CN100369140C - Multistep read-only optical disk and its making method - Google Patents

Multistep read-only optical disk and its making method Download PDF

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Publication number
CN100369140C
CN100369140C CNB2005100535360A CN200510053536A CN100369140C CN 100369140 C CN100369140 C CN 100369140C CN B2005100535360 A CNB2005100535360 A CN B2005100535360A CN 200510053536 A CN200510053536 A CN 200510053536A CN 100369140 C CN100369140 C CN 100369140C
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read
optical disc
level
pits
disc
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CN1658306A (en
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刘建民
王豪
吴大林
陆晓辉
苏辰宇
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SHANGHAI XIANGZHANG ELECTRONIC CO Ltd
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BEIJING BAOLIXING DATA OPTICAL DISC Co Ltd
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Priority to JP2005112877A priority patent/JP2006252743A/en
Priority to US11/102,567 priority patent/US7680024B2/en
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Abstract

The present invention relates to a multi-level read-only optical disk and a manufacture method thereof. The multi-level read-only optical disk has various recording pits, the longitudinal sections of the various recording pits along the width direction of the recording pits are in multi-level random shapes, and the areas of the longitudinal sections of the recording pits with different levels are different; the areas of the longitudinal sections of the recording pits satisfy the following formula: *, wherein the S denotes the areas of the longitudinal sections of the recording pits, the x denotes coordinates in the width direction of the recording pits, the h (x) denotes a pit depth distribution function on the longitudinal sections of the recording pits, and integral areas are the whole longitudinal sections of the recording pits. In addition, run lengths of the multi-level read-only optical disk can be also limited. The multi-level read-only optical disk and a manufacture method thereof with the limited run lengths provided by the present invention combine the advantages of multi-level technology and encoding with the limited run lengths, the storage capacity and the data transmission rate of the read-only optical disk can be obviously enhanced under the conditions that laser wavelengths and optical numerical apertures are not changed, and the present invention maintains the largest compatibility with the existing read-only optical disk system.

Description

Multi-level read-only optical disc and method for fabricating the same
Technical Field
The present invention relates to digital storage technology, and more particularly, to digital storage technology using read-only optical discs.
Background
The existing digital optical disc products convert information into binary data, and correspond binary data to two different physical states of a record symbol of a storage medium in a certain modulation mode to realize data storage, wherein the storage mode is called binary storage. The existing read-only optical disc storage technology adopts a binary storage mode, the current corresponding position is judged to be a Pit (Pit) or a Land (Land) according to the intensity of reflected light, and each recording unit can record two state numbers, namely information corresponding to 1 bit.
Multi-level storage techniques are proposed with respect to binary storage. If the data stream is modulated into M-system data (M > 2), and the modulated M-system data corresponds to M different physical states of the recording medium, M-level storage can be realized. M-order storage in the position of an information recording spot can store log 2 (M) bit data, so that when M is greater than 2, each recording unit can be recorded withTo record information of more than 1bit and the data transmission rate is simultaneously improved. Multi-order storage is a new technology which can obviously improve the storage capacity and the data transmission rate under the condition of not changing the laser wavelength and the optical numerical aperture. Therefore, the multi-level memory system has good compatibility with the current optical memory system.
The most basic example of the multilevel read-only optical disc is the multilevel scheme of Pit Depth Modulation, also known as PDM (Pit-Depth Modulation). The principle is that for a read-only optical disc, according to the scalar diffraction theory, the light intensity of reflected light has a corresponding relation with the recording pit depth of the optical disc: starting from the pit depth of 0, the light intensity of the reflected light is reduced along with the increase of the pit depth, and the light intensity of the reflected light reaches a minimum value at the pit depth of 1/4 of the laser wavelength. The relation between the depth of recording pit and the intensity of reflected light is used to set up different pit depth changes, so that the multi-order optical disk storage can be realized. However, the number of the steps of the pit depth of the optical disc is too large, which causes many technical problems, such as disc duplication, signal detection, etc. Therefore, it is greatly limited to increase the storage capacity of the read-only optical disc by simply increasing the order of the pit depth.
At present, the coding of multi-level optical disc storage adopts an amplitude modulation scheme, and the potential of the coding technology is not developed. The conventional binary optical storage disc adopts a Run Length (Run Length Limited) Limited coding scheme, i.e. RLL (Run Length Limited) coding. RLL means that the channel sequence stored in the optical disc satisfies the following condition: there are at least d '0's and at most k '0's between two '1's of the sequence. The two parameters d and k specify the minimum and maximum run lengths, respectively, that may occur in the sequence. The parameter d controls the highest transmission frequency and therefore may affect the intersymbol interference when the sequence is transmitted over a band limited channel. In binary data transmission, it is generally desirable that the received signal be self-synchronizing. Synchronization is usually reproduced using a phase locked loop. The phase-locked loop adjusts the phase of the detection instant in accordance with the transitions of the received waveform. The maximum run parameter k ensures the proper transition frequency to meet the read clock synchronization requirements.
RLL coding can improve storage capacity relative to amplitude modulation coding. In binary storage, RLL coding is used to store more than 1bit of information on a minimum record carrier, and thus RLL coding is widely used in optical storage. Such as EFM coding for CDs (d =2,k = 10) and EFM + coding for DVDs (d =2,k = 10). The storage density of 1.5 (bit/minimum record) is obtained for the DVD due to the RLL coding.
Based on the foregoing, there is a need for a multi-level read-only optical disc or master and methods for making the same that employ techniques other than the prior art.
Disclosure of Invention
In order to overcome at least one of the above-mentioned drawbacks of the prior art, the present invention provides a novel storage technique capable of significantly improving the storage capacity and data transmission rate of a read-only optical disc without changing the wavelength of the laser and the optical numerical aperture.
The read-only optical disc adopts the multi-order storage technology with limited run length, and can obtain higher storage capacity in the multi-order read-only optical disc with fewer orders.
In order to achieve the above object, the present invention provides a multi-level read-only optical disc, wherein the track pitch is 0.52 μm or more, the multi-level read-only optical disc has a plurality of pits (a plurality of pits), the longitudinal cross section of each pit is in a multi-level arbitrary shape, the longitudinal cross sections of the pits of different levels (different levels) are different from each other, and the area of the longitudinal cross section of each pit satisfies the following formula:
S=∫h(x)dx,
wherein S represents the area of a longitudinal section of a pit, x represents the coordinate in the pit width direction, h (x) represents the pit depth distribution function on the longitudinal section of the pit, and the integral region is the entire longitudinal section of the pit.
In the multi-level read-only optical disc, the area S of the longitudinal section of the pit is determined by the power of the mastering laser.
In the above mentioned mlr-rom, the Run Length (Run Length, simply called Run Length) is Limited, which may also be called Run Length Limited, and in the channel sequence of the mlr-rom, there are at least d "0" s and at most k "0" s between two non "0" s, where k and d are integers, k is greater than or equal to d, and d is greater than or equal to 0, the parameter d determines the minimum Run Length that may appear in the channel sequence, and the parameter k determines the maximum Run Length that may appear in the channel sequence.
In the above multilevel read-only optical disc, the storage capacity of each record symbol is log 2 M-bit data, where M is an integer greater than 2, representing the order of the pit.
In the multi-level read-only optical disc, the depth of the recording pits with different orders is different, and the width of the recording pits with different orders is the same; or the widths of the recording pits with different orders are different, and the depths of the recording pits with different orders are the same; alternatively, the widths of the pits of different orders are different, and the depths of the pits of different orders are also different.
In the above multilevel read-only optical disc, the depth and/or width of the recording pits is determined by adjusting the power of the mastering laser.
In the multi-level read-only optical disc, the longitudinal section of the recording pit along the width direction is in a multi-step shape with the same height, and the master disc adopts (contains) photoresist materials.
In addition, the longitudinal section of the recording pits in the width direction may be a multi-step shape having different heights, and the master disc may be made of a modified photoresist material obtained by physically or chemically modifying a general photoresist used for producing the master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, light treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
The longitudinal section of the recording pit in the width direction may be any shape, and the master disc may be made of a resin material.
In the above-mentioned mlr-rom, the runlength of the mlr-rom is limited, and in the channel sequence of the mlr-rom, there are at least d "0" s and at most k "0" s between two non-0 data, where the parameter d determines the minimum run length that may occur in the channel sequence and the parameter k determines the maximum run length that may occur in the channel sequence.
The invention also provides a method for manufacturing the multi-stage read-only master disc with the track pitch of more than or equal to 0.52 microns, which comprises the following steps:
a) Forming a multi-order coding sequence by binary user data through error correction coding and multi-order modulation coding, generating a write-in signal for controlling mastering disc recording, and setting the inter-channel distance of a multi-order read-only mastering disc to be more than or equal to 0.52 microns; and
b) Controlling the power of the recording laser output by the laser by using the write-in signal generated in the step a), recording the disk of the master disk, and generating the multi-stage read-only master disk.
In the method for manufacturing the multi-level read-only master disc with the track pitch of more than or equal to 0.52 micrometers, the areas of the longitudinal sections of the pits of different orders are different, and the areas of the longitudinal sections of the generated pits of the multi-level read-only master disc satisfy the following formula:
S=∫h(x)dx,
wherein S represents an area of a longitudinal section of the pit, x represents a coordinate in a pit width direction, h (x) represents a pit depth distribution function on the longitudinal section of the pit, and the integrated area is the entire longitudinal section of the pit.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the size of the laser recording power of the semiconductor laser is controlled by adjusting the driving current of the semiconductor laser; when the laser is a gas laser, the laser recording power of the laser is controlled by changing the modulation amplitude of the acousto-optic or electro-optic modulator.
In the above method for manufacturing a multi-level read-only master disc with a track pitch of 0.52 μm or more, the multi-level modulation code is a multi-level run-length modulation code, the formed multi-level code sequence is a multi-level run-length code sequence, and the generated multi-level read-only master disc is a multi-level read-only master disc with a limited run-length.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, the run length is controlled by adjusting the exposure time of a master disc recording laser.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the exposure time of recording of the master disc is adjusted by adjusting the pulse width of the driving current of the semiconductor laser; when the laser is a gas laser, the exposure time of the mastering disc recording is adjusted by adjusting the modulation pulse width of the acousto-optic or electro-optic modulator.
In the above method for manufacturing a multi-level read-only master disk with a track pitch of 0.52 μm or more, the longitudinal section of the recording pits in the width direction is in a multi-step shape with equal height, and the master disk is made of (contains) a photoresist material.
In the method for manufacturing the multi-level read-only master disc with the track pitch of more than or equal to 0.52 microns, the longitudinal section of the recording pit along the width direction is in a multi-step shape with unequal heights, and the master disc plate is made of a modified photoresist material.
In the above method for manufacturing a multi-step read-only master disc having a track pitch of 0.52 μm or more, the modified photoresist is obtained by physically or chemically modifying a general photoresist used for manufacturing the master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, light treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
The longitudinal section of the recording pit in the width direction may be any shape, and the master disc may be made of a resin material.
The invention also provides a method for manufacturing the multi-order read-only optical disc with the track pitch more than or equal to 0.52 micron, which comprises the following steps:
a) Forming a multilevel coding sequence by binary user data through error correction coding and multilevel modulation coding, generating a write-in signal for controlling the recording of a master disc, and setting the inter-channel distance of the multilevel read-only master disc to be more than or equal to 0.52 microns;
b) Controlling the power of a recording laser output by a laser by using the writing signal, recording the disc of the mother disc, and generating a multi-stage read-only mother disc;
c) Copying a metal pressing die by using the multi-order read-only master disc as a die; and
d) And the multi-level read-only optical disc is copied by using the stamper through mould pressing.
It can be seen that steps c and d are added to the above-mentioned method for producing a multi-level read-only master having a track pitch of 0.52 microns or greater.
In the method for manufacturing the multi-level read-only optical disc with the track pitch of more than or equal to 0.52 microns, the areas of the longitudinal sections of the recording pits of different orders are different, and the areas of the longitudinal sections of the recording pits of the generated multi-level read-only optical disc and the generated multi-level read-only optical disc both satisfy the following formula:
S=∫h(x)dx,
wherein S represents an area of a longitudinal section of a pit, x represents a coordinate in a pit width direction, h (x) represents a pit depth distribution function on the longitudinal section of the pit, and the integration area is the entire longitudinal section of the pit.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the size of the laser recording power of the semiconductor laser is controlled by adjusting the driving current of the semiconductor laser; when the laser is a gas laser, the laser recording power of the laser is controlled by changing the modulation amplitude of the acousto-optic or electro-optic modulator.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being greater than or equal to 0.52 microns, the multi-level modulation code is a multi-level run-length modulation code, the formed multi-level code sequence is a multi-level run-length code sequence, the generated multi-level read-only optical disc is a multi-level read-only optical disc with limited run-length, and the generated multi-level read-only optical disc is a multi-level read-only optical disc with limited run-length.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, the run-length is controlled by adjusting the exposure time of a master disc recording laser.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the exposure time of mastering writing is adjusted by adjusting the pulse width of the driving current of the laser; when the laser is a gas laser, the exposure time of the master disc inscription is adjusted by adjusting the modulation pulse width of an acousto-optic or electro-optic modulator.
In the method for manufacturing the multi-level read-only optical disc with the track pitch of more than or equal to 0.52 microns, the longitudinal section of the recording pit along the width direction is in a multi-step shape with the same height, and the master disc adopts (contains) a photoresist material.
In the above method for manufacturing a multi-step read-only optical disc having a track pitch of 0.52 μm or more, the master disc is made of a modified photoresist.
In the above method for manufacturing a multi-level read-only optical disc having a track pitch of 0.52 μm or more, the modified photoresist is obtained by physically or chemically modifying a general photoresist used for producing a master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, light treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
The longitudinal section of the recording pit in the width direction may be any shape, and the master disc may be made of a resin material.
In the multi-level read-only optical disc proposed by the present invention, the track pitch of the recording pits is equal to or greater than 0.52 μm (but not limited thereto). The longitudinal section of the recording pit along the width direction, referred to as pit longitudinal section for short, is one of the following three situations:
1) The height is equal to the height of the multi-step, the depth of the recording pits is the same, and the width is different;
2) The height is not equal and the depth and the width of the recording pit are different;
3) The shape of the recording pit is not fixed, the areas of the longitudinal sections of the recording pits with different orders are different, and the areas of the longitudinal sections of the pits can be quantitatively expressed by S: s = & (x) dx where h (x) is a pit depth distribution function on a pit longitudinal section, x represents a coordinate in a pit width direction, and an integral region is the entire pit.
The invention provides that the multi-order recording pits with different orders can be obtained by changing the power of the recording laser of the master disc under the three conditions, thereby realizing the multi-order read-only optical disc.
The invention also provides a method for adopting RLL coding scheme in multi-order read-only optical disk, which can further improve the storage density of read-only optical disk on the basis of multi-order. The storage density of a 4 th order optical disc, e.g. using RLL (d =2,k = 8), can reach 2.6 (bit/minimum record carrier), which is equivalent to the storage density of an 8 th order optical disc using amplitude modulation. Therefore, the multi-order read-only optical disc adopting RLL can reduce the requirement on the order of the recording pits of the multi-order read-only optical disc, and is beneficial to the copying of the read-only optical disc and the detection of read signals.
The multi-level read-only optical disc according to the present invention: on the multi-level read-only optical disk, the track pitch of the recording pits is greater than or equal to 0.52 microns, and the longitudinal section of the pits is one of the following three situations:
1) The height is equal to the height of the multi-step, the depth of the recording pits is equal, and the width is different;
2) The height is not equal and the depth and the width of the recording pit are different;
3) The shape of the recording pit is not fixed, and the area of the longitudinal section of the pit can be quantitatively expressed by S: s = & (x) dx where h (x) is a pit depth distribution function on a pit longitudinal section, x represents a coordinate in a pit width direction, and an integral region is the entire pit.
In the above case, the order of the multi-order pits is determined by the power of the mastering laser.
Run lengths, i.e. runlengths, of multi-level read-only optical discs are limited: in the channel sequence of the multi-level read-only optical disc, there are at least d "0" s and at most k "0" s between two non "0" data, and the two parameters d and k respectively determine the minimum and maximum run lengths that may appear in the channel sequence, where k and d are integers, k is greater than or equal to d, and d is greater than or equal to 0.
The method according to the invention comprises the following steps in sequence:
step 1: binary user data is subjected to error correction coding and multi-level run length modulation coding, namely multi-level RLL modulation coding to form a multi-level run length coding sequence, a signal for controlling recording and writing of a master disc is generated, and the track pitch for recording the master disc is set to be larger than or equal to 0.52 microns;
step 2: controlling the power of the recording laser output by the laser by using the writing signal generated in the step 1, and recording one of the following three materials: 1) Burning the disk of the mother disk made of photoresist material to generate a multistage mother disk with equal height and multiple steps; 2) Burning the disk of the mother disk made of the modified photoresist material to generate a multi-step mother disk with different heights and multiple steps; 3) Burning the mother disc made of resin material to produce multi-stage mother disc with multi-stage random shape;
the run length of each situation is realized by adjusting the exposure time of the mastering recording: for a semiconductor laser, adjusting the pulse width of the laser driving current; for the gas laser, the modulation pulse width of an acousto-optic or electro-optic modulator is changed;
for a semiconductor laser, the magnitude of laser recording power is controlled by adjusting the driving current of the laser, and for a gas laser, the magnitude of laser recording power is controlled by changing the modulation amplitude of an acousto-optic or electro-optic modulator;
and 3, step 3: duplicating a metal pressing die by using the mother disc obtained in the step 2 as a die;
and 4, step 4: and 3, duplicating the multi-order read-only optical disc with the limited free length by using the pressing die obtained in the step 3 through pressing.
In summary, the present invention provides a multi-level read-only optical disc storage technique with limited run length. The width and depth of the pits are different in the multi-level read-only optical disc. The invention provides a method for obtaining multi-level recording pits with random shapes (different width and depth, same width and depth, or same depth and width, etc.) on the longitudinal section by changing the power of a master disc recording laser, thereby realizing multi-level read-only optical discs.
The invention also provides an RLL coding scheme adopted in the multi-level read-only optical disc, which can further improve the storage density of the read-only optical disc on the basis of multi-level. The storage density of a 4 th order optical disc, such as one using RLL (d =2,k = 8), can reach 2.6 (bit/minimum record), which is equivalent to the storage density of an 8 th order optical disc using amplitude modulation. Therefore, the multi-level read-only optical disc adopting RLL can reduce the requirement on the recording pit order of the multi-level read-only optical disc, and is beneficial to the copying of the read-only optical disc and the detection of read signals.
The run-length limited multi-order read-only optical disk or master disk and the manufacturing method thereof combine the advantages of the multi-order technology and the RLL coding, can obviously improve the storage capacity and the data transmission rate of the read-only optical disk under the condition of not changing the laser wavelength and the optical numerical aperture, and keep the maximum compatibility with the current read-only optical disk system. The RLL coding scheme reduces the requirement on the order of the multi-order read-only optical disc and is favorable for the copy of the read-only optical disc and the detection of read signals.
It should be noted that the term "optical disc" referred to herein is understood by those skilled in the art to include "subdisc" (colloquially referred to as optical disc) and "master disc". "optical disc" in the product claims is meant to cover both "subdisc" and "master" in that the structure of the "subdisc" and "master" for which the invention seeks protection is the same. However, in the method claims, since the method of making the "master" and the method of making the "subdisc" are different, specifically, making the "subdisc" first requires making the "master", the "optical disc" is referred to as the "subdisc" in the method claims.
Drawings
For a better understanding of the invention, specific embodiments thereof will be described below with reference to the accompanying drawings, in which:
FIG. 1 shows a cross-sectional view of a multi-stage RLL stamper recording process and a stamper after recording;
FIG. 2 illustrates a multi-level RLL encoding and write signal waveform generation process;
FIG. 3a shows a multi-level RLL master disc burning process of photoresist material and a top view of the mother disc after burning;
FIG. 3b shows the multi-stage RLL master disc burning process of the photoresist material and the longitudinal section view (equal height steps) of the mother disc after burning;
FIG. 4a shows a multi-level RLL master disc burning process of the modified photoresist material and a cross-sectional view of the master disc after burning;
FIG. 4b shows a multi-level RLL mastering process for the modified photoresist material and a top view of the mastered disk;
FIG. 4c shows a multi-step RLL master pit longitudinal cross-section (not equal height steps) of a modified photoresist material;
FIG. 5a shows a cross-sectional view of a multi-stage RLL master disc of a resin material during and after scribing;
FIG. 5b shows a multi-stage RLL mastering process for resin material and a top view of the mastered disc;
FIG. 5c shows a multi-step RLL master disc pit longitudinal cross-section (multi-step arbitrary shape) of a resin material;
FIG. 6a shows a top view of a multi-stage RLL read-only disk replication process where the master is a photoresist material;
FIG. 6b is a longitudinal cross-sectional view of a multi-stage RLL read-only disk replication process with a master disk of photoresist material;
FIG. 7a shows a cross-sectional view of a multi-level RLL read-only disk replication process with a master disk of modified photoresist material;
FIG. 7b shows a top view of a multi-level RLL read-only disk replication process with a master disk of modified photoresist material;
FIG. 7c is a longitudinal cross-sectional view of a multi-level RLL read-only disk replication process with a master disk of modified photoresist material;
FIG. 8a is a cross-sectional view showing a multi-step RLL read-only disc replication process in which the master is a resin material;
FIG. 8b shows the longitudinal section of the recording pits (multi-step random shape) in the multi-step RLL ROM-ROM disc replication process in which the master is made of a resin material;
FIG. 9 shows a readout waveform (top view) for a multi-level RLL read-only optical disc with a master disk of photoresist material;
FIG. 10 shows readout waveforms (cross-sectional view) for a multi-level RLL read-only optical disc with a master disk of modified photoresist material;
FIG. 11 shows a readout waveform (cross-sectional view) of a multi-step RLL read-only optical disc in which the master is a resin material;
FIG. 12 shows an illustrative diagram (top view) of a 4-step RLL read-only optical disc embodiment with a master disk of photoresist material;
FIG. 13 shows a schematic diagram (cross-sectional view) of a 4-step RLL read-only optical disc embodiment with a master disk of modified photoresist material;
FIG. 14 shows a schematic diagram (cross-sectional view) of an embodiment of a 4-step RLL read-only optical disc with a master disc of a resin material;
FIG. 15 shows a flow diagram of a method for making a multi-level read-only master according to the invention; and
fig. 16 shows a flow chart of a method for manufacturing a multi-level read-only optical disc according to the present invention.
Detailed Description
In the process of manufacturing an optical disc, a master disc is usually manufactured first, and the step of manufacturing the master disc includes: a master disc photoresist (in the present invention, a photoresist of a micro posit S1800-4 type from Rohm & Haas, uk) is coated on a glass substrate, a master disc is recorded by using a master disc recording System (in the present invention, ii mastering System from NIMBUS, england), and the photoresist is exposed to light by using a laser of NLHV 500C type from Nichia, japan, to develop the master disc.
Then, using the master as a mold, a glass substrate was sputtered (sputtering process) using a glass disk sputtering machine (in the present invention, a Pyramet sputtering machine of the type UNAXIS, switzerland) to deposit a thin metal layer and then a relatively thick metal layer, to obtain a metal negative sub-disk, which was used as a Stamper (Stamper) for injection replication. In the present invention, a DVD optical disc production line available from Panasonic corporation of japan is used. The disc was pressed using an injection molding machine (in the present invention, vertical injection molding machines of DL0004 type and DR0004 type of Panasonic corporation, japan) and then the pressed disc was sputtered using a sputter of switel type or cubite type of UNAXIS, switzerland, finally, the disc was molded using a stamper. The finalization line employs a GRBA-151 system of Panasonic corporation, japan. The online detector is an S3DVD online detector of BASLER in Germany.
In addition, the master/subdisc tester uses DVD Stamper Pro or ST3 Stamper Pro of Audio Dev in Sweden. The disk test apparatus used was O-PAS 1000 or DDU 1000 from Pulstec, japan.
The mastering of the multi-level read-only optical disc is realized by changing the power of the recording laser. There are two schemes for obtaining recording laser with different powers: scheme 1) for a semiconductor laser, different output powers can be obtained by adjusting the driving current of the laser; scheme 2) for the gas laser, different output powers can be obtained by changing the modulation amplitude of an acousto-optic (or electro-optic) modulator. Different multi-level pits can be respectively recorded on the following three materials by different laser powers:
1) Photoresist material, multi-step and multi-level recording pits of equal height;
2) Modifying a photoresist material, and forming multiple step-shaped recording pits with different heights;
3) Resin material, random multi-level recording pits.
While controlling the laser power, the exposure time is regulated to obtain multilevel recording pits with different run lengths, so as to realize multilevel read-only optical disk with limited run lengths. There are also two schemes for adjusting the exposure time for mastering: scheme 1) for a semiconductor laser, different exposure time can be obtained by adjusting the pulse width of the driving current of the laser; scheme 2) for the gas laser, different exposure times can be obtained by changing the modulation pulse width of an acousto-optic (or electro-optic) modulator.
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Fig. 1 is a cross-sectional view of a multi-stage RLL master disc during and after recording, which is a schematic diagram of the present invention.
The specific implementation scheme of the multi-order read-only optical disc master disc with limited travel length and the track pitch of more than or equal to 0.52 microns provided by the invention is as follows: setting the track pitch of the recording pits to be more than or equal to 0.52 microns, selecting one of the following three materials, and adopting different recording laser powers to respectively record different multi-level recording pits:
1) Photoresist material, multi-step multi-level recording pits of equal height, the depth of the recording pits is equal, but the width is different;
2) The photoresist material is modified, and the depth and the width of the recording pits are different;
3) The resin material, random multi-level pits, and the areas of the vertical cross sections of the pits of different orders are different from each other.
Fig. 2 shows a multi-stage RLL coding and write signal waveform generation process.
The modulation coding employed in the present invention is a multi-level RLL coding, and as can be seen from fig. 2, first, binary user data 202 is input to an error correction encoder 204 to generate a binary sequence 206 including the user data and a check code; the binary sequence 206 is then input into a multi-level RLL encoder 208 to generate a multi-level (d, k) run-length sequence 210 that satisfies the following condition: a minimum of d ' 0's, and a maximum of k ' 0's, between two non-0 ' data of the sequence, the two parameters d and k defining the minimum and maximum run lengths, respectively, that may occur in the sequence; finally, the sequence is passed through a modulo M NRZI conversion operation 212 to generate a write signal waveform 214 that controls mastering.
In mastering of photoresist materials, the mastering process is achieved by the photochemical effect of the material. Under the action of laser, the photoresist on the exposed part of the mother disc is photochemical reacted, and after development and fixation, a recording pit is formed on the exposed part. The power of the recording laser is controlled by the amplitude of the writing signal waveform, and the widths of the recording pits corresponding to different orders are different, but the pit depths are the same. Photoresist materials are commonly used in current mastering systems and are therefore more suitable for current mastering systems.
In mastering of modified photoresist materials, the mastering process is achieved by the photochemical effect of the material. Under the action of the laser, the modified photoresist on the exposed part of the mother disc generates photochemical reaction, and after development and fixation, a recording pit is formed on the exposed part. The photochemical reaction speed of the unmodified photoresist is high, and the photoresist at the exposure part is completely reacted, so that the depths of the recording pits are the same; the photochemical reaction speed of the modified photoresist is reduced, the depth of the modified photoresist which reacts at the exposure part is determined by the exposure power, and recording pits with different depths can be obtained by different exposure powers. The power of the recording laser is controlled by the amplitude of the writing signal waveform, and the widths and depths of different laser corresponding to different order pits are different, so that the resolution between different order pits is increased, and the method is favorable for copying of the read-only optical disc and detecting of read signals. The photoresist material is generally applied to the current mastering system, and the modified photoresist based on the photoresist material is easy to realize, so that the modified photoresist is more suitable for the current mastering system.
In mastering of resin materials, the mastering process is achieved by the thermal effect of a laser. Under the action of the heat effect of the recording laser, the exposed resin material on the mother disc is gasified to form one record pit directly. The power of the recording laser is controlled by the amplitude of the writing signal waveform, and the widths and depths of different laser corresponding to different order pits are different, so that the resolution between different order pits is increased, and the copying of the read-only optical disc and the detection of read signals are facilitated.
The amplitude of the writing signal waveform (writing waveform) controls the laser power, and the length of the writing signal waveform controls the switching time of the laser or the modulator, thereby obtaining multi-level pits with different run lengths. That is, the amplitude and length of the writing signal waveform respectively control the power and exposure time of the recording laser, and finally control the order and run length of the recording pit, thereby realizing the recording of the Master (Master) of the multilevel read-only optical disc with limited run length. The multi-stage RLL master disc recording process and the schematic diagrams of the recorded master disc are shown in FIGS. 3a-b, 4a-c, and 5a-c.
After obtaining the multi-stage RLL master disc, the master disc is used as a mould to obtain a metal negative sub disc through a spraying process, namely the metal negative sub disc can be used as a Stamper (stamp) for injection molding replication, and the stamp is used as the Stamper to replicate the read-only optical disc of the multi-stage RLL through injection molding. This replication process is illustrated in fig. 6a-b, fig. 7a-c, and fig. 8a-b.
The reading process of the multi-step RLL read-only optical disc is shown in FIG. 9, FIG. 10, and FIG. 11. The optical read-out system of the multi-stage RLL read-only optical disk is completely compatible with the optical read-out system of the conventional read-only optical disk, so that the optical read-out system of the conventional read-only optical disk can be adopted to read the multi-stage RLL read-only optical disk. The read waveform of the multi-level RLL read-only optical disc is shown in FIG. 9, FIG. 10, and FIG. 11, the amplitude of the read signal is determined by the order of the recording pit (also called the order), starting from 0, the intensity of the reflected light decreases as the order of the recording pit increases, and the intensity of the reflected light reaches a minimum value at the highest order of the recording pit. The length of the read signal of a specific amplitude depends on the runlength of the different order pits. Based on the read waveform, the multi-level (d, k) sequence written in FIG. 1 can be recovered by a specific modulo operation. The readout waveforms of the multi-level RLL ROM are shown in FIG. 9, FIG. 10, and FIG. 11.
The invention will now be further illustrated by the following examples, but is not limited thereto:
according to the multi-level CD-ROM technology with run length limitation proposed in the present invention, we design a 4-level RLL CD-ROM, which is schematically shown in FIG. 12, FIG. 13, and FIG. 14. Firstly, binary user data is input into a 4-order RLL modulation encoder through a binary sequence generated after error correction coding, and a 4-order (d, k) sequence is generated, where we select (d =2, k = 10).
The sequence generates a waveform of a write signal for controlling mastering by [ a (n-1) + b (n) ] mod4= a (n), where a (n) is a write level of an nth sequence, b (n) is nth data in a 4 th-order RLL sequence, and M is an order of a multi-order disc. For example, in the figure, the level a (4) of the 4 th sequence of the write signal waveform is 0, and the 5 th data b (5) =2 of the RLL sequence of 4 th order, the level a (5) of the 5 th sequence of the write signal waveform can be obtained as 2 by the modulus budget (0+2) mod4= 2.
Under the control of the waveform of the writing signal, the writing laser can respectively write different multi-level pits on the following three materials:
1) Photoresist material, multi-step multi-level recording pits with the same height and different widths;
2) The photoresist material is modified, and the depth and the width of the recording pits are different;
3) The resin material, random multi-level recording pits, the longitudinal cross-sectional areas of the pits are different.
Referring to FIG. 12, FIG. 13, and FIG. 14, the write signal waveform also controls the run lengths of the multi-level pits. After obtaining the 4-step RLL master disc, the master disc is taken as a mold, a spraying process is carried out to obtain a metal Stamper (stamp), and the stamp is taken as a Stamper to reproduce the 4-step RLL read-only optical disc through injection molding.
The 4-stage RLL read-only optical disc is read by a read-out system of a conventional read-only optical disc. The amplitude of the read signal is determined by the order of the pits and the length of the read signal is determined by the runlength of the different order pits. From this read waveform, the written multi-step (d, k) sequence can be restored by the following modulo operation.
Figure C20051005353600221
Wherein Δ a = a (n-1) -a (n)
For example, in the figure, the 4 th level a (4) =3 and the 5 th level a (5) =1 of the read waveform are modulo 2= (3-1), and b (5) =2 can be estimated, which is just in agreement with the 5 th data in the written (d, k) sequence.
The whole process of data generation, mastering, copying and signal reading of the multi-stage RLL read-only optical disc is realized through the whole processes of fig. 12, fig. 13 and fig. 14.
From the above, the present invention summarizes methods for manufacturing a multi-level read-only optical disc and a master disc, as shown in fig. 15 and 16, respectively.
Figure 15 shows a flow chart of a method for making a multi-level read-only master according to the invention. The method comprises the following sequential steps:
step 1502, forming a multi-level coding sequence from binary user data through error correction coding and multi-level modulation coding, and generating a write-in signal for controlling mastering recording; and
step 1504, controlling the power of the recording laser output by the laser by the write-in signal, recording the master disc, and generating the multi-stage read-only master disc.
In the above method for manufacturing a multi-level read-only master disc with a track pitch of 0.52 μm or more, the area of the longitudinal cross section of the pits of the generated multi-level read-only master disc satisfies the following formula:
S=∫h(x)dx,
wherein S represents an area of a longitudinal section of the pit, x represents a coordinate in a pit width direction, h (x) represents a pit depth distribution function on the longitudinal section of the pit, and the integrated area is the entire longitudinal section of the pit. It will be appreciated by those skilled in the art that the pit depth distribution function may be arbitrarily chosen, and therefore, no illustration is given herein.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the size of the laser recording power of the semiconductor laser is controlled by adjusting the driving current of the semiconductor laser; when the laser is a gas laser, the laser recording power of the laser is controlled by changing the modulation amplitude of the acousto-optic or electro-optic modulator.
In the above method for manufacturing a multi-level read-only master disc with a track pitch of 0.52 μm or more, the multi-level modulation code is a multi-level run-length modulation code, the formed multi-level code sequence is a multi-level run-length code sequence, and the generated multi-level read-only master disc is a multi-level read-only master disc with a limited run-length.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, the run length is controlled by adjusting the exposure time of a master disc recording laser.
In the method for manufacturing the multi-level read-only master disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the exposure time of recording of the master disc is adjusted by adjusting the pulse width of the driving current of the semiconductor laser; when the laser is a gas laser, the exposure time of the mastering disc recording is adjusted by adjusting the modulation pulse width of the acousto-optic or electro-optic modulator.
In the above method for manufacturing a multi-step read-only master disk having a track pitch of 0.52 μm or more, the longitudinal section of the recording pit in the width direction is in a multi-step shape of unequal height, and the master disk is made of a modified photoresist.
In the above method for manufacturing a multi-step read-only master disc having a track pitch of 0.52 μm or more, the modified photoresist is obtained by physically or chemically modifying a general photoresist used for manufacturing the master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, light treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
In the above method for manufacturing a multi-level read-only master disc with a track pitch of 0.52 μm or more, the longitudinal section of the recording pits along the width direction is in a multi-step shape with equal height, and the master disc is made of a common photoresist material.
In the above method for manufacturing a multi-step read-only master having a track pitch of 0.52 μm or more, a longitudinal section of a pit in a width direction is an arbitrary shape, and the master disc is made of a resin material.
Fig. 16 shows a flow chart of a method for manufacturing a multi-level read-only optical disc according to the invention. The method comprises the following sequential steps:
step 1602, forming a multi-level coding sequence from binary user data through error correction coding and multi-level modulation coding, and generating a write-in signal for controlling mastering disc recording;
step 1604, controlling the power of the recording laser output by the laser by the write-in signal, recording the disk of the master disk, and generating a multi-stage read-only master disk;
step 1606, taking the multi-stage read-only master disc as a mold, and copying a metal pressing mold; and
in step 1608, the multi-level read-only optical disc is copied by stamper using the stamper.
The method for manufacturing the multi-level read-only optical disc shown in FIG. 16 has steps 1606 and 1608 compared to the method for manufacturing the multi-level read-only master shown in FIG. 15.
In the above method for manufacturing a multilevel read-only optical disc having a track pitch of 0.52 μm or more, the areas of the longitudinal sections of the pits of the generated multilevel read-only optical disc and the generated multilevel read-only optical disc both satisfy the following formula:
S=∫h(x)dx,
wherein S represents the area of a longitudinal section of a pit, h (x) represents a pit depth distribution function on the longitudinal section of the pit, x represents the coordinate in the pit width direction, and the integral region is the entire longitudinal section of the pit.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the size of the laser recording power of the semiconductor laser is controlled by adjusting the driving current of the semiconductor laser; when the laser is a gas laser, the laser recording power of the laser is controlled by changing the modulation amplitude of the acousto-optic or electro-optic modulator.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being greater than or equal to 0.52 microns, the multi-level modulation code is a multi-level run-length modulation code, the formed multi-level code sequence is a multi-level run-length code sequence, the generated multi-level read-only optical disc is a multi-level read-only optical disc with limited run-length, and the generated multi-level read-only optical disc is a multi-level read-only optical disc with limited run-length.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, the run-length is controlled by adjusting the exposure time of a master disc recording laser.
In the method for manufacturing the multi-level read-only optical disc with the track pitch being more than or equal to 0.52 microns, when the laser is a semiconductor laser, the exposure time of mastering writing is adjusted by adjusting the pulse width of the driving current of the laser; when the laser is a gas laser, the exposure time of the master disc inscription is adjusted by adjusting the modulation pulse width of an acousto-optic or electro-optic modulator.
In the method for manufacturing the multi-step read-only optical disc with the track pitch of more than or equal to 0.52 microns, the longitudinal section of the recording pits along the width direction is in a multi-step shape with unequal heights, and the master disc is made of modified photoresist.
In the above method for manufacturing a multi-level read-only optical disc having a track pitch of 0.52 μm or more, the modified photoresist is obtained by physically or chemically modifying a general photoresist used for producing a master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, light treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
In the method for manufacturing the multi-level read-only optical disc with the track pitch of more than or equal to 0.52 microns, the longitudinal section of the recording pit along the width direction is in a multi-step shape with the same height, and the master disc sheet is made of a common photoresist material.
In the above method for manufacturing a multi-level read-only optical disc having a track pitch of 0.52 μm or more, the longitudinal section of the recording pits in the width direction is of an arbitrary shape, and the master disc is made of a resin material.
In summary, the run-length limited multi-level read-only optical disc or the master disc and the manufacturing method thereof provided by the invention combine the advantages of the multi-level technology and the RLL coding, can obviously improve the storage capacity and the data transmission rate of the read-only optical disc without changing the laser wavelength and the optical numerical aperture, and maintain the maximum compatibility with the current read-only optical disc system. The RLL coding scheme reduces the requirement on the order of the multi-order read-only optical disc and is beneficial to the copying of the read-only optical disc and the detection of read signals.
In addition, it will be understood by those skilled in the art that when the present invention is used to make a red-light optical disc, the track pitch may be defined as 0.52 microns or greater, or may be defined as 0.7 microns or greater, such as 0.75 microns or greater, or 0.8 microns or greater.
It should be noted that the term "optical disc" referred to herein is understood by those skilled in the art to include "subdisc" (colloquially referred to as optical disc) and "master disc". "optical disc" in the product claims is intended to cover both "subdisc" and "master" in that the "subdisc" and "master" for which the present invention seeks protection are identical in structure. However, in the method claims, since the method of making the "master" is different from the method of making the "subdisc", and specifically, making the "subdisc" first requires making the "master", the "optical disc" is referred to as the "subdisc" in the method claims.
Again, for purposes of illustration, specific manufacturers and models of many devices, apparatuses, or systems for practicing the invention are disclosed herein, however, it will be appreciated by those skilled in the art that this is not intended to limit the invention, and that the invention may be practiced with other models of products from other manufacturers.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (11)

1. The multi-order read-only optical disc is characterized in that the track pitch of the multi-order read-only optical disc is more than or equal to 0.52 microns, the multi-order read-only optical disc is provided with a plurality of recording pits, the longitudinal sections of the recording pits are of multi-order arbitrary shapes, the areas of the longitudinal sections of the recording pits with different orders are different, and the areas of the longitudinal sections of the recording pits meet the following formula:
S=∫h(x)dx,
wherein S represents an area of a longitudinal section of the pit, x represents a coordinate in a pit width direction, h (x) represents a pit depth distribution function on the longitudinal section of the pit, and an integral region is the entire longitudinal section of the pit.
2. The multilevel read-only optical disc of claim 1, wherein the area S of the longitudinal cross section of the pits is determined by a power of a mastering laser.
3. The MLC-ROM of claim 1, wherein the run length of the MLC-ROM is limited, and there are at least d "0" s and at most k "0" s between two non-0 data in a channel sequence of the MLC-ROM, where k and d are integers, k is greater than or equal to d, and d is greater than or equal to 0, and a parameter d determines a minimum run length occurring in the channel sequence and a parameter k determines a maximum run length occurring in the channel sequence.
4. The multi-level read-only optical disc of claim 1, wherein the depths of the pits of different levels are different.
5. The multi-level read-only optical disc of claim 1, wherein the widths of the pits of different orders are different.
6. The multi-level ROM of claim 1, wherein the widths of the pits of different orders are different and the depths of the pits of different orders are different.
7. The multilevel read-only optical disc of any of claims 4 to 6, wherein the depth and/or width of the pits is determined by adjusting a power of a master disc recording laser.
8. The multilevel read-only optical disc of claim 7, wherein the longitudinal section of the recording pits in the width direction is a multi-step shape with the same height, and the master disc is made of a photoresist material.
9. The multilevel read-only optical disc of claim 7, wherein the longitudinal sections of the recording pits along the width direction are in multiple steps of different heights, and the master disc is made of a modified photoresist material.
10. The optical disc as claimed in claim 9, wherein the modified photoresist is obtained by physically or chemically modifying a general photoresist used for manufacturing a master disc, wherein the physical modification is performed by at least one treatment selected from the group consisting of heat treatment, photo treatment, electric treatment, and magnetic treatment, and the chemical modification is performed by adding at least one additive selected from the group consisting of an initiator, a sensitizer, and a resin.
11. The multi-level read-only optical disc as claimed in claim 7, wherein the longitudinal cross section of the recording pits in the width direction is arbitrary, and the master disc is made of a resin material.
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