CN100347775C - Multi-level read-only optical disc and method of production - Google Patents

Multi-level read-only optical disc and method of production Download PDF

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Publication number
CN100347775C
CN100347775C CNB2005100535093A CN200510053509A CN100347775C CN 100347775 C CN100347775 C CN 100347775C CN B2005100535093 A CNB2005100535093 A CN B2005100535093A CN 200510053509 A CN200510053509 A CN 200510053509A CN 100347775 C CN100347775 C CN 100347775C
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read
optical disk
record pit
longitudinal section
multistage
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CN1664940A (en
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徐端颐
倪屹
潘龙法
陈垦
熊剑平
陆达
胡恒
马建设
裴京
张启程
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Tsinghua University
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Tsinghua University
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Priority to JP2005112877A priority patent/JP2006252743A/en
Priority to US11/102,567 priority patent/US7680024B2/en
Priority to DE102005016513A priority patent/DE102005016513B4/en
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Abstract

The present invention relates to a multi-level read-only optical disk and a manufacture method thereof. The multi-level read-only optical disk has various recording pits, the longitudinal sections of the various recording pits along the width direction of the recording pits are in multi-level random shapes, and the areas of the longitudinal sections of the recording pits with different levels are different; the areas of the longitudinal sections of the recording pits satisfy the following formula: *, wherein the S denotes the areas of the longitudinal sections of the recording pits, the x denotes coordinates in the width direction of the recording pits, the h (x) denotes a pit depth distribution function on the longitudinal sections of the recording pits, and integral areas are the whole longitudinal sections of the recording pits. In addition, run lengths of the multi-level read-only optical disk can be also limited. The multi-level read-only optical disk and a manufacture method thereof with the limited run lengths provided by the present invention combine the advantages of multi-level technology and encoding with the limited run lengths, the storage capacity and the data transmission rate of the read-only optical disk can be obviously enhanced under the conditions that laser wavelengths and optical numerical apertures are not changed, and the present invention maintains the largest compatibility with the existing read-only optical disk system.

Description

Multistep read-only optical disk and method for making thereof
Technical field
The present invention relates to digital storage technique, more specifically, relate to the digital storage technique that adopts read-only optical disc.
Background technology
Existing optical digital disk product all is that information translation is become binary data, and certain modulation system is corresponding with two kinds of different physical states of storage medium recorded symbol according to this with binary number, realizes data storage, and this class storage mode is called the two-value storage.What present read-only optical disc memory technology was adopted all is the two-value storage mode, according to the height of reflected light light intensity judge current pairing position be " hole " (Pit) or " bank " (Land), can write down two status numbers on each record cell, just the information of just in time corresponding 1 (bit).
Multistage memory technology is that relative two-value storage proposes.If data stream modulates is become M system data (M>2), and the M system data after will modulating are corresponding with the different physical states of M kind of recording medium, can realize the storage of M rank.The M rank are stored on the position of information record spot can store log 2(M) Bit data, therefore when M greater than 2 the time, can write down information on each record cell, and data transmission rate is improved simultaneously above 1 bit.Multistage storage is under the situation that does not change optical maser wavelength and optical numerical value aperture, can significantly improve a kind of new technique of memory capacity and data transmission rate.Therefore multistage storage system and present optical storage system have good compatibility.
The example of the most basic multistep read-only optical disk is the multistage scheme of the dark modulation in hole, is called PDM (Pit-Depth Modulation) again.Its principle is, for read-only optical disc, according to scalar diffraction theory, the record pit point degree of depth of catoptrical light intensity and CD has corresponding relation: from cheating is 0 deeply, along with the dark increase in hole, catoptrical light intensity weakens thereupon, is 1/4 place of optical maser wavelength deeply in the hole, and the reflected light light intensity reaches minimal value.Utilize this relation of the record pit point degree of depth and reflective light intensity, different holes has been set changes deeply, can realize the multi-stage optical disk storage.But it is too much that CD is cheated dark exponent number, will cause a lot of technical matterss, duplicates input etc. as disc.Therefore, cheat the memory capacity that dark exponent number improves read-only optical disc and be subjected to bigger restriction merely by increasing.
The coding of multi-stage optical disk storage at present all is the scheme that adopts amplitude modulation(PAM), does not excavate the potentiality on the coding techniques as yet.And conventional two-value stored CD all adopts the limited encoding scheme of run length (being called for short the brigade commander), i.e. RLL (Run Length Limited, length limit) coding.RLL is meant that the passage sequence that CD is stored meets the following conditions: the rarest d ' 0 ' between two ' 1 ' of this sequence, and k ' 0 ' is arranged at most.These two parameter separate provision of d and k may appear at the minimum in the sequence and the maximum distance of swimming.Parameter d is being controlled high-transmission frequency, the intersymbol interference in the time of therefore may influencing sequence and transmit by bandwidth efficient channel.In the binary data transmission, wish that usually the signal that receives is can be self synchronous.Usually utilize a phaselocked loop to reproduce synchronously.Phaselocked loop is adjusted according to the saltus step of the waveform that receives and is detected phase place constantly.Maximum run parameter k guarantees that suitable jump frequency is to satisfy the needs that read clock synchronization.
Rll encoder can improve memory capacity for the which amplitude modulation coding.In the two-value storage, adopt rll encoder, can on a smallest record symbol, store the information that surpasses 1bit, so rll encoder has obtained widespread usage in optical storage.Such as the EFM coding that is used for CD (d=2, k=10) and be used for DVD the EFM+ coding (d=2, k=10).DVD has obtained the storage density of 1.5 (bit/ smallest record symbols) owing to adopted rll encoder.
Based on above-mentioned, need and adopt multistep read-only optical disk or stamper and their method for making that is different from prior art.
Summary of the invention
In order to overcome at least one defective that exists in the above-mentioned prior art, the object of the present invention is to provide a kind ofly under the situation that does not change optical maser wavelength and optical numerical value aperture, can significantly improve a kind of novel memory technology of read-only optical disc memory capacity and data transmission rate.
This read-only optical disc adopts the limited multistage memory technology of the distance of swimming, can obtain higher memory capacity in the less multistep read-only optical disk of exponent number.
To achieve these goals, the invention provides a kind of multistep read-only optical disk, its track pitch is less than 0.52 micron, this multistep read-only optical disk has multiple record pit (a plurality of record pit), the longitudinal section of record pit is multistage arbitrary shape, the area of the longitudinal section of the record pit of different rank (exponent number difference) has nothing in common with each other, and the area of the longitudinal section of record pit satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of record pit, and x represents the coordinate of record pit Width, the dark distribution function in hole on the longitudinal section of h (x) expression record pit, and integral domain is the whole longitudinal section of record pit.
In above-mentioned multistep read-only optical disk, the area S of longitudinal section, hole is by the power decision of mother CD burning laser.
In above-mentioned multistep read-only optical disk, its brigade commander (Run Length, run length, be called for short the brigade commander) be limited, also can be referred to as run length (Run Length Limited), in the passage sequence of multistep read-only optical disk, between two non-" 0 " data the rarest d " 0 ", k " 0 " is arranged at most, and wherein, k, d are integer, k is more than or equal to d, d is more than or equal to 0, and parameter d has determined to appear at the minimum brigade commander in the passage sequence, and parameter k has determined to appear at the maximum brigade commander in the passage sequence.
In above-mentioned multistep read-only optical disk, the memory capacity of each record symbol is log 2The M Bit data, wherein, M is the integer greater than 2, the exponent number of expression record pit.
In above-mentioned multistep read-only optical disk, the degree of depth difference of the record pit of different rank, the width of the record pit of different rank is identical; Perhaps, the width difference of the record pit of different rank, the degree of depth of the record pit of different rank is identical; Perhaps, the width difference of the record pit of different rank, the degree of depth of the record pit of different rank are also different.
In above-mentioned multistep read-only optical disk, determine the degree of depth and/or the width of record pit by the power of regulating mother CD burning laser.
In above-mentioned multistep read-only optical disk, the longitudinal section of record pit broad ways is contour multistage trapezoidal, and the stamper disc adopts (containing) photoresist material.
In addition, the longitudinal section of record pit broad ways also can be not contour multistage trapezoidal, the stamper disc adopts modification photoresist material, the modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, described physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and described chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
In addition, the longitudinal section of record pit broad ways also can be an arbitrary shape, and the stamper disc adopts resin material.
In above-mentioned multistep read-only optical disk, the run length of multistep read-only optical disk is limited, in the passage sequence of multistep read-only optical disk, between two non-" 0 " data the rarest d " 0 ", k " 0 " is arranged at most, wherein, parameter d has determined to appear at the minimum brigade commander in the described passage sequence, and parameter k has determined to appear at the maximum brigade commander in the described passage sequence.
The present invention also provides a kind of method of track pitch less than 0.52 micron multi-exponent read-only mother disc that be used to make, and may further comprise the steps:
A) binary user data is formed multistage coded sequence by Error Correction of Coding and multistage modulating-coding, generate the write signal of control mother CD burning, and the track pitch of multi-exponent read-only mother disc is set at less than 0.52 micron; And
B) write signal that generates with step a) is controlled the power of the imprinting laser of laser instrument output, and the stamper disc is carried out imprinting, generates multi-exponent read-only mother disc.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the area of the longitudinal section of the record pit of different rank has nothing in common with each other, and the area of the longitudinal section of the record pit of the multi-exponent read-only mother disc that is generated satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of described record pit, and x represents the coordinate of record pit Width, the dark distribution function in hole on the longitudinal section of the described record pit of h (x) expression, and integral domain is the whole longitudinal section of described record pit.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, control the size of the laser recording power of semiconductor laser by the drive current of regulating semiconductor laser less than 0.52 micron multi-exponent read-only mother disc; When laser instrument is gas laser, control the size of the laser recording power of laser instrument by the modulation amplitude that changes acousto-optic or electrooptic modulator.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multi-exponent read-only mother disc, multistage modulating-coding is multistage brigade commander's modulating-coding, formed multistage coded sequence is multistage brigade commander's coded sequence, and the multi-exponent read-only mother disc that is generated is the multi-exponent read-only mother disc of length limit.
Be used for making the method for track pitch above-mentioned, realize control by the time shutter of regulating the mother CD burning laser instrument the brigade commander less than 0.52 micron multi-exponent read-only mother disc.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, regulate the time shutter of mother CD burning by the pulse width of regulating semiconductor laser drive current less than 0.52 micron multi-exponent read-only mother disc; When laser instrument is gas laser, regulate the time shutter of mother CD burning by the modulating pulse width of regulating acousto-optic or electrooptic modulator.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the longitudinal section of record pit broad ways is contour multistage trapezoidal, and the stamper disc adopts (containing) photoresist material.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the longitudinal section of record pit broad ways is not contour multistage trapezoidal, and described stamper disc adopts modification photoresist material.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multi-exponent read-only mother disc, the modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
In addition, the longitudinal section of record pit broad ways also can be an arbitrary shape, and the stamper disc adopts resin material.
The present invention also provides a kind of method of track pitch less than 0.52 micron multistep read-only optical disk that be used to make, and may further comprise the steps:
A) binary user data is formed multistage coded sequence by Error Correction of Coding and multistage modulating-coding, generate the write signal of control mother CD burning, and the track pitch of described multi-exponent read-only mother disc is set at less than 0.52 micron;
B) power of the imprinting laser of usefulness said write signal controlling laser instrument output carries out imprinting to the stamper disc, generates multi-exponent read-only mother disc;
C) be mould with described multi-exponent read-only mother disc, copy metal pressing mold; And
D) use described pressing mold moulding replication to go out multistep read-only optical disk.
As can be seen, be used to make track pitch and compare less than the method for 0.52 micron multi-exponent read-only mother disc with above-mentioned, this method has had more step c and d.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multistep read-only optical disk, the area of the longitudinal section of the record pit of different rank has nothing in common with each other, and the area of the longitudinal section of the record pit of the multi-exponent read-only mother disc that is generated and the multistep read-only optical disk that generates all satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of record pit, and x represents the coordinate of record pit Width, the dark distribution function in hole on the longitudinal section of h (x) expression record pit, and integral domain is the whole longitudinal section of record pit.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, control the size of the laser recording power of semiconductor laser by the drive current of regulating semiconductor laser less than 0.52 micron multistep read-only optical disk; When laser instrument is gas laser, control the size of the laser recording power of laser instrument by the modulation amplitude that changes acousto-optic or electrooptic modulator.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multistep read-only optical disk, multistage modulating-coding is multistage brigade commander's modulating-coding, formed multistage coded sequence is multistage brigade commander's coded sequence, the multi-exponent read-only mother disc that is generated is the multi-exponent read-only mother disc of length limit, and the multistep read-only optical disk that is generated is the multistep read-only optical disk of length limit.
Be used for making the method for track pitch above-mentioned, realize control by the time shutter of regulating the mother CD burning laser instrument described brigade commander less than 0.52 micron multistep read-only optical disk.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, regulate the time shutter of described mother CD burning by the pulse width of regulating laser drive current less than 0.52 micron multistep read-only optical disk; When laser instrument is gas laser, regulate the time shutter of described mother CD burning by the modulating pulse width of regulating acousto-optic or electrooptic modulator.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the longitudinal section of record pit broad ways is contour multistage trapezoidal, and the stamper disc adopts (containing) photoresist material.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the stamper disc is made by the modification photoresist.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multistep read-only optical disk, the modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and described chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
In addition, the longitudinal section of record pit broad ways also can be an arbitrary shape, and the stamper disc adopts resin material.
In the multistep read-only optical disk that the present invention proposes, the track pitch of its record pit is less than 0.52 micron.The longitudinal section, hole is called for short in the longitudinal section of record pit broad ways, is one of following three kinds of situations:
1) contour multistage trapezoidal, the degree of depth of record pit is identical, and width and inequality;
2) not contour multistage trapezoidal, the width of record pit and the degree of depth are also inequality;
3) multistage arbitrary shape, the record pit shape is unfixing, the area of the longitudinal section of the record pit of different rank has nothing in common with each other, the area of longitudinal section, hole can come quantificational expression with S: S=∫ h (x) dx, wherein, h (x) is the dark distribution function in hole on the longitudinal section, hole, and x represents the coordinate of record pit Width, and integral domain is whole record pit.
The present invention proposes can obtain the multistage record pit of different orders by the power that changes mother CD burning laser to above three kinds of situations, thereby realizes multistep read-only optical disk.
The present invention also proposes to adopt the rll encoder scheme in multistep read-only optical disk, can further improve the storage density of read-only optical disc on multistage basis.As adopt RLL (d=2, the storage density of 4 rank CDs k=8) can reach 2.6 (bit/ smallest record symbols), this is equivalent to adopt the storage density of 8 rank CDs of which amplitude modulation.Therefore adopt the multistep read-only optical disk of RLL can reduce requirement, help the detection with read output signal of duplicating of read-only optical disc multistep read-only optical disk record pit exponent number.
According to multistep read-only optical disk of the present invention: on multistep read-only optical disk, the track pitch of record pit is less than 0.52 micron, and the longitudinal section, hole is one of following three kinds of situations:
1) contour multistage trapezoidal, the deep equality of record pit, and width and inequality;
2) not contour multistage trapezoidal, the width of record pit and the degree of depth are also inequality;
3) multistage arbitrary shape, record pit shape are unfixing, and the area of longitudinal section, hole can come quantificational expression with S: S=∫ h (x) dx, wherein, h (x) is the dark distribution function in hole on the longitudinal section, hole, and x represents the coordinate of record pit Width, and integral domain is whole record pit.
Under said circumstances, the order of multistage record pit is by the power decision of mother CD burning laser.
The brigade commander of multistep read-only optical disk is that run length (being the brigade commander) is limited: in the passage sequence of described multistep read-only optical disk, between two non-" 0 " data the rarest d " 0 ", k " 0 " is arranged at most, these two parameters of d, k have determined to appear at the minimum and maximum brigade commander in the described passage sequence respectively, wherein, k, d are integer, and k is more than or equal to d, and d is more than or equal to 0.
The method according to this invention may further comprise the steps successively:
Step 1: is binary user data that multistage RLL modulating-coding forms multistage brigade commander's coded sequence by Error Correction of Coding and multiple ranks runlength length modulated coding, generate the signal that the control mother CD burning writes, and the track pitch of setting mother CD burning is less than 0.52 micron;
Step 2: the power of the imprinting laser of the write signal control laser instrument output that generates with step 1, one of following three kinds of materials are carried out imprinting: 1) the stamper disc that material is with photoresist made carries out imprinting, generates contour multistage trapezoidal multistage stamper; 2) the stamper disc made from modification photoresist material is carried out imprinting, generate not contour multistage trapezoidal multistage stamper; 3) the stamper disc made from resin material is carried out imprinting, generate the multistage stamper of multistage arbitrary shape;
The brigade commander of above-mentioned every kind of situation realized by the time shutter of regulating mother CD burning: noise spectra of semiconductor lasers, by regulating the pulse width of laser drive current; To gas laser, by changing the modulating pulse width of acousto-optic or electrooptic modulator;
Noise spectra of semiconductor lasers, the size of laser recording power are to control by the drive current of regulating laser instrument, and for gas laser, the size of the recording power of laser is to control by the modulation amplitude that changes acousto-optic or electrooptic modulator;
Step 3: the stamper that obtains with step 2 is a mould, copies metal pressing mold;
Step 4:, go out the multistep read-only optical disk of length limit by moulding replication with the pressing mold that step 3 obtains.
To sum up, the present invention proposes the limited multistep read-only optical disk memory technology of the distance of swimming.The width of the record pit of multistep read-only optical disk and the degree of depth are also inequality.It is that (width is with the degree of depth is all different, width is identical, the degree of depth is different for arbitrary shape that the present invention proposes to obtain the longitudinal section by the power that changes mother CD burning laser, perhaps the degree of depth is identical, width is identical, or the like) multistage record pit, thereby realized multistep read-only optical disk.
The invention allows for and in multistep read-only optical disk, adopt the rll encoder scheme, can on multistage basis, further improve the storage density of read-only optical disc.As adopt RLL (d=2, the storage density of 4 rank CDs k=8) can reach 2.6 (bit/ smallest record symbols), this is equivalent to adopt the storage density of 8 rank CDs of which amplitude modulation.Therefore adopt the multistep read-only optical disk of RLL can reduce requirement, help the detection with read output signal of duplicating of read-only optical disc multistep read-only optical disk record pit exponent number.
The multistep read-only optical disk of the run length that the present invention proposes or stamper and preparation method thereof combine the advantage of multistage technology and rll encoder, under the situation that does not change optical maser wavelength and optical numerical value aperture, can significantly improve read-only optical disc memory capacity and data transmission rate, keep maximum compatibility with present read-only optical disc system.Adopt the rll encoder scheme to reduce requirement, help the detection with read output signal of duplicating of read-only optical disc the multistep read-only optical disk exponent number.
Need to prove that the term of being mentioned " CD " is understood from those skilled in the art's angle herein, should comprise " son dish " (being commonly called as CD) and " stamper "." CD " in the claim to a product contained " son dish " and " stamper ", and reason is that the structure that the present invention looks for " the son dish " and " stamper " of protection is identical.Yet, in claim to a method, because the method for making of the method for making of " stamper " and " son dish " is different, particularly, making " son dish " at first needs to make " stamper ", so, in claim to a method, " CD " refers to " son dish ".
Description of drawings
In order to understand the present invention better, describe below with reference to the accompanying drawings according to a particular embodiment of the invention, in the accompanying drawings:
Fig. 1 illustrates the stamper sectional view after multistage RLL mother CD burning process and the imprinting;
Fig. 2 illustrates multistage rll encoder and write signal waveform generative process;
Fig. 3 a illustrates the multistage RLL mother CD burning process of photoresist material and the stamper vertical view after the imprinting;
Fig. 3 b illustrates the multistage RLL mother CD burning process of photoresist material and the stamper longitudinal section (contour stepped appearance) after the imprinting;
Fig. 4 a illustrates the multistage RLL mother CD burning process of modification photoresist material and the stamper sectional view after the imprinting;
Fig. 4 b illustrates the multistage RLL mother CD burning process of modification photoresist material and the stamper vertical view after the imprinting;
Fig. 4 c illustrates the longitudinal section (not contour stepped appearance), multistage RLL master record hole of modification photoresist material;
Fig. 5 a illustrates the multistage RLL mother CD burning process of resin material and the stamper sectional view after the imprinting;
Fig. 5 b illustrates the multistage RLL mother CD burning process of resin material and the stamper vertical view after the imprinting;
Fig. 5 c illustrates the longitudinal section (multistage arbitrary shape), multistage RLL master record hole of resin material;
Fig. 6 a illustrates the vertical view that stamper is the multistage RLL read-only optical disc reproduction process of photoresist material;
Fig. 6 b illustrates the longitudinal section that stamper is the multistage RLL read-only optical disc reproduction process of photoresist material;
Fig. 7 a illustrates the sectional view that stamper is the multistage RLL read-only optical disc reproduction process of modification photoresist material;
Fig. 7 b illustrates the vertical view that stamper is the multistage RLL read-only optical disc reproduction process of modification photoresist material;
Fig. 7 c illustrates the longitudinal section that stamper is the multistage RLL read-only optical disc reproduction process of modification photoresist material;
Fig. 8 a illustrates the sectional view that stamper is the multistage RLL read-only optical disc reproduction process of resin material;
Fig. 8 b illustrates the record pit longitudinal section (multistage arbitrary shape) that stamper is the multistage RLL read-only optical disc reproduction process of resin material;
Fig. 9 illustrate stamper be the photoresist material multistage RLL read-only optical disc read waveform (vertical view);
Figure 10 illustrate stamper be modification photoresist material multistage RLL read-only optical disc read waveform (sectional view);
Figure 11 illustrate stamper be resin material multistage RLL read-only optical disc read waveform (sectional view);
Figure 12 illustrates the synoptic diagram (vertical view) that stamper is 4 rank RLL read-only optical disc embodiment of photoresist material;
Figure 13 illustrates the synoptic diagram (sectional view) that stamper is 4 rank RLL read-only optical disc embodiment of modification photoresist material;
Figure 14 illustrates the synoptic diagram (sectional view) that stamper is 4 rank RLL read-only optical disc embodiment of resin material;
Figure 15 illustrates the process flow diagram that is used to make the method for multi-exponent read-only mother disc according to of the present invention; And
Figure 16 illustrates the process flow diagram that is used to make the method for multistep read-only optical disk according to of the present invention.
Embodiment
In the manufacturing process of CD, make stamper usually earlier, the step of making stamper comprises: be coated with last layer stamper photoresist and (in the present invention, adopt Britain Rohm on glass substrate; The model of Haas is the photoresist of Microposit S1800-4), use the mother CD burning system (in the present invention, the ∏ mastering System of England NIMBUS) stamper is carried out imprinting, the model that adopts Japanese Nichia is the laser instrument of NLHV 500C) make resist exposure, develop, produce stamper.
Then, with this stamper is mould, use glass disc sputter machine (in the present invention, adopting the model of Switzerland UNAXIS is the sputter machine of Pyramet) glass substrate is carried out sputter (spraying plating process), plate the thin metal level of one deck, plate thicker metal level relatively then, obtain the negative-appearing image bracket panel of metal, promptly can be used as the pressing mold (Stamper) that injection moulding is duplicated.In the present invention, the DVD compact disc production line that has adopted Japanese Panasonic company to produce.Use injection machine (in the present invention, adopt the DL0004 type and the DR0004 type vertical injection molding machine of Japanese Panasonic company) the compacting disc, use SWIVEL type or the CUBLITE type sputter machine of Switzerland UNAXIS that the disc that suppresses is carried out sputter then, last, use the pressing mold mold pressing to generate CD.What finish that line adopts is the GRBA-151 type system of Japanese Panasonic company.What on-line detector adopted is the S3DVD on-line detector of German BASLER.
That in addition, stamper/son dish detector adopts is DVDStamper Pro or the ST3 Stamper Pro of Sweden Audio Dev.That the disc testing tool adopts is O-PAS 1000 or the DDU 1000 of Japanese Pulstec.
The mother CD burning of this multistep read-only optical disk is to realize by the power that changes imprinting laser.The imprinting laser that obtains different capacity has two kinds of schemes: scheme 1) noise spectra of semiconductor lasers can obtain different output power by the drive current of regulating laser instrument; Scheme 2), can obtain different output power by changing the modulation amplitude of acousto-optic (or electric light) modulator to gas laser.Different laser powers on following three kinds of materials respectively imprinting go out different multistage record pits:
1) photoresist material, contour multistage trapezoidal multistage record pit;
2) modification photoresist material, not contour multistage trapezoidal record pit;
3) resin material, the multistage record pit of arbitrary shape.
In control imprinting laser power, also obtain the multistage record pit of different run lengths, thereby realize the multistep read-only optical disk of run length by the adjusting time shutter.The time shutter of regulating mother CD burning can have two kinds of schemes equally: scheme 1) noise spectra of semiconductor lasers can obtain different exposure time by the pulse width of regulating laser drive current; Scheme 2), can obtain different exposure time by changing the modulating pulse width of acousto-optic (or electric light) modulator to gas laser.
Describe the present invention in detail below in conjunction with drawings and Examples.
Fig. 1 is the stamper sectional view after multistage RLL mother CD burning process and the imprinting, is schematic diagram of the present invention.
Length limit that the present invention proposes and track pitch less than the specific implementation of 0.52 micron multistep read-only optical disk stamper are: the track pitch in setting recording hole is less than 0.52 micron, select one of following three kinds of materials for use, adopt different imprinting laser powers, imprinting goes out different multistage record pits respectively:
1) photoresist material, contour multistage trapezoidal multistage record pit, the deep equality of record pit, and width and inequality;
2) modification photoresist material, not contour multistage trapezoidal record pit, the degree of depth of record pit and width are all inequality;
3) resin material, the multistage record pit of arbitrary shape, the area of the longitudinal section of the record pit of different rank has nothing in common with each other.
Fig. 2 shows multistage rll encoder and write signal waveform generative process.
The modulating-coding that adopts among the present invention is multistage rll encoder, as can be seen from Figure 2, at first, with binary user data 202 input error correcting encoders 204, generates the binary sequence 206 that comprises user data and check code; Then with the multistage rll encoder device 208 of these binary sequence 206 inputs, generate multistage (d, k) the run length sequence 210, this sequence meets the following conditions: the rarest d individual ' 0 ' between two non-' 0 ' data of sequence, k ' 0 ' is arranged at most, these two parameter separate provision of d and k may appear at the minimum and the maximum distance of swimming in the sequence; At last, this sequence is generated the write signal waveform 214 of control mother CD burning by the NRZI translation operation 212 of mould M.
In the mother CD burning of photoresist material, the imprinting process is that the Photochemical effects by material realize.Under the effect of imprinting laser, be exposed the photoresist generation photochemical reaction of part on the stamper, after development and photographic fixing, form a record pit at exposed portion.The power of imprinting laser is controlled by the amplitude of write signal waveform, the power of different laser, and the width difference of corresponding different order record pits, but the hole is identical deeply.The photoresist material is widespread usage in present mother CD burning system, therefore is more suitable for present mastering system.
In the mother CD burning of modification photoresist material, the imprinting process is that the Photochemical effects by material realize.Under the effect of imprinting laser, be exposed the modification photoresist generation photochemical reaction of part on the stamper, after development and photographic fixing, form a record pit at exposed portion.Unmodified photoresist photochemical reaction speed is fast, and the photoresist at exposure position all reacts, so the degree of depth of record pit is identical; Photoresist photochemical reaction speed after the modification is slack-off, and the degree of depth of the modification photoresist that the exposure position reacts is decided by exposure power, and different exposure powers can obtain the record pit of different depth.The power of imprinting laser is controlled by the amplitude of write signal waveform, the power of different laser, the width and the degree of depth of corresponding different order record pits are all inequality, have increased the resolution between the different order record pits like this, help the detection with read output signal of duplicating of read-only optical disc.The photoresist material is widespread usage in present mother CD burning system, and modification photoresist on this basis also is easy to realize, so the modification photoresist relatively is fit to present mastering system.
In the mother CD burning of resin material, the imprinting process is that the thermal effect by laser realizes.Under the thermal effect effect of imprinting laser, be exposed the resin material gasification of part on the stamper, thereby directly form a record pit.The power of imprinting laser is controlled by the amplitude of write signal waveform, the power of different laser, the width of corresponding different order record pits is all different with the degree of depth, has increased the resolution between the different order record pits like this, helps the detection with read output signal of duplicating of read-only optical disc.
In the amplitude control laser power of write signal waveform (writing waveform), the length of write signal waveform is controlled the switching time of laser instrument or modulator, thereby obtains the multistage record pit of different run lengths.That is to say, the amplitude of write signal waveform and length are being controlled the power and the time shutter of imprinting laser respectively, and finally controlling the order and the run length of record pit, thereby realize the imprinting of stamper (Master) of the multistep read-only optical disk of run length.Stamper synoptic diagram after this multistage RLL mother CD burning process and the imprinting is seen Fig. 3 a-b, Fig. 4 a-c, Fig. 5 a-c.
After obtaining multistage RLL stamper, be mould with this stamper, through spraying plating process, obtain the negative-appearing image bracket panel of metal, promptly can be used as the pressing mold (Stamper) that injection moulding is duplicated, with this Stamper as pressing mold, by the injection moulding mold pressing, just can copy the read-only optical disc of multistage RLL.Fig. 6 a-b, Fig. 7 a-c and Fig. 8 a-b are seen in this reproduction process.
The readout of multistage RLL read-only optical disc is seen Fig. 9, Figure 10, Figure 11.The optical pickup system of multistage RLL read-only optical disc and the optical pickup system of conventional read-only optical disc are compatible fully, therefore can adopt the optical pickup system of conventional read-only optical disc that multistage RLL read-only optical disc is read.The waveform of reading of multistage RLL read-only optical disc is seen Fig. 9, Figure 10, Figure 11, the amplitude of read output signal is decided by the order (claiming exponent number again) of record pit, from order is 0, increase along with the record pit order, catoptrical light intensity weakens thereupon, at the highest record pit place of order, catoptrical light intensity reaches minimal value.The length of the read output signal of amplitude and specific is decided by the run length of different order record pits.Read waveform according to this, by specific modular arithmetic, just can be with multistage (d, k) the sequence recovery that writes among Fig. 1.The waveform of reading of this multistage RLL read-only optical disc is seen Fig. 9, Figure 10, Figure 11.
To further specify content of the present invention by embodiment below, but that content of the present invention is not subject to embodiment is described:
The multistep read-only optical disk technology of the run length that proposes according to the present invention, we have designed 4 rank RLL read-only optical discs, and its synoptic diagram is seen Figure 12, Figure 13 and Figure 14.At first the binary sequence that binary user data is generated after by Error Correction of Coding is input to 4 rank RLL modulating coders, generate 4 rank (d, k) sequence, here we choose (d=2, k=10).
This sequence generates the write signal waveform of controlling mother CD burning by [a (n-1)+b (n)] mod 4=a (n) computing, and wherein a (n) is the level that writes of n sequence, and b (n) is n data in the 4 rank RLL sequences, and M is the exponent number of multi-stage optical disk.For example, the level a (4) of the 4th sequence of write signal waveform is 0 among the figure, and the 5th the data b (5)=2 of 4 rank RLL sequences, by mould budget (0+2) mod4=2, the level a (5) that can obtain the 5th sequence of write signal waveform is 2.
Under the control of this write signal waveform, write laser on following three kinds of materials respectively imprinting go out different multistage record pits:
1) photoresist material, contour multistage trapezoidal multistage record pit, the degree of depth of record pit is identical, and width and inequality;
2) modification photoresist material, not contour multistage trapezoidal record pit, the degree of depth of record pit and width are all inequality;
3) resin material, the multistage record pit of arbitrary shape, the area difference of longitudinal section, hole.
Referring to Figure 12, Figure 13 and Figure 14, the write signal waveform is also being controlled the run length of these multistage record pits simultaneously.After obtaining 4 rank RLL stampers, be mould with this stamper, through spraying plating process, obtain the pressing mold (Stamper) of metal, as pressing mold,, just can copy 4 rank RLL read-only optical discs with this pressing mold Stamper by the injection moulding mold pressing.
Adopt the read-out system of conventional read-only optical disc that 4 rank RLL read-only optical discs are read.The amplitude of read output signal is decided by the order of record pit, and the length of read output signal is decided by the run length of different order record pits.Read waveform according to this, by following modular arithmetic, just can be with multistage (d, k) the sequence recovery that writes.
b ( n ) = &Delta;a , &Delta;a &GreaterEqual; 0 &Delta;a + M , &Delta;a < 0 , Δ a=a (n-1)-a (n) wherein
For example, read 5 level a of the 4th level a (4)=3, the (5)=1 of waveform among the figure,, can extrapolate b (5)=2 by modular arithmetic 2=(3-1), this just with write (d, k) the 5th data are coincide in the sequence.
By the whole process of Figure 12, Figure 13 and Figure 14 just realized multistage RLL read-only optical disc data generation, mother CD burning, duplicate and overall process that signal reads.
By above-mentioned, the present invention has summed up the method for making of multistep read-only optical disk and stamper, respectively as Figure 15 and illustrated in fig. 16.
Figure 15 shows the process flow diagram of method that is used to make multi-exponent read-only mother disc according to invention.This method comprises following sequential steps:
Step 1502 forms multistage coded sequence with binary user data by Error Correction of Coding and multistage modulating-coding, generates the write signal of control mother CD burning; And
Step 1504, the power with the imprinting laser of write signal control laser instrument output carries out imprinting to the stamper disc, generates multi-exponent read-only mother disc.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the area of the longitudinal section of the record pit of the multi-exponent read-only mother disc that is generated satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of described record pit, and x represents the coordinate of record pit Width, the dark distribution function in hole on the longitudinal section of the described record pit of h (x) expression, and integral domain is the whole longitudinal section of described record pit.It will be appreciated by those skilled in the art that cheating dark distribution function can choose arbitrarily, so this paper no longer provides illustration.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, control the size of the laser recording power of semiconductor laser by the drive current of regulating semiconductor laser less than 0.52 micron multi-exponent read-only mother disc; When laser instrument is gas laser, control the size of the laser recording power of laser instrument by the modulation amplitude that changes acousto-optic or electrooptic modulator.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multi-exponent read-only mother disc, multistage modulating-coding is multistage brigade commander's modulating-coding, formed multistage coded sequence is multistage brigade commander's coded sequence, and the multi-exponent read-only mother disc that is generated is the multi-exponent read-only mother disc of length limit.
Be used for making the method for track pitch above-mentioned, realize control by the time shutter of regulating the mother CD burning laser instrument the brigade commander less than 0.52 micron multi-exponent read-only mother disc.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, regulate the time shutter of mother CD burning by the pulse width of regulating semiconductor laser drive current less than 0.52 micron multi-exponent read-only mother disc; When laser instrument is gas laser, regulate the time shutter of mother CD burning by the modulating pulse width of regulating acousto-optic or electrooptic modulator.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the longitudinal section of record pit broad ways is not contour multistage trapezoidal, and the stamper disc is made by the modification photoresist.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multi-exponent read-only mother disc, the modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the longitudinal section of record pit broad ways is contour multistage trapezoidal, and described stamper disc adopts common photoetching glue material.
Be used for making the method for track pitch less than 0.52 micron multi-exponent read-only mother disc above-mentioned, the longitudinal section of record pit broad ways is an arbitrary shape, and described stamper disc adopts resin material.
Figure 16 shows the process flow diagram of method that is used to make multistep read-only optical disk according to invention.This method comprises following sequential steps:
Step 1602 forms multistage coded sequence with binary user data by Error Correction of Coding and multistage modulating-coding, generates the write signal of control mother CD burning;
Step 1604, the power with the imprinting laser of write signal control laser instrument output carries out imprinting to the stamper disc, generates multi-exponent read-only mother disc;
Step 1606 is a mould with the multi-exponent read-only mother disc, copies metal pressing mold; And
Step 1608 is used pressing mold, goes out multistep read-only optical disk by moulding replication.
By comparing with the method for making of the multi-exponent read-only mother disc shown in Figure 15, the method for making of the multistep read-only optical disk shown in Figure 16 has had more step 1606 and step 1608.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the area of the longitudinal section of the record pit of the multi-exponent read-only mother disc that is generated and the multistep read-only optical disk that generates all satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of record pit, the dark distribution function in hole on the longitudinal section of h (x) expression record pit, and x represents the coordinate of record pit Width, integral domain is the whole longitudinal section of record pit.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, control the size of the laser recording power of semiconductor laser by the drive current of regulating semiconductor laser less than 0.52 micron multistep read-only optical disk; When laser instrument is gas laser, control the size of the laser recording power of laser instrument by the modulation amplitude that changes acousto-optic or electrooptic modulator.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multistep read-only optical disk, multistage modulating-coding is multistage brigade commander's modulating-coding, formed multistage coded sequence is multistage brigade commander's coded sequence, the multi-exponent read-only mother disc that is generated is the multi-exponent read-only mother disc of length limit, and the multistep read-only optical disk that is generated is the multistep read-only optical disk of length limit.
Be used for making the method for track pitch above-mentioned, realize control by the time shutter of regulating the mother CD burning laser instrument described brigade commander less than 0.52 micron multistep read-only optical disk.
Be used for making the method for track pitch above-mentioned, when laser instrument is semiconductor laser, regulate the time shutter of described mother CD burning by the pulse width of regulating laser drive current less than 0.52 micron multistep read-only optical disk; When laser instrument is gas laser, regulate the time shutter of described mother CD burning by the modulating pulse width of regulating acousto-optic or electrooptic modulator.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the longitudinal section of record pit broad ways is not contour multistage trapezoidal, and the stamper disc is made by the modification photoresist.
Be used for making the method for track pitch above-mentioned less than 0.52 micron multistep read-only optical disk, the modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and described chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the longitudinal section of record pit broad ways is contour multistage trapezoidal, and described stamper disc adopts common photoetching glue material.
Be used for making the method for track pitch less than 0.52 micron multistep read-only optical disk above-mentioned, the longitudinal section of record pit broad ways is an arbitrary shape, and described stamper disc adopts resin material.
To sum up, the multistep read-only optical disk of the run length that the present invention proposes or stamper and preparation method thereof combine the advantage of multistage technology and rll encoder, under the situation that does not change optical maser wavelength and optical numerical value aperture, can significantly improve read-only optical disc memory capacity and data transmission rate, keep maximum compatibility with present read-only optical disc system.Adopt the rll encoder scheme to reduce requirement, help the detection with read output signal of duplicating of read-only optical disc the multistep read-only optical disk exponent number.
In addition, it will be appreciated by those skilled in the art that when the present invention is used to make Blu-ray Disc, track pitch can be defined as less than 0.52 micron, also can be defined as, for example less than 0.45 micron or 0.4 micron less than 0.5 micron or littler.
Need to prove that the term of being mentioned " CD " is understood from those skilled in the art's angle herein, should comprise " son dish " (being commonly called as CD) and " stamper "." CD " in the claim to a product contained " son dish " and " stamper ", and reason is that " the son dish " that the present invention looks for protection is identical with the structure of " stamper ".Yet in claim to a method, because the method for making of " stamper " is different with the method for making of " son dish ", particularly, making " son dish " at first needs to make " stamper ", so in claim to a method, " CD " refers to " son dish ".
Moreover, for purpose of explanation, this paper has disclosed concrete production firm and the model that is used to realize a lot of device of the present invention, equipment or system, but, those skilled in the art are to be understood that, this also is not used in qualification the present invention, adopts the product of other model of other manufacturer can realize the present invention equally.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (11)

1. multistep read-only optical disk, it is characterized in that, the track pitch of described multistep read-only optical disk is less than 0.52 micron, described multistep read-only optical disk has multiple record pit, the longitudinal section of described record pit is multistage arbitrary shape, the area of the longitudinal section of the record pit of different rank has nothing in common with each other, and the area of the longitudinal section of described record pit satisfies following formula:
S=∫h(x)dx,
Wherein, S represents the area of the longitudinal section of described record pit, and x represents the coordinate of record pit Width, the dark distribution function in hole on the longitudinal section of the described record pit of h (x) expression, and integral domain is the whole longitudinal section of described record pit.
2. multistep read-only optical disk according to claim 1 is characterized in that, the area S of longitudinal section, described hole is by the power decision of mother CD burning laser.
3. multistep read-only optical disk according to claim 1, it is characterized in that the brigade commander of described multistep read-only optical disk is limited, in the passage sequence of described multistep read-only optical disk, between two non-" 0 " data the rarest d " 0 ", k " 0 " is arranged at most, and wherein, k, d are integer, k is more than or equal to d, d is more than or equal to 0, and parameter d has determined to appear at the minimum brigade commander in the described passage sequence, and parameter k has determined to appear at the maximum brigade commander in the described passage sequence.
4. multistep read-only optical disk according to claim 1 is characterized in that, the degree of depth difference of the record pit of different rank.
5. multistep read-only optical disk according to claim 1 is characterized in that, the width difference of the record pit of different rank.
6. multistep read-only optical disk according to claim 1 is characterized in that, the width difference of the record pit of different rank, the degree of depth of the record pit of different rank are also different.
7. according to each described multistep read-only optical disk in the claim 4 to 6, it is characterized in that, determine the degree of depth and/or the width of described record pit by the power of regulating stamper disc imprinting laser.
8. multistep read-only optical disk according to claim 7 is characterized in that, the longitudinal section of described record pit broad ways is contour multistage trapezoidal, and described stamper disc adopts the photoresist material.
9. multistep read-only optical disk according to claim 7 is characterized in that, the longitudinal section of described record pit broad ways is not contour multistage trapezoidal, and described stamper disc adopts modification photoresist material.
10. multistep read-only optical disk according to claim 9, it is characterized in that, described modification photoresist is to obtain after the common photoresist that the production stamper is used is passed through physical modification or chemical modification, wherein, described physical modification is undertaken by at least a processing mode that is selected from the group that comprises thermal treatment, optical processing, electric treatment and magnetic treatment, and described chemical modification is selected from the group that comprises initiating agent, sensitizer and resin by increase at least a adjuvant carries out.
11. multistep read-only optical disk according to claim 7 is characterized in that, the longitudinal section of described record pit broad ways is an arbitrary shape, and described stamper disc adopts resin material.
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