DE112010003054A5 - Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle - Google Patents

Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle Download PDF

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Publication number
DE112010003054A5
DE112010003054A5 DE112010003054T DE112010003054T DE112010003054A5 DE 112010003054 A5 DE112010003054 A5 DE 112010003054A5 DE 112010003054 T DE112010003054 T DE 112010003054T DE 112010003054 T DE112010003054 T DE 112010003054T DE 112010003054 A5 DE112010003054 A5 DE 112010003054A5
Authority
DE
Germany
Prior art keywords
pressure measuring
measuring cell
optical membrane
arrangement
cell arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112010003054T
Other languages
English (en)
Other versions
DE112010003054B4 (de
Inventor
Christian Berg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112010003054A5 publication Critical patent/DE112010003054A5/de
Application granted granted Critical
Publication of DE112010003054B4 publication Critical patent/DE112010003054B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE112010003054.5T 2009-07-24 2010-07-06 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle Active DE112010003054B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH01172/09A CH701500A1 (de) 2009-07-24 2009-07-24 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle.
CH1172/09 2009-07-24
PCT/CH2010/000172 WO2011009222A1 (de) 2009-07-24 2010-07-06 Druckmesszellenanordnung mit einer optischen membrandruckmesszelle

Publications (2)

Publication Number Publication Date
DE112010003054A5 true DE112010003054A5 (de) 2012-06-21
DE112010003054B4 DE112010003054B4 (de) 2020-11-26

Family

ID=41226007

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112010003054.5T Active DE112010003054B4 (de) 2009-07-24 2010-07-06 Druckmesszellenanordnung mit einer optischen Membrandruckmesszelle

Country Status (5)

Country Link
JP (1) JP5629317B2 (de)
KR (1) KR20120036351A (de)
CH (1) CH701500A1 (de)
DE (1) DE112010003054B4 (de)
WO (1) WO2011009222A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015101323A1 (de) * 2015-01-29 2016-08-04 Endress + Hauser Gmbh + Co. Kg Drucksensor ohne Trennmembran
ES2789448T3 (es) * 2015-09-21 2020-10-26 Opsens Solutions Inc Captador de presión óptico con menos tensiones mecánicas
KR102150759B1 (ko) 2017-10-26 2020-09-01 주식회사 엘지화학 파우치형 전지의 압력변화 측정을 위한 부품 및 이를 이용한 파우치형 전지의 압력변화 측정 방법
WO2019083276A1 (ko) * 2017-10-26 2019-05-02 주식회사 엘지화학 파우치형 전지의 압력변화 측정을 위한 부품 및 이를 이용한 파우치형 전지의 압력변화 측정 방법
JP7372062B2 (ja) * 2019-07-02 2023-10-31 アズビル株式会社 圧力センサ
CN112985477A (zh) * 2019-11-29 2021-06-18 梅吉特股份有限公司 用于在恶劣环境中测量物理参数的光学传感器及其制造和使用方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211531A (ja) * 1986-03-12 1987-09-17 Japan Atom Energy Res Inst 真空計装置
EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
FR2677448A1 (fr) * 1991-06-07 1992-12-11 Sextant Avionique Dispositif de mesure a capsule anerouide.
JPH0829128A (ja) * 1994-07-12 1996-02-02 Hitachi Ltd 物理量測定装置及びその測定器
JP2002500351A (ja) * 1997-12-23 2002-01-08 ユナキス・バルツェルス・アクチェンゲゼルシャフト 容量式の真空測定セル
US6341526B1 (en) * 1998-07-29 2002-01-29 Interscience, Inc. Micromachined diffractive pressure sensor system
US6894787B2 (en) * 2001-12-21 2005-05-17 Honeywell International Inc. Optical pressure sensor
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
DE112007002372B4 (de) * 2006-11-13 2017-04-06 Inficon Gmbh Vakuummembranmesszelle und Verfahren zur Herstellung einer derartigen Messzelle
CA2709495C (en) * 2007-12-20 2016-07-12 Inficon Gmbh Diaphragm pressure measuring cell arrangement

Also Published As

Publication number Publication date
WO2011009222A1 (de) 2011-01-27
JP2013500461A (ja) 2013-01-07
CH701500A1 (de) 2011-01-31
DE112010003054B4 (de) 2020-11-26
KR20120036351A (ko) 2012-04-17
JP5629317B2 (ja) 2014-11-19

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Legal Events

Date Code Title Description
R082 Change of representative

Representative=s name: BOCKHORNI & BRUENTJEN PARTNERSCHAFT PATENTANWA, DE

Representative=s name: BOCKHORNI & KOLLEGEN PATENT- UND RECHTSANWAELT, DE

Representative=s name: BOCKHORNI & KOLLEGEN, DE

R012 Request for examination validly filed

Effective date: 20130227

R016 Response to examination communication
R081 Change of applicant/patentee

Owner name: INFICON HOLDING AG, CH

Free format text: FORMER OWNER: INFICON GMBH, BAD RAGAZ, CH

R082 Change of representative

Representative=s name: BOCKHORNI & BRUENTJEN PARTNERSCHAFT PATENTANWA, DE

R018 Grant decision by examination section/examining division
R020 Patent grant now final