CH680236A5 - - Google Patents

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Publication number
CH680236A5
CH680236A5 CH398489A CH398489A CH680236A5 CH 680236 A5 CH680236 A5 CH 680236A5 CH 398489 A CH398489 A CH 398489A CH 398489 A CH398489 A CH 398489A CH 680236 A5 CH680236 A5 CH 680236A5
Authority
CH
Switzerland
Prior art keywords
wavelength
frequency
radiation
interferometer
constant
Prior art date
Application number
CH398489A
Other languages
German (de)
English (en)
Inventor
Martin Kerner
Original Assignee
Althis Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Althis Ag filed Critical Althis Ag
Publication of CH680236A5 publication Critical patent/CH680236A5/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CH398489A 1988-11-05 1989-10-30 CH680236A5 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19883837593 DE3837593A1 (de) 1988-11-05 1988-11-05 Wellenlaengenstabilisierung

Publications (1)

Publication Number Publication Date
CH680236A5 true CH680236A5 (ja) 1992-07-15

Family

ID=6366561

Family Applications (1)

Application Number Title Priority Date Filing Date
CH398489A CH680236A5 (ja) 1988-11-05 1989-10-30

Country Status (2)

Country Link
CH (1) CH680236A5 (ja)
DE (1) DE3837593A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992006353A1 (de) * 1990-10-01 1992-04-16 Tabarelli, Werner Interferometer
US5127731A (en) * 1991-02-08 1992-07-07 Hughes Aircraft Company Stabilized two-color laser diode interferometer
FR2696546B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et un miroir séparés l'un de l'autre par une région de mesure.
FR2696545B1 (fr) * 1992-10-06 1994-12-30 Suisse Electronique Microtech Interféromètre comprenant un ensemble intégré et une unité réfléchissante séparés l'un de l'autre par une région de mesure.
GB9320500D0 (en) * 1993-10-05 1993-11-24 Rensihaw Plc Interferometric distance measuring apparatus
DE19640725A1 (de) * 1996-10-02 1998-04-09 Reinhold Prof Dr Ing Noe Netzwerkanalysator
CN102032950B (zh) * 2010-10-15 2012-07-11 中国科学院安徽光学精密机械研究所 一种通过白日观测恒星测量整层大气相干长度的方法
US20140078495A1 (en) * 2012-09-14 2014-03-20 Stmicroelectronics, Inc. Inline metrology for attaining full wafer map of uniformity and surface charge

Also Published As

Publication number Publication date
DE3837593A1 (de) 1990-05-10

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Legal Events

Date Code Title Description
PL Patent ceased