CH676378A5 - - Google Patents

Download PDF

Info

Publication number
CH676378A5
CH676378A5 CH4341/89A CH434189A CH676378A5 CH 676378 A5 CH676378 A5 CH 676378A5 CH 4341/89 A CH4341/89 A CH 4341/89A CH 434189 A CH434189 A CH 434189A CH 676378 A5 CH676378 A5 CH 676378A5
Authority
CH
Switzerland
Prior art keywords
channels
gas
grooves
rotor
dynamic seal
Prior art date
Application number
CH4341/89A
Other languages
German (de)
English (en)
Inventor
Vladimir Pavlovich Sergeev
Valery Borisovich Sholokhov
Vladimir Iliich Vikhrev
Sergei Nikolaevich Sharshin
Original Assignee
Vladimir Pavlovich Sergeev
Valery Borisovich Sholokhov
Vikhrev Vladimir I
Sergei Nikolaevich Sharshin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vladimir Pavlovich Sergeev, Valery Borisovich Sholokhov, Vikhrev Vladimir I, Sergei Nikolaevich Sharshin filed Critical Vladimir Pavlovich Sergeev
Publication of CH676378A5 publication Critical patent/CH676378A5/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Junction Field-Effect Transistors (AREA)
CH4341/89A 1988-03-30 1988-03-30 CH676378A5 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (en) 1988-03-30 1988-03-30 Turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
CH676378A5 true CH676378A5 (fi) 1991-01-15

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
CH4341/89A CH676378A5 (fi) 1988-03-30 1988-03-30

Country Status (7)

Country Link
JP (1) JPH02503703A (fi)
CH (1) CH676378A5 (fi)
DE (1) DE3891280T1 (fi)
FI (1) FI895719A0 (fi)
FR (1) FR2632361B1 (fi)
GB (1) GB2230562B (fi)
WO (1) WO1989009341A1 (fi)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (fi) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (fi) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
GB2230562B (en) 1991-09-11
GB2230562A (en) 1990-10-24
FI895719A0 (fi) 1989-11-29
JPH02503703A (ja) 1990-11-01
FR2632361A1 (fr) 1989-12-08
GB8926400D0 (en) 1990-08-01
WO1989009341A1 (en) 1989-10-05
DE3891280T1 (de) 1990-04-05
FR2632361B1 (fr) 1992-05-07

Similar Documents

Publication Publication Date Title
DE69008683T2 (de) Kombinierte Turbomolekularpumpe mit zwei Wellen und atmosphärischem Auslass.
EP0159464B1 (de) Molekularvakuumpumpe
DE60034006T2 (de) Gerät zum Evakuieren eines Vakuumsystems
DE68914320T2 (de) Zusammengestellte Vakuumpumpe.
CH678088A5 (fi)
DE3506299A1 (de) Turbo-molekularpumpe
DE2711847C2 (de) Röntgenröhre
DE3442843A1 (de) Vakuumpumpe
EP0736692A1 (de) Abdichtung, Lagerung und Antrieb der Rotoren eines trockenlaufenden Schraubenrotorverdichters
DE102006049663A1 (de) Schraubenspindelpumpe mit Scheibenpumpen-Axiallager
DE3722164A1 (de) Turbomolekularpumpe
DE60319585T2 (de) Vakuumpumpe
DE69928172T2 (de) Vacuumpumpe
CH676378A5 (fi)
DE60101368T2 (de) Vakuumpumpe
DE1628313A1 (de) Vakuumpumpe
DE69210463T2 (de) Spiralverdichter
EP1119709B1 (de) Reibungsvakuumpumpe mit stator und rotor
WO2018041614A1 (de) Schraubenvakuumpumpe
DE69109424T2 (de) Turbovakuumpumpe.
DE4415566C2 (de) Seitenkanalpumpe
EP0198936B1 (de) Mehrstufige Vakuumpumpe
DE1628271B2 (de) Mehrstufiger fluessigkeitsringverdichter bzw. mehrstufige fluessigkeitsringpumpe
DE102010019940B4 (de) Vakuumpumpstufe
DE2054033A1 (en) Multicell compressor - with ptfe check plate

Legal Events

Date Code Title Description
PL Patent ceased