CN100368780C - 流量计 - Google Patents
流量计 Download PDFInfo
- Publication number
- CN100368780C CN100368780C CNB2005100667980A CN200510066798A CN100368780C CN 100368780 C CN100368780 C CN 100368780C CN B2005100667980 A CNB2005100667980 A CN B2005100667980A CN 200510066798 A CN200510066798 A CN 200510066798A CN 100368780 C CN100368780 C CN 100368780C
- Authority
- CN
- China
- Prior art keywords
- lid
- flowmeter
- chamber
- flow
- trench portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 13
- 238000010168 coupling process Methods 0.000 claims description 13
- 238000005859 coupling reaction Methods 0.000 claims description 13
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 240000000233 Melia azedarach Species 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 9
- 238000007789 sealing Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 2
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- 239000002184 metal Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
- E02B3/14—Preformed blocks or slabs for forming essentially continuous surfaces; Arrangements thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G9/00—Cultivation in receptacles, forcing-frames or greenhouses; Edging for beds, lawn or the like
- A01G9/02—Receptacles, e.g. flower-pots or boxes; Glasses for cultivating flowers
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02D—FOUNDATIONS; EXCAVATIONS; EMBANKMENTS; UNDERGROUND OR UNDERWATER STRUCTURES
- E02D17/00—Excavations; Bordering of excavations; Making embankments
- E02D17/20—Securing of slopes or inclines
- E02D17/205—Securing of slopes or inclines with modular blocks, e.g. pre-fabricated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
Landscapes
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mining & Mineral Resources (AREA)
- Life Sciences & Earth Sciences (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Paleontology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Environmental Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Ocean & Marine Engineering (AREA)
- Mechanical Engineering (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004135963A JP4079116B2 (ja) | 2004-04-30 | 2004-04-30 | 流量計 |
| JP135963/04 | 2004-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1693855A CN1693855A (zh) | 2005-11-09 |
| CN100368780C true CN100368780C (zh) | 2008-02-13 |
Family
ID=34939487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100667980A Expired - Fee Related CN100368780C (zh) | 2004-04-30 | 2005-04-29 | 流量计 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7100440B2 (enExample) |
| EP (1) | EP1591760A1 (enExample) |
| JP (1) | JP4079116B2 (enExample) |
| KR (1) | KR100589845B1 (enExample) |
| CN (1) | CN100368780C (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7415895B2 (en) * | 2005-08-26 | 2008-08-26 | Smc Kabushiki Kaisha | Flow meter with a rectifying module having a plurality of mesh members |
| JP5066675B2 (ja) | 2006-07-05 | 2012-11-07 | Smc株式会社 | フローセンサ |
| TWD126228S1 (zh) * | 2007-11-13 | 2008-12-01 | 股份有限公司 | 流量感測器 |
| US7603898B2 (en) * | 2007-12-19 | 2009-10-20 | Honeywell International Inc. | MEMS structure for flow sensor |
| JP5135136B2 (ja) * | 2008-09-12 | 2013-01-30 | アズビル株式会社 | 流量計及び流量制御装置 |
| JP2010210496A (ja) * | 2009-03-11 | 2010-09-24 | Yamatake Corp | 流量計 |
| US8418549B2 (en) * | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
| CN103573199B (zh) * | 2012-08-03 | 2015-12-09 | 中国石油化工股份有限公司 | 钻井液流变性在线测量装置 |
| US9354095B2 (en) * | 2012-10-02 | 2016-05-31 | Honeywell International Inc. | Modular flow sensor |
| US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
| CN106841669A (zh) * | 2015-12-04 | 2017-06-13 | 无锡乐华自动化科技有限公司 | 一种弹性应变式管道流速传感器以及使用方法 |
| JP1560787S (enExample) * | 2016-02-29 | 2016-10-17 | ||
| USD900656S1 (en) * | 2019-03-21 | 2020-11-03 | Orbis Intelligent Systems, Inc. | Flow detection device |
| USD904213S1 (en) | 2019-03-21 | 2020-12-08 | Orbis Intelligent Systems, Inc. | Hydrant sensor device |
| US12399046B2 (en) * | 2023-03-03 | 2025-08-26 | Honeywell International Inc. | Flow sensing apparatus |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4776214A (en) * | 1985-08-09 | 1988-10-11 | Motorola, Inc. | Mass air flow sensor |
| US6571623B1 (en) * | 1998-02-27 | 2003-06-03 | Pierburg Gmbh | Measuring instrument with rectangular flow channel and sensors for measuring the mass of a flowing medium |
| JP2003240618A (ja) * | 2002-02-20 | 2003-08-27 | Yamatake Corp | フローセンサ |
| WO2003089884A1 (de) * | 2002-04-22 | 2003-10-30 | Siemens Aktiengesellschaft | Vorrichtung zur messung der in einer leitung strömenden luftmasse |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0131318B1 (en) * | 1983-05-18 | 1991-12-27 | Bronkhorst High-Tech B.V. | Fluid flow measuring device |
| US4918995A (en) * | 1988-01-04 | 1990-04-24 | Gas Research Institute | Electronic gas meter |
| JP2787785B2 (ja) * | 1990-07-02 | 1998-08-20 | 山武ハネウエル株式会社 | 流量計および流量測定方法 |
| JPH0666612A (ja) | 1991-07-18 | 1994-03-11 | Ricoh Seiki Co Ltd | 流量センサー |
| WO1997021986A1 (de) * | 1995-12-08 | 1997-06-19 | Micronas Semiconductor S.A. | Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben |
| US6647809B1 (en) * | 2002-08-29 | 2003-11-18 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Silicon carbide high temperature anemometer and method for assembling the same |
-
2004
- 2004-04-30 JP JP2004135963A patent/JP4079116B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-15 KR KR1020050031276A patent/KR100589845B1/ko not_active Expired - Lifetime
- 2005-04-25 EP EP05103335A patent/EP1591760A1/en not_active Ceased
- 2005-04-29 US US11/118,114 patent/US7100440B2/en not_active Expired - Lifetime
- 2005-04-29 CN CNB2005100667980A patent/CN100368780C/zh not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4776214A (en) * | 1985-08-09 | 1988-10-11 | Motorola, Inc. | Mass air flow sensor |
| US6571623B1 (en) * | 1998-02-27 | 2003-06-03 | Pierburg Gmbh | Measuring instrument with rectangular flow channel and sensors for measuring the mass of a flowing medium |
| JP2003240618A (ja) * | 2002-02-20 | 2003-08-27 | Yamatake Corp | フローセンサ |
| WO2003089884A1 (de) * | 2002-04-22 | 2003-10-30 | Siemens Aktiengesellschaft | Vorrichtung zur messung der in einer leitung strömenden luftmasse |
Also Published As
| Publication number | Publication date |
|---|---|
| US7100440B2 (en) | 2006-09-05 |
| JP4079116B2 (ja) | 2008-04-23 |
| JP2005315788A (ja) | 2005-11-10 |
| CN1693855A (zh) | 2005-11-09 |
| KR20060045736A (ko) | 2006-05-17 |
| KR100589845B1 (ko) | 2006-06-14 |
| US20050241388A1 (en) | 2005-11-03 |
| EP1591760A1 (en) | 2005-11-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080213 Termination date: 20210429 |