CN100346131C - 用于一种测量薄层厚度的装置的测量探针 - Google Patents

用于一种测量薄层厚度的装置的测量探针 Download PDF

Info

Publication number
CN100346131C
CN100346131C CNB2003101149833A CN200310114983A CN100346131C CN 100346131 C CN100346131 C CN 100346131C CN B2003101149833 A CNB2003101149833 A CN B2003101149833A CN 200310114983 A CN200310114983 A CN 200310114983A CN 100346131 C CN100346131 C CN 100346131C
Authority
CN
China
Prior art keywords
circuit board
printed circuit
pcb
measuring probe
sensing element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2003101149833A
Other languages
English (en)
Chinese (zh)
Other versions
CN1519535A (zh
Inventor
(要求不公开姓名)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10348652.6A external-priority patent/DE10348652B4/de
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Publication of CN1519535A publication Critical patent/CN1519535A/zh
Application granted granted Critical
Publication of CN100346131C publication Critical patent/CN100346131C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/14—Structural association of two or more printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CNB2003101149833A 2002-11-15 2003-11-14 用于一种测量薄层厚度的装置的测量探针 Expired - Fee Related CN100346131C (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE10253560.4 2002-11-15
DE10253560 2002-11-15
DE10313086 2003-03-24
DE10313086.1 2003-03-24
DE10348652.6 2003-10-15
DE10348652.6A DE10348652B4 (de) 2002-11-15 2003-10-15 Messsonde, insbesondere für eine Vorrichtung zur Messung der Dicke dünner Schichten

Publications (2)

Publication Number Publication Date
CN1519535A CN1519535A (zh) 2004-08-11
CN100346131C true CN100346131C (zh) 2007-10-31

Family

ID=29740368

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2003101149833A Expired - Fee Related CN100346131C (zh) 2002-11-15 2003-11-14 用于一种测量薄层厚度的装置的测量探针

Country Status (5)

Country Link
US (1) US6977498B2 (enExample)
JP (1) JP4425610B2 (enExample)
CN (1) CN100346131C (enExample)
FR (1) FR2847337B1 (enExample)
GB (1) GB2397652B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7404260B2 (en) * 2005-11-10 2008-07-29 Johns Manville Gauge and method for indicating one or more properties of a loose-fill insulation
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten
DE102007009994A1 (de) * 2007-03-01 2008-09-04 Robert Bosch Gmbh Induktiver Sensor
US20100307221A1 (en) * 2009-06-05 2010-12-09 Benjamin Morgan Smith Belt measurement device
US9194687B1 (en) 2010-02-04 2015-11-24 Textron Innovations Inc. System and method for measuring non-conductive coating thickness using eddy currents
DE102010020116A1 (de) * 2010-05-10 2011-11-10 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten an großflächigen Messoberflächen
EP2635178B1 (en) * 2010-11-03 2021-08-11 Sensible Medical Innovations Ltd. Electromagnetic probes, methods for fabrication thereof, and methods which use such electromagnetic probes
WO2012160132A1 (de) * 2011-05-25 2012-11-29 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur messung der dicke dünner schichten sowie verfahren zur herstellung eines sensorelementes für die messsonde
US9541367B2 (en) 2013-05-01 2017-01-10 Covidien Lp Tissue caliper
US10165670B2 (en) * 2016-04-29 2018-12-25 Deere & Company Electrical connector assembly
TWI681184B (zh) * 2017-12-21 2020-01-01 國立虎尾科技大學 應用於ｐｃｂ多層板之非接觸式上下層銅厚的量測方法
CN110673012B (zh) * 2018-07-02 2024-11-29 杰冯科技有限公司 用于集成电路测试设备的电触头及集成电路测试设备
CN111867237B (zh) * 2020-08-21 2024-02-20 上海无线电设备研究所 一种大绑线结构的刚性印制板
CN112768887B (zh) * 2020-12-22 2022-09-30 中国船舶集团有限公司第七一一研究所 用于运动机构的无线传感器的天线和具有其的无线传感器
TWI736500B (zh) * 2021-01-14 2021-08-11 欣興電子股份有限公司 電磁式量測電路板的介電層厚度的量測探針設備及方法
TWI774191B (zh) * 2021-01-14 2022-08-11 欣興電子股份有限公司 電路板內介電層厚度之量測裝置及量測方法
CN114763984B (zh) * 2021-01-14 2024-04-19 欣兴电子股份有限公司 电路板内介电层厚度之量测装置及量测方法
CN118875960B (zh) * 2024-09-13 2025-11-21 华海清科股份有限公司 电涡流终点检测装置及化学机械抛光设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710137A (en) * 1986-12-01 1987-12-01 Zenith Electronics Corporation Cable strain relief
US6011391A (en) * 1996-09-04 2000-01-04 Elektro-Physik Hans Nix Probe for measuring thin layers using a magnetic or eddy current process
CN1325015A (zh) * 2000-03-24 2001-12-05 赫尔穆特费舍电子及测量技术有限及两合公司研究所 用于无损测量薄层厚度的方法和仪器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2749505A (en) * 1952-11-22 1956-06-05 Mcnary Forrest Cline Apparatus for gaging
US4567436A (en) * 1982-01-21 1986-01-28 Linda Koch Magnetic thickness gauge with adjustable probe
DE3902095C2 (de) * 1989-01-25 1997-01-16 Helmut Fischer Gmbh & Co Meßsonde zur Messung dünner Schichten
US5235756A (en) * 1992-08-21 1993-08-17 Grumman Aerospace Corporation Portable coating thickness measuring device
NL1001113C2 (nl) * 1995-09-01 1997-03-04 Henricus Dethmer Ubbo Ubbens Werkwijze voor het bepalen van onderlinge posities van een aantal lagen van een meerlaags printpaneel, inrichting geschikt voor het uitvoeren van een dergelijke wijze alsmede meetstift en printpaneel geschikt voor toepassing bij een dergelijke werkwijze.
JP3927338B2 (ja) * 1999-06-18 2007-06-06 日本電産株式会社 フレキシブルフラットケケーブルの接続部
DE19953061C1 (de) * 1999-11-03 2001-02-08 Elektrophysik Dr Steingroever Dickenmeßgerät für nichtmagnetische Schichten auf ferromagnetischen Unterlagen
US6288537B1 (en) * 1999-12-22 2001-09-11 General Electric Company Eddy current probe with foil sensor mounted on flexible probe tip and method of use

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710137A (en) * 1986-12-01 1987-12-01 Zenith Electronics Corporation Cable strain relief
US6011391A (en) * 1996-09-04 2000-01-04 Elektro-Physik Hans Nix Probe for measuring thin layers using a magnetic or eddy current process
CN1325015A (zh) * 2000-03-24 2001-12-05 赫尔穆特费舍电子及测量技术有限及两合公司研究所 用于无损测量薄层厚度的方法和仪器

Also Published As

Publication number Publication date
US20050055841A1 (en) 2005-03-17
GB2397652A (en) 2004-07-28
GB2397652B (en) 2005-12-21
GB0325702D0 (en) 2003-12-10
CN1519535A (zh) 2004-08-11
FR2847337B1 (fr) 2012-12-21
JP2004170416A (ja) 2004-06-17
FR2847337A1 (fr) 2004-05-21
US6977498B2 (en) 2005-12-20
JP4425610B2 (ja) 2010-03-03

Similar Documents

Publication Publication Date Title
CN100346131C (zh) 用于一种测量薄层厚度的装置的测量探针
US10760928B1 (en) Planar linear inductive position sensor having edge effect compensation
CN102472636B (zh) 霍尔效应感应装置
CN103703362B (zh) 用于测量薄层的厚度的测量探头及用于制造用于测量探头的传感器元件的方法
US7472491B2 (en) Measuring probe, especially for a device for the measurement of the thickness of thin layers
CN108375333A (zh) 用于位置测量的传感器
CN109073417B (zh) 用于减震器的感应传感器
US8022691B2 (en) Microminiature gauging displacement sensor
CN1278097C (zh) 用于无损测量薄层厚度的方法和仪器
KR102184258B1 (ko) 비접촉형 센서
CN104180752A (zh) 转轴角度位置感测装置及感测系统
JP2004170416A5 (enExample)
CN114577101B (zh) 用于测量线性位移的涡流传感器装置
CN107110668A (zh) 感应式定位确定
US11156491B2 (en) Inductive sensor assembly for fluid measurements
US6853179B2 (en) Angle sensor for measuring magnetic field strength
US9702416B2 (en) Linear sensor
JP3065114B2 (ja) 渦電流測定法による変位トランスデューサ測定シーケンスを平衡させるための方法および装置
US7688067B2 (en) Probe for electrical measurement methods and use of a flexible probe for production of a rigid probe
US20080295608A1 (en) Apparatus for Measuring and/or Monitoring Flow of a Medium
US20240208566A1 (en) Vehicle steering device
CN114234783A (zh) 一种位移传感器
RU51197U1 (ru) Индуктивный преобразователь перемещений
JP2022036614A (ja) 位置検出装置
HK1058545A1 (en) Device for contactless measurement of a displacement path

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20071031

Termination date: 20191114