Device and method for labeling ultraviolet laser in transparent material |
| CN103111756B (en) * | 2013-02-05 | 2015-09-09 | 余振新 | The laser optical path guidance system of laser sintering and moulding equipment |
| CN103760146B (en) * | 2014-01-03 | 2016-09-07 | 中国农业大学 | A kind of noncontact composition detection system and method for powder |
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