CH701500A1 - Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle. - Google Patents

Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle. Download PDF

Info

Publication number
CH701500A1
CH701500A1 CH01172/09A CH11722009A CH701500A1 CH 701500 A1 CH701500 A1 CH 701500A1 CH 01172/09 A CH01172/09 A CH 01172/09A CH 11722009 A CH11722009 A CH 11722009A CH 701500 A1 CH701500 A1 CH 701500A1
Authority
CH
Switzerland
Prior art keywords
membrane
measuring cell
cell arrangement
arrangement according
chamber
Prior art date
Application number
CH01172/09A
Other languages
German (de)
English (en)
Inventor
Christian Berg
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Priority to CH01172/09A priority Critical patent/CH701500A1/de
Priority to DE112010003054.5T priority patent/DE112010003054B4/de
Priority to PCT/CH2010/000172 priority patent/WO2011009222A1/de
Priority to KR1020127002076A priority patent/KR20120036351A/ko
Priority to JP2012520878A priority patent/JP5629317B2/ja
Publication of CH701500A1 publication Critical patent/CH701500A1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CH01172/09A 2009-07-24 2009-07-24 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle. CH701500A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH01172/09A CH701500A1 (de) 2009-07-24 2009-07-24 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.
DE112010003054.5T DE112010003054B4 (de) 2009-07-24 2010-07-06 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle
PCT/CH2010/000172 WO2011009222A1 (de) 2009-07-24 2010-07-06 Druckmesszellenanordnung mit einer optischen membrandruckmesszelle
KR1020127002076A KR20120036351A (ko) 2009-07-24 2010-07-06 광학 다이어프램 압력 게이지를 구비한 압력 측정 게이지 장치
JP2012520878A JP5629317B2 (ja) 2009-07-24 2010-07-06 光学式の隔膜圧力測定セルを備えた圧力測定セル構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH01172/09A CH701500A1 (de) 2009-07-24 2009-07-24 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.

Publications (1)

Publication Number Publication Date
CH701500A1 true CH701500A1 (de) 2011-01-31

Family

ID=41226007

Family Applications (1)

Application Number Title Priority Date Filing Date
CH01172/09A CH701500A1 (de) 2009-07-24 2009-07-24 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.

Country Status (5)

Country Link
JP (1) JP5629317B2 (ja)
KR (1) KR20120036351A (ja)
CH (1) CH701500A1 (ja)
DE (1) DE112010003054B4 (ja)
WO (1) WO2011009222A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015101323A1 (de) * 2015-01-29 2016-08-04 Endress + Hauser Gmbh + Co. Kg Drucksensor ohne Trennmembran
WO2017049392A1 (en) * 2015-09-21 2017-03-30 Opsens Solutions Inc. Optical pressure sensor with reduced mechanical stresses
KR102150759B1 (ko) 2017-10-26 2020-09-01 주식회사 엘지화학 파우치형 전지의 압력변화 측정을 위한 부품 및 이를 이용한 파우치형 전지의 압력변화 측정 방법
WO2019083276A1 (ko) * 2017-10-26 2019-05-02 주식회사 엘지화학 파우치형 전지의 압력변화 측정을 위한 부품 및 이를 이용한 파우치형 전지의 압력변화 측정 방법
JP7372062B2 (ja) 2019-07-02 2023-10-31 アズビル株式会社 圧力センサ
CA3101154A1 (en) * 2019-11-29 2021-05-29 Meggitt Sa Optical sensor for the measurement of physical parameters in harsh environments and methods of making and using the same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460357A2 (de) * 1990-06-08 1991-12-11 Landis & Gyr Business Support AG Vorrichtung zum optischen Messen einer Druckdifferenz
FR2677448A1 (fr) * 1991-06-07 1992-12-11 Sextant Avionique Dispositif de mesure a capsule anerouide.
US5675415A (en) * 1994-07-12 1997-10-07 Hitachi, Ltd. Physical quantity measurement apparatus and instrument therefor
US6341526B1 (en) * 1998-07-29 2002-01-29 Interscience, Inc. Micromachined diffractive pressure sensor system
US20030117630A1 (en) * 2001-12-21 2003-06-26 Youngner Daniel W. Optical pressure sensor
US20070089524A1 (en) * 2005-08-12 2007-04-26 Urs Walchli Optical interferometric pressure sensor
WO2008058406A1 (de) * 2006-11-13 2008-05-22 Inficon Gmbh Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211531A (ja) * 1986-03-12 1987-09-17 Japan Atom Energy Res Inst 真空計装置
CN1182378C (zh) 1997-12-23 2004-12-29 尤纳克西斯巴尔策斯有限公司 电容式真空度测量元件及其制造方法
RU2491524C2 (ru) * 2007-12-20 2013-08-27 Инфикон Гмбх Устройство с мембранным манометрическим элементом

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460357A2 (de) * 1990-06-08 1991-12-11 Landis & Gyr Business Support AG Vorrichtung zum optischen Messen einer Druckdifferenz
FR2677448A1 (fr) * 1991-06-07 1992-12-11 Sextant Avionique Dispositif de mesure a capsule anerouide.
US5675415A (en) * 1994-07-12 1997-10-07 Hitachi, Ltd. Physical quantity measurement apparatus and instrument therefor
US6341526B1 (en) * 1998-07-29 2002-01-29 Interscience, Inc. Micromachined diffractive pressure sensor system
US20030117630A1 (en) * 2001-12-21 2003-06-26 Youngner Daniel W. Optical pressure sensor
US20070089524A1 (en) * 2005-08-12 2007-04-26 Urs Walchli Optical interferometric pressure sensor
WO2008058406A1 (de) * 2006-11-13 2008-05-22 Inficon Gmbh Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle

Also Published As

Publication number Publication date
DE112010003054A5 (de) 2012-06-21
JP5629317B2 (ja) 2014-11-19
DE112010003054B4 (de) 2020-11-26
JP2013500461A (ja) 2013-01-07
KR20120036351A (ko) 2012-04-17
WO2011009222A1 (de) 2011-01-27

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