CN100385700C - 弧形的电激活致动器 - Google Patents

弧形的电激活致动器 Download PDF

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Publication number
CN100385700C
CN100385700C CNB028267052A CN02826705A CN100385700C CN 100385700 C CN100385700 C CN 100385700C CN B028267052 A CNB028267052 A CN B028267052A CN 02826705 A CN02826705 A CN 02826705A CN 100385700 C CN100385700 C CN 100385700C
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CN
China
Prior art keywords
actuator
edge
bending
electro
segment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028267052A
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English (en)
Chinese (zh)
Other versions
CN1623240A (zh
Inventor
R·托普利斯
N·巴尔索德
M·R·舍菲尔德
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1 Ltd
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1 Ltd
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Publication date
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Publication of CN1623240A publication Critical patent/CN1623240A/zh
Application granted granted Critical
Publication of CN100385700C publication Critical patent/CN100385700C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
CNB028267052A 2001-11-02 2002-10-30 弧形的电激活致动器 Expired - Fee Related CN100385700C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0126372.2A GB0126372D0 (en) 2001-11-02 2001-11-02 Curved electro-active actuators
GB0126372.2 2001-11-02

Publications (2)

Publication Number Publication Date
CN1623240A CN1623240A (zh) 2005-06-01
CN100385700C true CN100385700C (zh) 2008-04-30

Family

ID=9925052

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028267052A Expired - Fee Related CN100385700C (zh) 2001-11-02 2002-10-30 弧形的电激活致动器

Country Status (8)

Country Link
US (1) US7161279B2 (https=)
EP (1) EP1446844A2 (https=)
JP (1) JP2005507323A (https=)
KR (1) KR20040064268A (https=)
CN (1) CN100385700C (https=)
AU (1) AU2002335981A1 (https=)
GB (1) GB0126372D0 (https=)
WO (1) WO2003038920A2 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732998B2 (en) * 2006-08-03 2010-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Telescoping cylindrical piezoelectric fiber composite actuator assemblies
JP5123532B2 (ja) * 2007-01-30 2013-01-23 太陽誘電株式会社 マイクロカンチレバー
JP2009055683A (ja) * 2007-08-24 2009-03-12 Toshiba Corp 圧電駆動型ｍｅｍｓ装置および携帯端末
DE102009002631B4 (de) * 2009-04-24 2015-08-20 Michael Förg Piezoelektrischer Antrieb und Mikroventil mit einem solchen
GB201014511D0 (en) * 2010-09-01 2010-10-13 Herrera Derek Drill pipe connection
CN105453289A (zh) * 2013-07-08 2016-03-30 株式会社村田制作所 致动器
EP3344872B1 (en) * 2015-08-31 2019-06-19 Koninklijke Philips N.V. Actuator or sensor device based on an electroactive or photoactive polymer
JP6464317B2 (ja) * 2015-09-02 2019-02-06 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 電気活性または光活性ポリマーをベースにしたアクチュエータデバイス
WO2017069701A1 (en) 2015-10-21 2017-04-27 Agency For Science, Technology And Research Ultrasound transducer and method of forming the same
US10587210B2 (en) * 2016-03-14 2020-03-10 Ron Varghese Energy sensing and harvesting cantilever
RU2636255C2 (ru) * 2016-04-14 2017-11-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор изгибного типа
EP3620895B1 (en) * 2018-09-04 2022-07-13 Robert Bosch GmbH Reversible actuator, method for producing and device using the same
WO2022233289A1 (zh) * 2021-05-07 2022-11-10 宁波舜宇光电信息有限公司 摄像模组、光学致动器、感光组件及其制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0550829A1 (de) * 1991-12-05 1993-07-14 Hoechst CeramTec Aktiengesellschaft Verfahren zum Herstellen monolithischer Vielschichtverbunde für Aktuatoren aus ferroelektrischer Keramik
US5719462A (en) * 1993-02-05 1998-02-17 Nikon Corporation Ultrasonic motor having improved stator
US6107726A (en) * 1997-07-25 2000-08-22 Materials Systems, Inc. Serpentine cross-section piezoelectric linear actuator

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS612376A (ja) 1984-06-14 1986-01-08 Ngk Spark Plug Co Ltd シ−ト状圧電体
US5102236A (en) * 1987-05-29 1992-04-07 Ide Russell D Hydrodynamic bearings having a continuous beam mounted support surface
WO1998007183A2 (en) * 1996-07-25 1998-02-19 Materials Systems Incorporated Serpentine cross section piezoelectric actuator
US6161270A (en) * 1999-01-29 2000-12-19 Eastman Kodak Company Making printheads using tapecasting
US6337465B1 (en) * 1999-03-09 2002-01-08 Mide Technology Corp. Laser machining of electroactive ceramics
ATE308096T1 (de) * 2001-02-09 2005-11-15 Koninkl Philips Electronics Nv Ultraschallwandler und verfahren zur herstellung eines ultraschallwandlers
US7486004B2 (en) * 2001-10-30 2009-02-03 1 . . . Limited Piezolelectric devices
US7005781B2 (en) * 2002-12-11 2006-02-28 J. G. Smits Devices for rotation using piezoelectric benders

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0550829A1 (de) * 1991-12-05 1993-07-14 Hoechst CeramTec Aktiengesellschaft Verfahren zum Herstellen monolithischer Vielschichtverbunde für Aktuatoren aus ferroelektrischer Keramik
US5719462A (en) * 1993-02-05 1998-02-17 Nikon Corporation Ultrasonic motor having improved stator
US6107726A (en) * 1997-07-25 2000-08-22 Materials Systems, Inc. Serpentine cross-section piezoelectric linear actuator

Also Published As

Publication number Publication date
WO2003038920A3 (en) 2003-11-06
WO2003038920A2 (en) 2003-05-08
GB0126372D0 (en) 2002-01-02
CN1623240A (zh) 2005-06-01
US20050073218A1 (en) 2005-04-07
JP2005507323A (ja) 2005-03-17
US7161279B2 (en) 2007-01-09
AU2002335981A1 (en) 2003-05-12
KR20040064268A (ko) 2004-07-16
EP1446844A2 (en) 2004-08-18

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080430

Termination date: 20091130