CN100382980C - Nanometer imprinting method of biological stencil - Google Patents
Nanometer imprinting method of biological stencil Download PDFInfo
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- CN100382980C CN100382980C CNB2005101363145A CN200510136314A CN100382980C CN 100382980 C CN100382980 C CN 100382980C CN B2005101363145 A CNB2005101363145 A CN B2005101363145A CN 200510136314 A CN200510136314 A CN 200510136314A CN 100382980 C CN100382980 C CN 100382980C
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Abstract
The present invention relates to a nanometer imprinting method of a biological stencil, which has the main technical process that firstly, a layer of imprinting glue is coated on the surface of a silicon chip and is dried; the biological stencil is arranged on the surface of the imprinting glue in the way that one surface with a nanometer structure faces down, and the other silicon chip covers on the biological stencil; then the biological stencil is put into a nanometer imprinting device to carry out imprinting under the heating and pressurization conditions, and a minus structure corresponding to the biological stencil is obtained on the surface of the imprinting glue after the biological stencil is drawn, and thereby, the duplication of the nanometer structure on the biological surface and the imitation of special functions are realized. The present invention directly serves the nanometer structure on the biological surface existing in the natural world as the nanometer imprinting stencil, and therefore, the complex technique for preparing the normal stencil is avoided. Moreover, the structure of the biological surface is formed with a natural anti-blocking layer in the growing course, which can further simplify the process and reduce the cost. The biological stencil used by the present invention can be imprinted for many times, can be repeatedly used and can realize large-area nanometer structure preparation.
Description
Technical field
The present invention relates to a kind of improved nanometer embossing, belong to the nanostructured preparing technical field.
Technical background
Nanometer embossing is a kind of and diverse nanostructured technology of preparing of conventional lithographic techniques notion of rising middle nineteen nineties in last century.This technology extrudes the figure of thickness contrast on the resist thin layer of substrate-loading by the method for pressing mold, adopt the anisotropic etching that figure is transferred to substrate then, have high-resolution, large tracts of land, high efficiency, remarkable advantage (Science, 272 (1996) 85) cheaply.The shape and the resolution ratio of copy pattern depend on template, and therefore, the selection of mould material and preparation technology thereof are the keys that whole technique realizes.At present, the material of nano-imprint stamp is mainly semi-conducting materials such as silicon and silica, and preparation technology generally adopts electron beam or Ion Beam Lithography Technology, needs technologies such as experience exposure, development, reactive ion etching, metal deposit and peel off.And template also need be carried out anti-stick processing before impression, produces defective to avoid the template and the bonding of impression glue (PMMA).
There are many biological surface nanostructureds with specific function in occurring in nature.These surface nano-structures are that biotic population passes through very long evolution differentiation and has special biological function at nature, with their existence closely bound up (PeteVukusic and J.Roy Sambles, Nature 424 (2003) 852-855).For example, the coniform array nanostructured of compound eye of some insect and the hexagonal array of wing rule of surface (is also referred to as photonic crystal, as shown in Figure 1) have very strong antireflection effect in ultraviolet and visible light wave range, the regular nanostructured that the butterfly's wing scale had can produce diffraction, interference and scattering process and cause schemochrome at visible light wave range.Above-mentioned these have the biological surface structure of specific function or its similar structures not only has enough intensity and stability can directly be used as nano-imprint stamp, and have formed one deck nature anti-sticking layer in growth course.
Summary of the invention
The object of the present invention is to provide a kind of nano-imprinting method, the biological surface nanostructured that directly exists with nature is a nano-imprint stamp, and the preparation nanostructured realizes the imitation of duplicating itself and specific function of biological surface nanostructured.
Nanometer imprinting method of biological stencil main processes of the present invention following (as shown in Figure 2):
(1) is coated with one deck impression glue and dry in a silicon chip surface;
(2) biological template is had one of nanostructured and faces down and place impression glue surface, and on the biological template surface cover another silicon chip;
(3) putting into nano-imprinting apparatus impresses under the heating pressurized conditions;
(4) move back behind the mould and obtain and the corresponding minus structure of biological template nanostructured, finish whole imprint process process in impression glue surface.
The used impression glue of nanometer imprinting method of biological stencil of the present invention is generally polymethyl methacrylate, and (polymethylmethacrylate PMMA) waits thermoplastic organic polymer, is spun on the dry 30～60min of 160～180 ℃ of bakings in back on the silicon chip; Biological template comprises photonic crystal and other similar biological surface structure on insect compound eye and wing surface.Imprint temperature is 150～220 ℃, and pressure is 40～55bar, and the impression time is 2～5min.
The present invention directly prepares nanostructured with the biological surface structure with specific function that nature exists as nano-imprint stamp, has avoided the complicated technology of conventional template preparation, realizes the imitation of duplicating itself and specific function of biological surface nanostructured; Simultaneously, the biological surface structure has formed one deck nature anti-sticking layer in growth course, be template, can further simplify technology, reduce cost, promote the competitiveness of nanometer embossing; And the used biological template of the present invention can carry out multi-impression, reuses; This technology also can realize large-area nanostructured preparation.
Description of drawings
Fig. 1 is the electromicroscopic photograph of cicada's wings surface nano-structure.
Fig. 2 is the process chart of biological template method nano-imprinting method.
Fig. 3 is the electromicroscopic photograph that impresses the back nanometer minus structure that obtains in impression glue surface with biological template.
Among the figure:
1-silicon chip 2-impression glue 3-biological template
The specific embodiment
(1) the cicada's wings ultrasonic cleaning 5min in acetone that will grow up, ultrasonic cleaning 2min in ultra-pure water places the air air dry again.
(2) impress glue PMMA in cleaning back silicon chip surface spin coating, and through dry 30 minutes of 170 ℃ of bakings;
(3) will cleaning also, dried cicada's wings places impression glue PMMA surface, and at the silicon chip of the same size of biological template surface cover a slice, then print is put into nano-imprinting apparatus and under 190 ℃, 40bar condition, impressed 3min, after glue separates with impression with biological template, obtain and the corresponding minus structure of biological template in impression glue surface, as shown in Figure 3.
(1) the cicada's wings ultrasonic cleaning 5min in acetone that will grow up, ultrasonic cleaning 2min in ultra-pure water places the air air dry again.
(2) impress glue PMMA in cleaning back silicon chip surface spin coating, and through 160 ℃ of dry 55min of baking;
(3) will cleaning also, dried cicada's wings places impression glue surface, and at the silicon chip of the same size of biological template surface cover a slice, then print is put into nano-imprinting apparatus and under 150 ℃, 55bar condition, impressed 5min, after glue separates with impression with biological template, obtain and the corresponding minus structure of biological template in impression glue surface.
(1) the cicada's wings ultrasonic cleaning 5min in acetone that will grow up, ultrasonic cleaning 2min in ultra-pure water places the air air dry again.
(2) impress glue PMMA in cleaning back silicon chip surface spin coating, and through dry 30 minutes of 180 ℃ of bakings;
(3) will cleaning also, dried cicada's wings places impression glue surface, and at the silicon chip of the same size of biological template surface cover a slice, then print is put into nano-imprinting apparatus and under 170 ℃, 45bar condition, impressed 2min, after glue separates with impression with biological template, obtain and the corresponding minus structure of biological template in impression glue surface.
Claims (6)
1. a nano-imprinting method comprises the steps:
(1) is coated with one deck impression glue and dry in a silicon chip surface;
(2) the biological surface nanostructured that exists with nature is a template, template is had one of nanostructured face down and place impression glue surface, and cover another silicon chip at template surface;
(3) putting into nano-imprinting apparatus impresses under the heating pressurized conditions;
(4) move back behind the mould and obtain and the corresponding minus structure of biological surface nanostructured in impression glue surface.
2. the method for claim 1, it is characterized in that: described impression glue is thermoplastic organic polymer.
3. method as claimed in claim 2 is characterized in that: described thermoplastic organic polymer is a polymethyl methacrylate.
4. method as claimed in claim 3 is characterized in that: described step (1) is for being spun on polymethyl methacrylate 160～180 ℃ of dry 30～60min of baking behind the silicon chip surface.
5. the method for claim 1, it is characterized in that: described biological surface nanostructured is the photonic crystal on insect compound eye or wing surface.
6. the method for claim 1, it is characterized in that: imprint temperature is 150～220 ℃, and pressure is 40～55bar, and the impression time is 2～5min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101363145A CN100382980C (en) | 2005-12-31 | 2005-12-31 | Nanometer imprinting method of biological stencil |
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| CNB2005101363145A CN100382980C (en) | 2005-12-31 | 2005-12-31 | Nanometer imprinting method of biological stencil |
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| CN1799857A CN1799857A (en) | 2006-07-12 |
| CN100382980C true CN100382980C (en) | 2008-04-23 |
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Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101866958A (en) * | 2010-05-14 | 2010-10-20 | 河海大学常州校区 | Biomimetic antireflection film of solar cell and preparation method thereof |
| CN101859066B (en) * | 2010-06-02 | 2012-07-04 | 河南大学 | Nano imprint template based on surface structure of biological material and preparation method thereof |
| CN103576451A (en) * | 2013-11-08 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Method for duplicating micro-nanostructure |
| CN104155710B (en) * | 2014-09-05 | 2017-02-15 | 山东理工大学 | Method for manufacturing large-area and high-accuracy thin film type grating device through whole butterfly wing |
| CN105425266B (en) * | 2015-11-03 | 2018-08-28 | 同济大学 | A kind of preparation method of photonic crystal plastic scintillant |
| CN106527043B (en) * | 2016-11-22 | 2018-07-03 | 同济大学 | A kind of method that stamping technique prepares large area photon scintillation crystal |
| CN106758537B (en) * | 2017-01-24 | 2018-12-25 | 南京大学 | A kind of anti-reflection transparent paper |
| KR102449520B1 (en) | 2017-09-29 | 2022-09-29 | 나이키 이노베이트 씨.브이. | Structurally-colored articles and methods of making and using structurally-colored articles |
| CN109807049B (en) * | 2019-01-26 | 2020-04-07 | 南京航空航天大学 | Bio-based super-hydrophobic anti-icing coating with array microstructure and preparation method thereof |
| WO2020263362A1 (en) | 2019-06-26 | 2020-12-30 | Nike Innovate C.V. | Structurally-colored articles and methods for making and using structurally-colored articles |
| WO2021021562A1 (en) | 2019-07-26 | 2021-02-04 | Nike, Inc. | Structurally-colored articles and methods for making and using structurally-colored articles |
| US11889894B2 (en) | 2020-08-07 | 2024-02-06 | Nike, Inc. | Footwear article having concealing layer |
| US11129444B1 (en) | 2020-08-07 | 2021-09-28 | Nike, Inc. | Footwear article having repurposed material with concealing layer |
| US11241062B1 (en) | 2020-08-07 | 2022-02-08 | Nike, Inc. | Footwear article having repurposed material with structural-color concealing layer |
Citations (4)
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| US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
| CN1565848A (en) * | 2003-07-03 | 2005-01-19 | 郭佳儱 | Microstructure manufacturing method combining light hardening molding |
| CN1199805C (en) * | 2001-09-19 | 2005-05-04 | 东南大学 | Polyurethane molecular seal and its making method |
| CN1678956A (en) * | 2002-08-27 | 2005-10-05 | 奥博杜卡特股份公司 | Device for transferring a pattern to an object |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5772905A (en) * | 1995-11-15 | 1998-06-30 | Regents Of The University Of Minnesota | Nanoimprint lithography |
| CN1199805C (en) * | 2001-09-19 | 2005-05-04 | 东南大学 | Polyurethane molecular seal and its making method |
| CN1678956A (en) * | 2002-08-27 | 2005-10-05 | 奥博杜卡特股份公司 | Device for transferring a pattern to an object |
| CN1565848A (en) * | 2003-07-03 | 2005-01-19 | 郭佳儱 | Microstructure manufacturing method combining light hardening molding |
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