CH705474A1 - Ionisations - Vakuummesszelle. - Google Patents

Ionisations - Vakuummesszelle. Download PDF

Info

Publication number
CH705474A1
CH705474A1 CH01483/11A CH14832011A CH705474A1 CH 705474 A1 CH705474 A1 CH 705474A1 CH 01483/11 A CH01483/11 A CH 01483/11A CH 14832011 A CH14832011 A CH 14832011A CH 705474 A1 CH705474 A1 CH 705474A1
Authority
CH
Switzerland
Prior art keywords
electrode
permanent magnet
yoke
measuring cell
magnet ring
Prior art date
Application number
CH01483/11A
Other languages
German (de)
English (en)
Inventor
Bernhard Andreaus
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Priority to CH01483/11A priority Critical patent/CH705474A1/de
Priority to CN201280043956.9A priority patent/CN103959032B/zh
Priority to JP2014528815A priority patent/JP6019121B2/ja
Priority to PCT/CH2012/000177 priority patent/WO2013033851A1/de
Priority to US14/237,007 priority patent/US9116065B2/en
Priority to EP12748149.7A priority patent/EP2753907B1/de
Publication of CH705474A1 publication Critical patent/CH705474A1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CH01483/11A 2011-09-08 2011-09-08 Ionisations - Vakuummesszelle. CH705474A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH01483/11A CH705474A1 (de) 2011-09-08 2011-09-08 Ionisations - Vakuummesszelle.
CN201280043956.9A CN103959032B (zh) 2011-09-08 2012-08-02 电离-真空测量单元
JP2014528815A JP6019121B2 (ja) 2011-09-08 2012-08-02 イオン化真空測定セル
PCT/CH2012/000177 WO2013033851A1 (de) 2011-09-08 2012-08-02 Lonisations - vakuummesszelle
US14/237,007 US9116065B2 (en) 2011-09-08 2012-08-02 Ionization vacuum measuring cell
EP12748149.7A EP2753907B1 (de) 2011-09-08 2012-08-02 Lonisations - vakuummesszelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01483/11A CH705474A1 (de) 2011-09-08 2011-09-08 Ionisations - Vakuummesszelle.

Publications (1)

Publication Number Publication Date
CH705474A1 true CH705474A1 (de) 2013-03-15

Family

ID=46690347

Family Applications (1)

Application Number Title Priority Date Filing Date
CH01483/11A CH705474A1 (de) 2011-09-08 2011-09-08 Ionisations - Vakuummesszelle.

Country Status (6)

Country Link
US (1) US9116065B2 (enExample)
EP (1) EP2753907B1 (enExample)
JP (1) JP6019121B2 (enExample)
CN (1) CN103959032B (enExample)
CH (1) CH705474A1 (enExample)
WO (1) WO2013033851A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH707685A1 (de) * 2013-03-06 2014-09-15 Inficon Gmbh Ionisations-Vakuummesszelle mit Abschirmvorrichtung.
TWI739300B (zh) 2015-01-15 2021-09-11 美商Ｍｋｓ儀器公司 離子化計及其製造方法
US11164731B2 (en) * 2015-09-23 2021-11-02 Inficon ag Ionization vacuum measuring cell
JP6177492B1 (ja) * 2017-03-13 2017-08-09 キヤノンアネルバ株式会社 冷陰極電離真空計及び冷陰極電離真空計用カートリッジ
JP7178666B2 (ja) * 2017-10-24 2022-11-28 株式会社 マルナカ ガス分析器
US10928265B2 (en) 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
JP6721806B1 (ja) * 2019-09-13 2020-07-15 キヤノンアネルバ株式会社 電離真空計およびカートリッジ
CN110780167B (zh) * 2019-11-12 2021-08-17 西南交通大学 一种桶式复合绝缘材料绝缘性能检测装置
US10948456B1 (en) 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source
CN111141448B (zh) * 2020-01-08 2021-10-19 北京大学（天津滨海）新一代信息技术研究院 一种片上平面式微型电离真空传感器和制造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611084A1 (en) * 1993-02-10 1994-08-17 The BOC Group plc Magnetic structures
US5568053A (en) * 1993-04-28 1996-10-22 The Fredericks Company Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3325982B2 (ja) * 1993-12-27 2002-09-17 株式会社東芝 磁界界浸型電子銃
WO2001069645A1 (en) * 2000-03-13 2001-09-20 Ulvac, Inc. Spatter ion pump
US7084573B2 (en) * 2004-03-05 2006-08-01 Tokyo Electron Limited Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
JP4905704B2 (ja) * 2007-06-08 2012-03-28 株式会社アルバック 点火補助具およびこれを備えた冷陰極電離真空計
JP4992885B2 (ja) * 2008-11-21 2012-08-08 日新イオン機器株式会社 プラズマ発生装置
CN102087949B (zh) * 2010-12-31 2012-11-21 清华大学 真空规管

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611084A1 (en) * 1993-02-10 1994-08-17 The BOC Group plc Magnetic structures
US5568053A (en) * 1993-04-28 1996-10-22 The Fredericks Company Ionization gauge having a non-time varying magnetic field generator of separated opposed magnets

Also Published As

Publication number Publication date
US9116065B2 (en) 2015-08-25
EP2753907A1 (de) 2014-07-16
CN103959032B (zh) 2015-12-09
JP2014525590A (ja) 2014-09-29
CN103959032A (zh) 2014-07-30
JP6019121B2 (ja) 2016-11-02
US20140176150A1 (en) 2014-06-26
EP2753907B1 (de) 2015-10-21
WO2013033851A1 (de) 2013-03-14

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Legal Events

Date Code Title Description
NV New agent

Representative=s name: TROESCH SCHEIDEGGER WERNER AG, CH

AZW Rejection (application)