CN108344758A - A kind of portable micro-beam X-ray fluorescence spectrometer and application method of capillary focusing - Google Patents
A kind of portable micro-beam X-ray fluorescence spectrometer and application method of capillary focusing Download PDFInfo
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- CN108344758A CN108344758A CN201810025721.6A CN201810025721A CN108344758A CN 108344758 A CN108344758 A CN 108344758A CN 201810025721 A CN201810025721 A CN 201810025721A CN 108344758 A CN108344758 A CN 108344758A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
Abstract
The present invention relates to the portable micro-beam X-ray fluorescence spectrometers that a kind of capillary focuses, including：Shell, mounting plate and communication fixed frame；X-ray tube is installed in the shell, the capillary lens being connected with X-ray tube；X-ray detector is symmetrically installed with the capillary lens；CCD camera is installed perpendicular to horizontal plane；High pressure line provides high-voltage electricity by communicating fixed frame for X-ray tube, while CCD camera carries out communications by high pressure line with X-ray detector with extraneous；Mounting plate is removably mounted on upper part of the housing or side, for portable micro-beam X-ray fluorescence spectrometer to be installed to three-dimensional mobile platform or other positions；Laser pen and laser displacement sensor angle with horizontal plane are respectively 45 ° and are placed in CCD camera both sides.Application method is still further comprised.The present invention is a mini-plant by integrated design, and the equipment is light and handy, is moved easily, and can meet the requirement of in-site measurement.
Description
Technical field
The present invention relates to a kind of x-ray fluorescence analysis spectrometers, and in particular to the portable microbeam X that a kind of capillary focuses is penetrated
Line spectral fluorometer and application method.
Background technology
X-ray fluorescence analysis spectrometer is a kind of important analysis instrument measuring elemental composition and content, micro-beam X-ray fluorescence
Spectrometer is to be focused on the X-ray beam that X-ray source is sent out a bit using capillary X-ray lens, forms diameter tens or hundreds of
The focal spot of micron.Portable micro-beam X-ray fluorescence spectrometer is will to be developed using the characteristics of capillary X-ray lens focus X-ray
A novel instrument and equipment, small in volume is removable mainly for ancient pottery and porcelain, mineral etc. under control of the computer
Dynamic sample energy automatically scanning analysis.
Conventional micro-beam X-ray fluorescence spectrometer apparatus is as shown in Figure 1, by 1) x-ray source, 2) multiple capillary x-ray lens, 3)
CCD, 4) detector, 5) computer 6) kinetic control system, 7) compositions such as sample stage.X-ray source is usually point light source X-ray
Light pipe；Multiple capillary x-ray lens are used for focusing X-ray, form X-ray focal spot；CCD is for observing sample；Detector detects sample
The X-ray for being excited out；Computer is used for controlling the operation of each equipment and receives signal；Kinetic control system is for controlling
The movement of sample stage.Traditional micro-beam X-ray fluorescence spectrometer belongs to desk-top spectrometer, generally faces laboratory use, carries out sample survey
When amount, sample object measurement point is made to be overlapped with x-ray focal spot, the X-ray light spot size of irradiating sample is fixed.It is asked there are following
Topic：(1) volume is big, not easily shifted, cannot be satisfied the requirement of in-site measurement.(2) spot size of irradiating sample is fixed, target
When scanning big region, if hot spot is too small under conditions of high-resolution, it can take a long time；Target scan areas is smaller
When, if hot spot is excessive, measurement result resolution ratio can be caused relatively low.(3) sample surfaces out-of-flatness can make in scanning survey mistake
Sample object sensing point changes to lens outlet end distance in journey, and the X-ray light spot size of irradiating sample is caused to become
Change, influences the accuracy and resolution ratio of measurement result.
Invention content
In order to solve the problems, such as above-mentioned defect existing in the prior art and, the present invention proposes that a kind of capillary focuses portable
Decline beam X-ray spectral fluorometer.Can the laser displacement sensor of accurate measurement distance be integrated into the equipment, pass through control
Sample object sensing point selects the X-ray light spot size of irradiating sample to the distance of x-ray lens outlet end.In selected irradiation sample
After the X-ray light spot size of product, in scanning survey out-of-flatness or cambered sample surfaces, and it can be passed by laser displacement
Sensor controls sample object sensing point and does not change to x-ray lens outlet end distance, ensures that irradiating sample spot size is constant,
Improve measurement accuracy and resolution ratio.The present invention is achieved by the following technical solutions：
A kind of portable micro-beam X-ray fluorescence spectrometer that capillary focuses, including：Shell, mounting plate and communication fixed frame；
X-ray tube is installed in the shell, the capillary lens being connected with X-ray tube, the capillary lens angle with horizontal plane
It is 45 °；X-ray detector is symmetrically installed with the capillary lens, and angle with horizontal plane is 45 °；CCD camera perpendicular to
Horizontal plane is installed and the position among the capillary lens and X-ray detector；High pressure line is penetrated by communicating fixed frame for X
Spool provides high-voltage electricity, while CCD camera carries out communications by high pressure line with X-ray detector with extraneous；Peace
Loading board is removably mounted on upper part of the housing or side, for portable micro-beam X-ray fluorescence spectrometer to be installed to three-dimensional movement
Platform or other positions；Laser pen and laser displacement sensor angle with horizontal plane are respectively 45 ° and are placed in CCD camera two
Side.
Further, the portable micro-beam X-ray fluorescence spectrometer is connect by high pressure line with digital-to-analogue conversion cartoon letters,
And distance signal is become into digital signal by digital-to-analogue conversion card and passes to computer；The computer is by controlling the three-dimensional
The movement of sample stage so that the distance between the portable micro-beam X-ray fluorescence spectrometer and sample are maintained at 30mm-38mm；
And between so that the beam spot size of irradiating sample is 190.7-465 μm.
Further, the portable micro-beam X-ray fluorescence spectrometer is fixedly mounted in three-dimensional mobile platform, and sample is kept
It is motionless；Or sample is placed in three-dimensional mobile platform, portable micro-beam X-ray fluorescence spectrometer remains stationary as.
Further, signal is passed to controllor for step-by-step motor by the computer, and subsequent controllor for step-by-step motor will be believed
It number passes to stepper motor driver, then drives sample stage to XYZ tri- from stepper motor driver driving from a stepper motor
Direction moves.
Further, the laser displacement sensor precision is 20 microns.
Further, further include cooling fan, the cooling fan is 2, is separately mounted to the interior of shell upper end both sides
In portion's fan mounting groove.
Further, further include protective frame, the protective frame is mounted on the bottom of shell, for protecting the hair for stretching out shell
The outlet end of tubule lens and the receiving terminal of X-ray detector.
Further, the high pressure line is fixedly mounted by pipe joint with fixed frame is communicated.
Further, further include a kind of method of the portable micro-beam X-ray fluorescence spectrometer focused using capillary, it will just
It takes the beam X-ray spectral fluorometer that declines to be fixedly mounted in three-dimensional mobile platform, sample remains stationary as；Or sample is placed on three-dimensional
On mobile platform, portable micro-beam X-ray fluorescence spectrometer remains stationary as；By the movement for controlling the three-dimensional sample platform so that
The distance between the portable micro-beam X-ray fluorescence spectrometer and sample are maintained at 30mm-38mm；And make the beam of irradiating sample
Between spot size is 190.7-465 μm.
Further, the laser displacement sensor under control of the computer, adjusts sample and is measured point and hair in real time
The distance at tubule lens outlet end.
The present invention provide technical solution advantageous effect be：
(1) portable micro-beam X-ray fluorescence spectrometer conveniently moving, meets the requirement of a variety of measuring environments；
(2) more size X-rays are provided and irradiates hot spot, met different size measured zone and different size irradiation hot spot is wanted
It asks；
(3) scanning survey out-of-flatness or when cambered sample surfaces, sample is controlled by laser displacement sensor
Point is remained unchanged to lens outlet end distance, and the X-ray light spot size to ensure irradiating sample is constant, improves measurement result point
Resolution.
Description of the drawings
Fig. 1 is existing x-ray fluorescence spectrometer structural schematic diagram；
Fig. 2 is the structural schematic diagram of the portable micro-beam X-ray fluorescence spectrometer of the present invention；
Fig. 3 is that portable micro-beam X-ray fluorescence spectrometer and sample stage are a variety of with the use of schematic diagram；
Fig. 4 is that detector carries out effectively detection and target acquisition point to capillary X-ray lens outlet end distance relation figure；
Fig. 5 is spot diameter change schematic diagram within the scope of effective detection range；
Fig. 6 is distance L1 and laser displacement sensor to sample surfaces distance L2 of the lens outlet end to target acquisition point
Relation schematic diagram；
Fig. 7 is the structural schematic diagram of the portable micro-beam X-ray fluorescence spectrometer of the present invention.
Main appended drawing reference explanation：
1, portable micro-beam X-ray fluorescence spectrometer；2, sample；3, three-dimensional mobile platform；1-1, shell；1-2, cooling wind
Fan, 1-3, mounting plate；1-4, X-ray tube；1-5, capillary lens；1-6, CCD camera；1-7, X-ray detector；1-8 prevents
Retaining frame；1-9, high pressure line；1-10 communicates fixed frame.
Specific implementation mode
Referring to attached drawing 1, a kind of portable micro-beam X-ray fluorescence spectrometer that capillary focuses, including：Shell 1-1, mounting plate
1-3 and communication fixed frame 1-10；X-ray tube 1-4 is installed in the shell 1-1, the capillary being connected with X-ray tube 1-4 is saturating
Mirror 1-5, the capillary lens 1-5 angles with horizontal plane are 45 °；X-ray detector 1-7 and 1-5 pairs of the capillary lens
It is 45 ° to claim installation, angle with horizontal plane；CCD camera 1-6 is installed perpendicular to horizontal plane and is penetrated with the capillary lens 1-5 and X
Position among line detector 1-7；High pressure line 1-9 provides high-voltage electricity by communicating fixed frame 1-10 for X-ray tube 1-4, together
When CCD camera 1-6 and X-ray detector 1-7 pass through high pressure line 1-9 and carry out communications with extraneous；Mounting plate 1-3 can
It is releasably mounted on the tops shell 1-1 or side, it is three-dimensional mobile flat for portable micro-beam X-ray fluorescence spectrometer 1 to be installed to
Platform 3 or other positions；Laser pen and laser displacement sensor angle with horizontal plane are respectively 45 ° and are placed in CCD camera 1-6 two
Side.
Specifically, the portable micro-beam X-ray fluorescence spectrometer 1 passes through high pressure line 1-9 and digital-to-analogue conversion cartoon letters
Connection, and distance signal is become into digital signal by digital-to-analogue conversion card and passes to computer；The computer is by controlling institute
State the movement of three-dimensional sample platform 3 so that the distance between the portable micro-beam X-ray fluorescence spectrometer 1 and sample 2 are maintained at
30mm-38mm；And between so that the beam spot size of irradiating sample is 190.7-465 μm.
Specifically, the portable micro-beam X-ray fluorescence spectrometer 1 is fixedly mounted in three-dimensional mobile platform 2, sample 2
It remains stationary as；Or sample 2 is placed in three-dimensional mobile platform 3, portable micro-beam X-ray fluorescence spectrometer 1 remains stationary as.
Specifically, signal is passed to controllor for step-by-step motor 8 by the computer 7, subsequent controllor for step-by-step motor 8 will
Signal passes to stepper motor driver 9, then from the driving of stepper motor driver 9 from 3 stepper motors drive sample stages 4 to
Tri- direction movements of XYZ.
Specifically, the laser displacement sensor precision is 20 microns.
Specifically, further including cooling fan 1-2, the cooling fan is 2, is separately mounted to the upper ends shell 1-1 two
In the internal fan mounting groove of side.
Specifically, further including protective frame 1-8, the protective frame 1-8 is mounted on the bottom of shell 1-1, is stretched for protecting
Go out the receiving terminal of the outlet end and X-ray detector 1-7 of the capillary lens 1-5 of shell 1-1.
Specifically, the high pressure line 1-9 is fixedly mounted by pipe joint with fixed frame 1-10 is communicated.
It is a mini-plant that the present invention, which will pass through integrated design,.The equipment is light and handy, is moved easily, and can meet live survey
The requirement of amount.In addition to this, by can the laser displacement sensor of accurate measurement distance be integrated into the equipment, pass through and control sample
Items mark sensing point selects the X-ray light spot size of irradiating sample to the distance of x-ray lens outlet end.In selected irradiating sample
X radiation spot sizes after, in scanning survey out-of-flatness or cambered sample surfaces, and can be passed by laser displacement
Sensor controls sample object sensing point and does not change to x-ray lens outlet end distance, ensures that irradiating sample spot size is constant,
Improve measurement accuracy and resolution ratio.
This laboratory invention design portable micro-beam X-ray fluorescence spectrometer want device by micro- focal spot x-ray tube (Mo targets,
GermanyCompany produce, 50 μm of focal spot size, 50 μm of X), Amptek companies of the U.S. production SDD X-ray detectors
(energy resolution is 145eV, beryllium window effective area 25mm2 when 5.9keV), the laser displacement sensor that precision is 20 microns swash
Compositions, the internal structure charts such as light pen, the 14000000 pixel CCD with 20 times of enlarging functions, cooling fan are shown in Fig. 1.Wherein X is penetrated
Spool, detector angle with horizontal plane are respectively 45 ° and are placed in the both sides CCD；Laser pen, laser displacement sensor and horizontal plane press from both sides
Angle is respectively 45 ° and is placed in the both sides CCD.X-ray beam axis, detector axis, laser pen beam axis, laser displacement sensor
Beam axis is met at CCD axis at x-ray focal spot.The equipment is integrally light and handy, is moved easily, and can be needed according to measurement will just
The cooperation different from sample stage progress of formula spectrometer is taken, as shown in Figure 2.
The capillary X-ray lens principle figure used in equipment is as shown in Figure 3.Lens are collected the X sent out from x-ray source and are penetrated
Line, X rays are totally reflected in capillary, and X-ray, which is finally converged to the micron-sized hot spot of diameter, is radiated on sample.
Its geometric parameter is as follows：Capillary X-ray lens front focal length f1 (light source to multiple capillary lens entrance end distance) is 66.5mm, after
Focal length f2 (capillary lens outlet to lens focal spot distance) is 38mm, and x-ray lens entire length L is 60mm, converging X-ray
The focused spot diameter of beam is 190.7 microns；
Since capillary X-ray lens have focussing force, from lens outlet end to from lens focal spot, X after focusing to X-ray
Radiation spot diameter tapers into.According to this principle, sample measurement point is controlled by laser displacement sensor and capillary X-ray is saturating
The distance between mirror outlet, the size of the X-ray beam irradiating sample beam spot after corresponding adjustment focusing.In this spectrometer, due to micro-
Focal spot x-ray tube and SDD X-ray detectors are fixed, and the beryllium window effective area of X-ray detector is limited, capillary X-ray
The distance between the outlet of lens and sample measurement point L1 are excessive or too small, the spy that can all cause sample measurement point to be excited out
Sign X-ray is not detected by X-ray detector, as shown in Figure 4.Experiment is measured when L1 is within the scope of 30mm-38mm, this spectrometer
It can effectively be measured.The spot size that the convergence of the X-ray in L1=30mm is obtained with knife-edge scanning measurement is 465 μ
m.Therefore, between the beam spot size of the adjustable irradiating sample of this spectrometer is 190.7-465 μm, as shown in Figure 5.
Since the position of laser displacement sensor, x-ray source, capillary X-ray lens is fixed, so lens outlet
The distance L2 of the distance L1 and laser displacement sensor to sample measured surface that hold sample measured point are linearly proportional, such as
Shown in Fig. 6.Therefore, it is calculated by certain function, so that it may which lens outlet end is controlled to sample with realization laser displacement sensor
The distance of product measured point makes it within the scope of effective distance 30-38mm, to realize irradiating sample spot diameter in 190.7-
Selection between 465 μm.
When micro-beam X-ray fluorescence spectrometer carries out microcell scanning to surface irregularity or cambered sample, due to sample
The roughness or radian on product surface so that sample measured point changes with lens outlet end distance, leads to the micro- of irradiating sample
The spot size of beam X-ray beam changes, and influences the resolution ratio of element imaging.This spectrometer uses precision for 20 microns of laser
Displacement sensor under control of the computer, adjusts sample and is measured point at a distance from capillary lens outlet in real time, stringent to protect
The X-ray light spot size for demonstrate,proving irradiating sample is constant, improves the accuracy of measurement.
Operation principle：Portable micro-beam X-ray fluorescence spectrometer 1 is fixedly mounted in three-dimensional mobile platform 3, sample 2 is protected
It holds motionless；Or sample 2 is placed in three-dimensional mobile platform 3, portable micro-beam X-ray fluorescence spectrometer 1 remains stationary as；Pass through control
Make the movement of the three-dimensional sample platform 3 so that the distance between the portable micro-beam X-ray fluorescence spectrometer 1 and sample 2 are kept
In 30mm-38mm；And between so that the beam spot size of irradiating sample is 190.7-465 μm.The laser displacement sensor is being counted
Under the control of calculation machine, sample is adjusted in real time and is measured point at a distance from the outlet ends capillary lens 1-6.
The above, only the preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, ability
Field technique personnel are not it should be understood that departing from the principle and spirit of the invention defined by the claims and their equivalents
In the case of, it can modify to these embodiments and perfect, these are changed and improve also should be in protection scope of the present invention
It is interior.
Claims (10)
1. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary focuses, which is characterized in that including：Shell (1-1), installation
Plate (1-3) and communication fixed frame (1-10)；X-ray tube (1-4) is installed in the shell (1-1), with X-ray tube (1-4) phase
Capillary lens (1-5) even, capillary lens (1-5) angle with horizontal plane are 45 °；X-ray detector (1-7) and institute
It states capillary lens (1-5) to be symmetrically installed, angle with horizontal plane is 45 °；CCD camera (1-6) perpendicular to horizontal plane installation with
The capillary lens (1-5) position intermediate with X-ray detector (1-7)；High pressure line (1-9) is by communicating fixed frame
(1-10) is that X-ray tube (1-4) provides high-voltage electricity, while CCD camera (1-6) passes through high pressure with X-ray detector (1-7)
Pipeline (1-9) carries out communications with extraneous；Mounting plate (1-3) is removably mounted on the shell top (1-1) or side, is used for
Portable micro-beam X-ray fluorescence spectrometer (1) is installed to three-dimensional mobile platform (3) or other positions；Laser pen and laser displacement
Sensor angle with horizontal plane is respectively 45 ° and is placed in the both sides CCD camera (1-6).
2. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as described in claim 1 focuses, which is characterized in that institute
It states portable micro-beam X-ray fluorescence spectrometer (1) to connect with digital-to-analogue conversion cartoon letters by high pressure line (1-9), and will be apart from letter
Number becoming digital signal by digital-to-analogue conversion card passes to computer；The computer is by controlling the three-dimensional sample platform (3)
Movement so that the distance between the portable micro-beam X-ray fluorescence spectrometer (1) and sample (2) are maintained at 30mm-38mm；
And between so that the beam spot size of irradiating sample is 190.7-465 μm.
3. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as claimed in claim 2 focuses, which is characterized in that institute
It states portable micro-beam X-ray fluorescence spectrometer (1) to be fixedly mounted in three-dimensional mobile platform (2), sample (2) remains stationary as；Or
Sample (2) is placed in three-dimensional mobile platform (3), and portable micro-beam X-ray fluorescence spectrometer (1) remains stationary as.
4. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary focuses as claimed in claim 2 or claim 3, which is characterized in that
Signal is passed to controllor for step-by-step motor (8) by the computer (7), and subsequent controllor for step-by-step motor (8) passes to signal
Stepper motor driver (9), then drive sample stages (4) to XYZ tri- from stepper motor driver (9) driving from 3 stepper motors
A direction movement.
5. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as described in claim 1-4 focuses, which is characterized in that
The laser displacement sensor precision is 20 microns.
6. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as described in claim 1-5 focuses, which is characterized in that
Further include cooling fan (1-2), the cooling fan is 2, is separately mounted to the internal fan peace of the upper end both sides shell (1-1)
In tankage.
7. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as described in claim 1 focuses, which is characterized in that also
Including protective frame (1-8), the protective frame (1-8) is mounted on the bottom of shell (1-1), stretches out shell (1-1) for protecting
The receiving terminal of the outlet end and X-ray detector (1-7) of capillary lens (1-5).
8. the portable micro-beam X-ray fluorescence spectrometer that a kind of capillary as described in claim 1 focuses, which is characterized in that institute
High pressure line (1-9) is stated to be fixedly mounted with fixed frame (1-10) is communicated by pipe joint.
9. a kind of method of the portable micro-beam X-ray fluorescence spectrometer focused using capillary according to claims 1-8,
It is characterized in that, portable micro-beam X-ray fluorescence spectrometer (1) is fixedly mounted in three-dimensional mobile platform (2), sample (2) is kept
It is motionless；Or sample (2) is placed in three-dimensional mobile platform (3), portable micro-beam X-ray fluorescence spectrometer (1) remains stationary as；It is logical
Cross the movement for controlling the three-dimensional sample platform (3) so that between the portable micro-beam X-ray fluorescence spectrometer (1) and sample (2)
Distance be maintained at 30mm-38mm；And between so that the beam spot size of irradiating sample is 190.7-465 μm.
10. method as claimed in claim 9, which is characterized in that the laser displacement sensor is under control of the computer, real
When adjustment sample be measured point at a distance from the outlet end capillary lens (1-6).
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Cited By (5)
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| CN109839400A (en) * | 2019-01-23 | 2019-06-04 | 中国科学院上海应用物理研究所 | A kind of synchrotron radiation confocal fluorescent experimental provision focused based on KB mirror |
| EP3726205A1 (en) * | 2019-04-17 | 2020-10-21 | Bruker Nano GmbH | Method for obtaining stereoscopic image information |
| CN112033988A (en) * | 2020-09-15 | 2020-12-04 | 北京师范大学 | Self-adaptive beam spot X-ray diffractometer |
| CN113008925A (en) * | 2021-05-10 | 2021-06-22 | 中国科学院高能物理研究所 | Translational optical shutter and fluorescent target device capable of eliminating recoil vibration |
| CN115494095A (en) * | 2022-07-05 | 2022-12-20 | 港珠澳大桥管理局 | Nondestructive testing device, nondestructive testing method and nondestructive testing equipment |
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| CN109839400A (en) * | 2019-01-23 | 2019-06-04 | 中国科学院上海应用物理研究所 | A kind of synchrotron radiation confocal fluorescent experimental provision focused based on KB mirror |
| EP3726205A1 (en) * | 2019-04-17 | 2020-10-21 | Bruker Nano GmbH | Method for obtaining stereoscopic image information |
| CN112033988A (en) * | 2020-09-15 | 2020-12-04 | 北京师范大学 | Self-adaptive beam spot X-ray diffractometer |
| CN112033988B (en) * | 2020-09-15 | 2022-04-12 | 北京师范大学 | Self-adaptive beam spot X-ray diffractometer |
| CN113008925A (en) * | 2021-05-10 | 2021-06-22 | 中国科学院高能物理研究所 | Translational optical shutter and fluorescent target device capable of eliminating recoil vibration |
| CN113008925B (en) * | 2021-05-10 | 2022-04-22 | 中国科学院高能物理研究所 | Translational optical shutter and fluorescent target device capable of eliminating recoil vibration |
| CN115494095A (en) * | 2022-07-05 | 2022-12-20 | 港珠澳大桥管理局 | Nondestructive testing device, nondestructive testing method and nondestructive testing equipment |
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