CN100335928C - Optical fiber sensitive element metallized packaging structure and its method - Google Patents
Optical fiber sensitive element metallized packaging structure and its method Download PDFInfo
- Publication number
- CN100335928C CN100335928C CNB2004100613789A CN200410061378A CN100335928C CN 100335928 C CN100335928 C CN 100335928C CN B2004100613789 A CNB2004100613789 A CN B2004100613789A CN 200410061378 A CN200410061378 A CN 200410061378A CN 100335928 C CN100335928 C CN 100335928C
- Authority
- CN
- China
- Prior art keywords
- optical fiber
- metal
- grating
- fiber grating
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 10
- 238000004806 packaging method and process Methods 0.000 title description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000835 fiber Substances 0.000 claims abstract description 18
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 9
- 238000005253 cladding Methods 0.000 claims abstract description 5
- 229910000679 solder Inorganic materials 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000000576 coating method Methods 0.000 abstract description 6
- 239000003292 glue Substances 0.000 abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 2
- 239000010931 gold Substances 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 238000003466 welding Methods 0.000 abstract description 2
- 238000007788 roughening Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000012536 packaging technology Methods 0.000 description 4
- 206010070834 Sensitisation Diseases 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000008313 sensitization Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 101150003085 Pdcl gene Proteins 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 235000011150 stannous chloride Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- AXZWODMDQAVCJE-UHFFFAOYSA-L tin(II) chloride (anhydrous) Chemical compound [Cl-].[Cl-].[Sn+2] AXZWODMDQAVCJE-UHFFFAOYSA-L 0.000 description 2
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- 235000009161 Espostoa lanata Nutrition 0.000 description 1
- 240000001624 Espostoa lanata Species 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 description 1
- 229940081974 saccharin Drugs 0.000 description 1
- 235000019204 saccharin Nutrition 0.000 description 1
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000011043 treated quartz Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Landscapes
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
本发明旨在提供一种无胶化的封装结构和封装方法，用金属镀膜和焊接的方法完成光纤敏感元件金属化封装结构。将载氢光纤的外包层拨去，在裸光纤的位置用准分子激光器写入特定波长的光栅；将光纤光栅进行表面清洁和活化处理后，先镀上镍金属再镀金金属；将光纤光栅穿入金属管并分别固定在操作台上，或直接将光纤光栅直接固定在金属片上；将光纤光栅上加预应力，之后加热焊接光纤光栅和金属管或金属片。本发明结构的传感器有良好的线性性和可重复性。
The invention aims to provide a non-glue package structure and package method, and complete the metallized package structure of optical fiber sensitive components by means of metal coating and welding. The outer cladding of the hydrogen-carrying optical fiber is removed, and an excimer laser is used to write a grating of a specific wavelength at the position of the bare optical fiber; after the surface of the optical fiber grating is cleaned and activated, it is first plated with nickel and then gold; Insert the metal tubes and fix them on the operating table respectively, or directly fix the fiber grating on the metal sheet; add prestress to the fiber grating, and then heat and weld the fiber grating and the metal tube or metal sheet. The sensor with the structure of the invention has good linearity and repeatability.
Description
技术领域technical field
本发明涉及一种光纤敏感元件，特别是光纤光栅的金属化封装结构及其封装方法。The invention relates to an optical fiber sensitive element, in particular to a metallized packaging structure of an optical fiber grating and a packaging method thereof.
背景技术Background technique
光纤光栅是一种光纤敏感元件，经常应用于光纤传感和光纤通信领域。由于该元件敏感脆弱，它的封装技术成为工程应用中的关键技术。现在常用的封装技术是：将制作好的光纤光栅经过二次涂覆机的封装加上外包层后，再用特制的树脂胶将其封装在金属管或金属片上。Fiber grating is a kind of optical fiber sensitive element, which is often used in the field of optical fiber sensing and optical fiber communication. Because the component is sensitive and fragile, its packaging technology has become a key technology in engineering applications. Now the commonly used packaging technology is: After the finished fiber grating is packaged by a secondary coating machine and the outer cladding is added, it is packaged on a metal tube or metal sheet with a special resin glue.
现有的封装技术存在以下缺陷：首先，树脂胶属于有机物，易老化分解，不利于恶劣环境的长期使用；其次，当光纤光栅应用于传感领域时，光纤的外包层和树脂胶体都会在测量中产生冗余，影响测量的线性性和可重复性。The existing packaging technology has the following defects: First, the resin glue is an organic substance, which is easy to age and decompose, which is not conducive to long-term use in harsh environments; Redundancy occurs in the measurement, which affects the linearity and repeatability of the measurement.
发明内容Contents of the invention
本发明旨在提供一种无胶化的封装结构和封装方法，用金属镀膜和焊接的方法完成光纤敏感元件金属化封装结构。本发明结构的传感器有良好的线性性和可重复性。The invention aims to provide a non-gelling packaging structure and packaging method, and completes the metallized packaging structure of optical fiber sensitive components by means of metal coating and welding. The sensor with the structure of the invention has good linearity and repeatability.
本发明是一种光纤敏感元件金属化封装结构，主要包括光纤敏感元件(1)、金属管(2)，其特征在于光纤敏感元件表面有金属镀层(5)，并有金属焊点(3)将光纤敏感元件(1)和金属管(2)焊接在一起。The invention relates to a metallized package structure of an optical fiber sensitive element, which mainly includes an optical fiber sensitive element (1) and a metal tube (2), and is characterized in that the surface of the optical fiber sensitive element has a metal coating (5) and metal solder joints (3) Weld the optical fiber sensing element (1) and the metal tube (2) together.
本发明是一种光纤敏感元件金属化封装结构，其实现方法是：将载氢光纤的外包层(6)拨去，在裸光纤(4)的位置用准分子激光器写入特定波长的光栅(1)；将光纤光栅进行表面清洁和活化处理后，先镀上镍金属再镀金金属；将光纤光栅穿入金属管并分别固定在操作台上；将光纤光栅上加预应力，之后加热焊接光纤光栅(1)和金属管(2)，形成金属焊点(3)。The present invention is a metallized packaging structure for optical fiber sensitive components, and its realization method is: remove the outer cladding (6) of the hydrogen-carrying optical fiber, and write a grating of a specific wavelength ( 1); After cleaning and activating the surface of the fiber grating, it is first plated with nickel metal and then gold-plated metal; the fiber grating is penetrated into the metal tube and fixed on the operating table; the fiber grating is prestressed, and then the fiber is heated and welded The grating (1) and the metal pipe (2) form a metal solder joint (3).
如前所述的一种光纤敏感元件金属化封装结构，其特征在于光纤敏感元件(1)是光纤光栅，金属镀层(5)有两层，内层为镍，外层为金，金属焊点(3)位于光纤敏感元件部位的两侧。A metallized package structure of an optical fiber sensitive element as described above is characterized in that the optical fiber sensitive element (1) is a fiber grating, and the metal coating (5) has two layers, the inner layer is nickel, the outer layer is gold, and the metal solder joint (3) Located on both sides of the optical fiber sensitive element.
本发明采用全金属化的封装技术，避免使用树脂胶产生的老化和冗余的问题，使光纤敏感元件作为传感器具有良好的线性特性和可重复性。The invention adopts full-metal packaging technology, avoids the problems of aging and redundancy caused by the use of resin glue, and makes the optical fiber sensitive element as a sensor have good linear characteristics and repeatability.
附图说明Description of drawings
图1.光纤敏感元件金属化封装结构图Figure 1. Metallized packaging structure diagram of optical fiber sensitive components
图2.光纤敏感元件金属化封装方法流程图Figure 2. Flow chart of the metallization packaging method for optical fiber sensitive components
具体实施方式Detailed ways
如图1.所示，本发明是一种光纤敏感元件金属化封装结构，主要包括光纤敏感元件(1)、金属管(2)，其特征在于光纤敏感元件表面有金属镀层(5)，并有金属焊点(3)将光纤敏感元件(1)和金属管(2)焊接在一起。一种光纤敏感元件金属化封装方法；其实施步骤如图2所示为：将载氢光纤的外包层(6)拨去，在裸光纤(4)的位置用准分子激光器写入特定波长的光栅(1)；将光纤光栅进行表面清洁和活化处理后，先镀上镍金属在镀金金属；将光纤光栅穿入金属管并分别固定在操作台上；将光纤光栅上加预应力，之后加热焊接光纤光栅(1)和金属管(2)，形成金属焊点(3)。As shown in Figure 1., the present invention is a metallized packaging structure for optical fiber sensitive elements, mainly comprising optical fiber sensitive elements (1), metal tubes (2), characterized in that the surface of the optical fiber sensitive elements has a metal coating (5), and There are metal welding spots (3) to weld the optical fiber sensitive element (1) and the metal pipe (2). A metallization packaging method for optical fiber sensitive components; its implementation steps are as shown in Figure 2: the outer cladding (6) of the hydrogen-carrying optical fiber is removed, and an excimer laser is used to write a specific wavelength at the position of the bare optical fiber (4). Grating (1); after cleaning and activating the surface of the fiber grating, first plate nickel metal on the gold-plated metal; penetrate the fiber grating into the metal tube and fix it on the operating table; add prestress to the fiber grating, and then heat The optical fiber grating (1) and the metal pipe (2) are welded to form metal solder joints (3).
除油：用酒精棉球擦拭光纤表面数次，然后用低于100gL-1 NaOH溶液浸泡10min，取出用去离子水彻底冲洗。Degreasing: Wipe the surface of the fiber several times with an alcohol cotton ball, then soak it in less than 100gL -1 NaOH solution for 10 minutes, take it out and rinse it thoroughly with deionized water.
粗化：用含有F-或H2SiF6的强酸性溶液对光纤表面进行弱腐蚀，以达到一定程度的粗化。粗化液选用HF∶H2SiF6∶H2O＝1∶1∶2(体积比)，粗化时间取10min为好，取出去离子水冲洗。Roughening: Use a strong acidic solution containing F - or H 2 SiF 6 to slightly corrode the surface of the optical fiber to achieve a certain degree of roughening. The roughening solution is HF:H 2 SiF 6 :H 2 O=1:1:2 (volume ratio), the roughening time is preferably 10 minutes, and the deionized water is taken out for washing.
热处理：粗化后光纤表面的水膜严重阻碍活性催化粒子吸附于光纤表面上，因此，光纤在敏化前应先进行热处理，热处理制度为：120℃下保温10min。Heat treatment: The water film on the surface of the optical fiber after roughening seriously hinders the adsorption of active catalytic particles on the surface of the optical fiber. Therefore, the optical fiber should be heat treated before sensitization. The heat treatment system is: 120°C for 10 minutes.
敏化：将热处理后的光纤浸入敏化液中，敏化的目的是使光纤表面吸附一层容易氧化的物质(如SnCl2)，利用它可将电极电位高的金属离子(如Pd2+)还原成金属原子。将5g SnCl2溶于5ml浓盐酸中，再稀释至规定体积，以避免SnCl2在水溶液中形成胶体沉淀。Sensitization: Immerse the heat-treated optical fiber in the sensitizing solution. The purpose of sensitization is to make the surface of the optical fiber absorb a layer of easily oxidized substances (such as SnCl 2 ), and use it to remove metal ions with high electrode potential (such as Pd 2+ ) are reduced to metal atoms. Dissolve 5g of SnCl2 in 5ml of concentrated hydrochloric acid, and then dilute to the specified volume to avoid colloidal precipitation of SnCl2 in the aqueous solution.
活化：将经过敏化处理过的光纤浸泡在PdCl2溶液中一定时间，使光纤表面吸附的二价Sn2+与活化液PdCl2中的二价Pd2+反应，形成化学镀镍所需的具有催化活性的贵金属晶核Pd，反应式如下：Activation: immerse the sensitized optical fiber in PdCl 2 solution for a certain period of time, so that the divalent Sn 2+ adsorbed on the surface of the optical fiber reacts with the divalent Pd 2+ in the activation solution PdCl 2 to form the electroless nickel The noble metal crystal nucleus Pd with catalytic activity has the following reaction formula:
Sn2++Pd2+＝Sn4++PdSn 2+ +Pd 2+ ＝Sn 4+ +Pd
反应生成的活性Pd原子吸附在石英光纤表面上，便成为化学镀镍反应的催化中心，从而使化学镀镍顺利进行。The active Pd atoms generated by the reaction are adsorbed on the surface of the quartz optical fiber, and become the catalytic center of the electroless nickel plating reaction, so that the electroless nickel plating proceeds smoothly.
热处理：为了提高活性Pd原子与光纤表面的接合力，经活化处理后的光纤应在120℃下热处理10min。Heat treatment: In order to improve the bonding force between active Pd atoms and the surface of the optical fiber, the optical fiber after activation treatment should be heat treated at 120°C for 10 minutes.
先镀上镍金属在镀金金属；分别配制硫酸镍、次亚磷酸钠、乳酸、碳酸钠、氯化铵和糖精的混合溶液，并加热到一定温度，浸入经处理后的石英光纤，若干时间后取出。First plate nickel metal and then gold-plate metal; prepare mixed solutions of nickel sulfate, sodium hypophosphite, lactic acid, sodium carbonate, ammonium chloride and saccharin, and heat to a certain temperature, immerse the treated quartz optical fiber, after a certain period of time take out.
将光纤光栅穿入金属管并分别固定在操作台上，；在光纤光栅上加预应力，之后加热焊接光纤光栅(1)和金属管(2)，形成金属焊点(3)。The optical fiber grating is penetrated into the metal pipe and fixed on the operating table respectively; prestress is added to the optical fiber grating, and then the optical fiber grating (1) and the metal pipe (2) are heated and welded to form metal solder joints (3).
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100613789A CN100335928C (en) | 2004-12-17 | 2004-12-17 | Optical fiber sensitive element metallized packaging structure and its method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100613789A CN100335928C (en) | 2004-12-17 | 2004-12-17 | Optical fiber sensitive element metallized packaging structure and its method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1648702A CN1648702A (en) | 2005-08-03 |
| CN100335928C true CN100335928C (en) | 2007-09-05 |
Family
ID=34868815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100613789A Expired - Lifetime CN100335928C (en) | 2004-12-17 | 2004-12-17 | Optical fiber sensitive element metallized packaging structure and its method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100335928C (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101915594B (en) * | 2010-08-10 | 2011-11-09 | 重庆大学 | Glue-free connection method for optical fiber stress/strain sensing devices |
| CN102601344B (en) * | 2012-03-20 | 2014-01-01 | 沈阳航空航天大学 | Manufacturing method of Al-Sn alloy-based nickel-plated high-temperature resistant fiber grating sensor |
| CN102853856A (en) * | 2012-07-24 | 2013-01-02 | 中国电子科技集团公司第八研究所 | Method for eliminating chirping phenomenon of fiber grating sensor |
| CN102788603B (en) | 2012-07-27 | 2016-02-24 | 华东理工大学 | The high-temperature resistant optical fiber grating sensor of metal package and manufacture method thereof |
| CN103779765B (en) * | 2012-10-24 | 2016-08-03 | 清华大学 | A kind of optical fiber laser fiber-optic output package module |
| CN104279974A (en) * | 2014-09-28 | 2015-01-14 | 中国船舶重工集团公司第七一九研究所 | Split type optic fiber strain sensor assembly |
| CN106482760B (en) * | 2015-10-14 | 2018-09-21 | 北京信息科技大学 | A kind of system of all-metal packaged fiber grating strain transducer |
| CN105241573A (en) * | 2015-10-27 | 2016-01-13 | 武汉理工大学 | Laser-welding fiber grating surface temperature sensor and packaging method thereof |
| CN105583484B (en) * | 2015-12-16 | 2017-12-15 | 北京遥测技术研究所 | A kind of fibre optical sensor is without gel packaging system and method |
| CN106482657A (en) * | 2016-10-10 | 2017-03-08 | 武汉理工大学 | Fiber grating dynamic strain sensor-packaging structure and method |
| CN106546355B (en) * | 2016-11-03 | 2019-04-30 | 北京信息科技大学 | A fully metallized low temperature resistant fiber grating temperature sensor and its packaging method |
| CN107620064A (en) * | 2017-09-26 | 2018-01-23 | 山东大学 | A kind of fibre optical sensor metallization packaged method and technique |
| CN109752795A (en) * | 2019-01-15 | 2019-05-14 | 无锡必创传感科技有限公司 | A kind of metallized optical fibre grating and preparation method thereof and sensor |
| CN114325966B (en) * | 2021-12-29 | 2023-04-28 | 中国电子科技集团公司第四十四研究所 | Balanced photoelectric detector binary array optical fiber coupling structure and manufacturing method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW418332B (en) * | 1999-06-14 | 2001-01-11 | Ind Tech Res Inst | Optical fiber grating package |
| US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
| CN1316660A (en) * | 2001-03-19 | 2001-10-10 | 上海鹰泰机电有限公司 | Vacuum package technology of optical-fibre raster filter and its device |
| CN2550719Y (en) * | 2002-05-30 | 2003-05-14 | 欧进萍 | Optical fiber and grating sheet type package strainometer |
-
2004
- 2004-12-17 CN CNB2004100613789A patent/CN100335928C/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6181851B1 (en) * | 1997-05-29 | 2001-01-30 | E-Tek Dynamics, Inc. | Temperature-compensated optical fiber package |
| TW418332B (en) * | 1999-06-14 | 2001-01-11 | Ind Tech Res Inst | Optical fiber grating package |
| CN1316660A (en) * | 2001-03-19 | 2001-10-10 | 上海鹰泰机电有限公司 | Vacuum package technology of optical-fibre raster filter and its device |
| CN2550719Y (en) * | 2002-05-30 | 2003-05-14 | 欧进萍 | Optical fiber and grating sheet type package strainometer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1648702A (en) | 2005-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100335928C (en) | Optical fiber sensitive element metallized packaging structure and its method | |
| JP5711376B2 (en) | Method for treating metal surfaces | |
| CA2114869C (en) | Electroless metallization of optical fiber for hermetic packaging | |
| CN1285763C (en) | Selective fiber metallization | |
| JP2002348680A (en) | Metal film pattern and method of manufacturing the same | |
| JP2009155668A (en) | Pretreatment liquid for promoting starting of electroless palladium plating reaction, electroless plating method using the pretreatment liquid, connection terminal formed by the electroless plating method, and semiconductor package using the connection terminal and its manufacturing method | |
| CN107620064A (en) | A kind of fibre optical sensor metallization packaged method and technique | |
| JP3173873B2 (en) | Method for selectively providing a pattern of a substance other than glass on a glass substrate by electroless metal coating | |
| KR20070118073A (en) | Method of depositing palladium layers and palladium bath for the same | |
| CN101469075A (en) | Method for preparing two-sided polyimide / silver compound film | |
| JP7285370B2 (en) | Method for synchronous metallization of metallic and non-metallic layers in PCB aluminum substrate holes | |
| JPH022948B2 (en) | ||
| JPH042669B2 (en) | ||
| CN110029331A (en) | A kind of sensitizing solution and its sensitization technique for chemical plating of non-metal material copper | |
| CN110932067B (en) | Method for preparing optical fiber cladding light filter based on chemical Cu plating method | |
| CN100375907C (en) | Wet chemical metallizing process for quartz optical fiber grating surface | |
| CN114105494A (en) | Coupling agent compounded ionic nickel palladium-free activation solution and method for preparing conductive basalt fiber | |
| US20080199627A1 (en) | Catalytic treatment method, electroless plating method, and method for forming circuit using electroless plating | |
| CN108034933A (en) | Fiber grating surface metalation processing method | |
| JP2010090402A (en) | Plating deposited article | |
| CN115976501B (en) | Metal pattern on surface of insulating substrate and additive manufacturing method | |
| JP4955274B2 (en) | Plating wiring board and electroless plating method | |
| JP2000144437A (en) | Electroless plating method, electroless plating device, production of wiring board and device for producing wiring board | |
| JP2003315616A (en) | Method of forming solder layer on surface of fiber array substrate | |
| JPS6133905B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: WUHAN PHYSICS AND ENGINEERING CONQUER CO., LTD. Free format text: FORMER OWNER: WUHAN UNIV. OF SCIENCE AND ENGINEERING Effective date: 20091218 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20091218 Address after: Hubei city of Wuhan province Wuchang Luoshi Road No. 122 Patentee after: WUHAN WUTOS Co.,Ltd. Address before: Hubei city of Wuhan province Wuchang Luoshi Road No. 122 Patentee before: Wuhan University of Technology |
|
| CX01 | Expiry of patent term |
Granted publication date: 20070905 |
|
| CX01 | Expiry of patent term |