CH713413B1 - Detektionseinrichtung zur Ermittlung von Positionsinformationen. - Google Patents
Detektionseinrichtung zur Ermittlung von Positionsinformationen. Download PDFInfo
- Publication number
- CH713413B1 CH713413B1 CH00992/07A CH9922007A CH713413B1 CH 713413 B1 CH713413 B1 CH 713413B1 CH 00992/07 A CH00992/07 A CH 00992/07A CH 9922007 A CH9922007 A CH 9922007A CH 713413 B1 CH713413 B1 CH 713413B1
- Authority
- CH
- Switzerland
- Prior art keywords
- sensor
- light
- substrate
- detection device
- gripper
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000011156 evaluation Methods 0.000 claims description 7
- 230000001419 dependent effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 208000035874 Excoriation Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH00992/07A CH713413B1 (de) | 2007-06-20 | 2007-06-20 | Detektionseinrichtung zur Ermittlung von Positionsinformationen. |
| PCT/CH2008/000274 WO2008154764A1 (fr) | 2007-06-20 | 2008-06-18 | Dispositif de préhension pourvu d'un dispositif de détection pour déterminer des informations de position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH00992/07A CH713413B1 (de) | 2007-06-20 | 2007-06-20 | Detektionseinrichtung zur Ermittlung von Positionsinformationen. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH713413B1 true CH713413B1 (de) | 2018-07-31 |
Family
ID=39791192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH00992/07A CH713413B1 (de) | 2007-06-20 | 2007-06-20 | Detektionseinrichtung zur Ermittlung von Positionsinformationen. |
Country Status (2)
| Country | Link |
|---|---|
| CH (1) | CH713413B1 (fr) |
| WO (1) | WO2008154764A1 (fr) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7596425B2 (en) * | 2003-06-13 | 2009-09-29 | Dainippon Screen Mfg. Co., Ltd. | Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method |
| JP4064361B2 (ja) * | 2004-03-15 | 2008-03-19 | 川崎重工業株式会社 | 搬送装置の搬送位置の位置情報取得方法 |
| JP4047826B2 (ja) * | 2004-03-25 | 2008-02-13 | 東京エレクトロン株式会社 | 縦型熱処理装置及び移載機構の自動教示方法 |
-
2007
- 2007-06-20 CH CH00992/07A patent/CH713413B1/de not_active IP Right Cessation
-
2008
- 2008-06-18 WO PCT/CH2008/000274 patent/WO2008154764A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008154764A1 (fr) | 2008-12-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLX | Patent declared invalid from date of grant onwards | ||
| AECN | Continuation of proceedings agreed |
Free format text: DAS PATENT WURDE AUFGRUND DES WEITERBEHANDLUNGSANTRAGS VOM 02.05.2019 REAKTIVIERT. |
|
| PL | Patent ceased | ||
| PL | Patent ceased | ||
| PL | Patent ceased |