CN100371770C - A focusing device in laser ablation microanalysis - Google Patents
A focusing device in laser ablation microanalysis Download PDFInfo
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- CN100371770C CN100371770C CNB2006100575409A CN200610057540A CN100371770C CN 100371770 C CN100371770 C CN 100371770C CN B2006100575409 A CNB2006100575409 A CN B2006100575409A CN 200610057540 A CN200610057540 A CN 200610057540A CN 100371770 C CN100371770 C CN 100371770C
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- lens
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- 238000000608 laser ablation Methods 0.000 title claims abstract description 19
- 238000004452 microanalysis Methods 0.000 title 1
- 238000004458 analytical method Methods 0.000 claims abstract description 18
- 238000002679 ablation Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 8
- 239000004065 semiconductor Substances 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Laser Beam Processing (AREA)
Abstract
本发明涉及为激光烧蚀微区分析提供的一种聚焦装置,由激光三角测量系统、信号采集处理系统和样品移动定位系统组成。本发明采用激光三角测量原理,半导体激光器作为光发射源,CCD传感器作为光接收元件,三角测量结果经分析处理获得被分析样品与烧蚀用激光聚焦镜头的相对位置,并与给定的聚焦位置进行比较,利用比较结果控制步进电机驱动样品工作台完成烧蚀用激光在被分析样品表面的自动准确聚焦。
The invention relates to a focusing device provided for laser ablation micro-area analysis, which is composed of a laser triangulation measurement system, a signal collection and processing system and a sample moving positioning system. The invention adopts the principle of laser triangulation measurement, the semiconductor laser is used as the light emitting source, and the CCD sensor is used as the light receiving element. The triangulation measurement result is analyzed and processed to obtain the relative position of the analyzed sample and the laser focusing lens for ablation, and compares with the given focus position The comparison is made, and the comparison result is used to control the stepper motor to drive the sample workbench to complete the automatic and accurate focusing of the ablation laser on the surface of the analyzed sample.
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2006100575409A CN100371770C (en) | 2006-03-14 | 2006-03-14 | A focusing device in laser ablation microanalysis |
Applications Claiming Priority (1)
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CNB2006100575409A CN100371770C (en) | 2006-03-14 | 2006-03-14 | A focusing device in laser ablation microanalysis |
Publications (2)
Publication Number | Publication Date |
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CN1815295A CN1815295A (en) | 2006-08-09 |
CN100371770C true CN100371770C (en) | 2008-02-27 |
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Family Applications (1)
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CNB2006100575409A Active CN100371770C (en) | 2006-03-14 | 2006-03-14 | A focusing device in laser ablation microanalysis |
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CN (1) | CN100371770C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101413788B (en) * | 2007-10-19 | 2010-11-24 | 财团法人工业技术研究院 | Surface topography measuring method and device thereof |
RU2447468C2 (en) * | 2010-04-02 | 2012-04-10 | Учреждение Российской академии наук Конструкторско-технологический институт научного приборостроения Сибирского отделения РАН | Method for automatic focusing of operating radiation on 3d optical surface |
CN103411958B (en) * | 2013-08-08 | 2014-06-18 | 哈尔滨工业大学 | Device and method for dynamic testing of material ablation rate |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003073812A (en) * | 2001-08-28 | 2003-03-12 | Masaki Yamamoto | Laser ablation device |
JP2004090081A (en) * | 2002-09-03 | 2004-03-25 | Japan Science & Technology Corp | Method and apparatus for controlling laser ablation in solution |
US20040102764A1 (en) * | 2000-11-13 | 2004-05-27 | Peter Balling | Laser ablation |
EP1482342A1 (en) * | 1999-10-07 | 2004-12-01 | Agilent Technologies Inc. (a Delaware Corporation) | Apparatus and method for autofocus |
US20050061779A1 (en) * | 2003-08-06 | 2005-03-24 | Walter Blumenfeld | Laser ablation feedback spectroscopy |
-
2006
- 2006-03-14 CN CNB2006100575409A patent/CN100371770C/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1482342A1 (en) * | 1999-10-07 | 2004-12-01 | Agilent Technologies Inc. (a Delaware Corporation) | Apparatus and method for autofocus |
US20040102764A1 (en) * | 2000-11-13 | 2004-05-27 | Peter Balling | Laser ablation |
JP2003073812A (en) * | 2001-08-28 | 2003-03-12 | Masaki Yamamoto | Laser ablation device |
JP2004090081A (en) * | 2002-09-03 | 2004-03-25 | Japan Science & Technology Corp | Method and apparatus for controlling laser ablation in solution |
US20050061779A1 (en) * | 2003-08-06 | 2005-03-24 | Walter Blumenfeld | Laser ablation feedback spectroscopy |
Non-Patent Citations (1)
Title |
---|
An auto-focus system for reproducible focusing in laserablation inductively coupled plasma mass spectrometry. HERVE COUSIN et al.Spectrochimica Acta,Vol.50B No.1. 1995 * |
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Publication number | Publication date |
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CN1815295A (en) | 2006-08-09 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Beijing NCS Analytical Instruments Co., Ltd. Assignor: Central Iron & Steel Research Institute Contract fulfillment period: 2007.12.15 to 2013.12.15 contract change Contract record no.: 2008990000631 Denomination of invention: Focusing device for laser ablation microarea analysis Granted publication date: 20080227 License type: Exclusive license Record date: 2008.10.8 |
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LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.12.15 TO 2013.12.15; CHANGE OF CONTRACT Name of requester: BEIJING NAKE ANALYTICAL INSTRUMENT CO., LTD. Effective date: 20081008 |
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EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Beijing NCS Analytical Instruments Co., Ltd. Assignor: Central Iron & Steel Research Institute Contract record no.: 2008990000631 Date of cancellation: 20120828 |
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ASS | Succession or assignment of patent right |
Owner name: NCS TESTING TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: INST OF IRON + STEEL Effective date: 20121126 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121126 Address after: 100081 Beijing Haidian District sorghum Bridge oblique Street No. 13 Patentee after: NCS Testing Technology Co., Ltd. Address before: 100081 Haidian District Institute of South Road, Beijing, No. 76 Patentee before: Central Iron & Steel Research Institute |
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CP01 | Change in the name or title of a patent holder |
Address after: No. 13, sorghum Bridge, Beijing, Beijing, Haidian District Patentee after: The detection technology of NCS Limited by Share Ltd Address before: No. 13, sorghum Bridge, Beijing, Beijing, Haidian District Patentee before: NCS Testing Technology Co., Ltd. |
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CP01 | Change in the name or title of a patent holder |