CH672679A5 - - Google Patents

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Publication number
CH672679A5
CH672679A5 CH4713/86A CH471386A CH672679A5 CH 672679 A5 CH672679 A5 CH 672679A5 CH 4713/86 A CH4713/86 A CH 4713/86A CH 471386 A CH471386 A CH 471386A CH 672679 A5 CH672679 A5 CH 672679A5
Authority
CH
Switzerland
Prior art keywords
measuring device
machine part
guide
zero
knip1
Prior art date
Application number
CH4713/86A
Other languages
German (de)
English (en)
Inventor
Karl-Eugen Aubele
Helmut Lenhof
Peter Vogt
Original Assignee
Zeiss Carl Fa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Fa filed Critical Zeiss Carl Fa
Publication of CH672679A5 publication Critical patent/CH672679A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CH4713/86A 1985-12-02 1986-11-24 CH672679A5 (en, 2012)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853542514 DE3542514A1 (de) 1985-12-02 1985-12-02 Wegmesseinrichtung

Publications (1)

Publication Number Publication Date
CH672679A5 true CH672679A5 (en, 2012) 1989-12-15

Family

ID=6287369

Family Applications (1)

Application Number Title Priority Date Filing Date
CH4713/86A CH672679A5 (en, 2012) 1985-12-02 1986-11-24

Country Status (4)

Country Link
US (1) US4758720A (en, 2012)
JP (1) JPS62133306A (en, 2012)
CH (1) CH672679A5 (en, 2012)
DE (1) DE3542514A1 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107532886A (zh) * 2015-06-30 2018-01-02 别格大昭和株式会社 工具形状测定装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01502530A (ja) * 1987-03-06 1989-08-31 レニショウ パブリック リミテッド カンパニー 位置決定装置
US4939678A (en) * 1987-11-19 1990-07-03 Brown & Sharpe Manufacturing Company Method for calibration of coordinate measuring machine
DE3841488A1 (de) * 1988-12-09 1990-06-13 Zeiss Carl Fa Koordinatenmessgeraet mit einem oder mehreren fuehrungselementen aus aluminium
JP2941953B2 (ja) * 1990-12-04 1999-08-30 キヤノン株式会社 基準位置の検出方法および回転検出計
DE4303161C2 (de) * 1993-02-04 1997-03-06 Zeiss Carl Fa Photoelektrisches Längen- bzw. Winkelmeßsystem mit einer Einrichtung zur Erfassung von Führungsfehlern
DE19540590A1 (de) * 1995-10-31 1996-04-18 Detlev Dipl Ing Waschke Nivelliersensor für Rotationslaser
DE50015787D1 (de) * 1999-09-16 2009-12-24 Heidenhain Gmbh Dr Johannes Vorrichtung zur Positionsbestimmung und Ermittlung von Führungsfehlern
DE10323088A1 (de) * 2003-05-16 2004-12-02 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102005023984A1 (de) * 2005-05-20 2006-11-23 Dr. Johannes Heidenhain Gmbh Positionsmessgerät
US7902494B2 (en) * 2005-09-21 2011-03-08 Koninklijke Philips Electronics N.V. System for detecting motion of a body
DE102008010284A1 (de) * 2008-02-21 2009-08-27 Dr. Johannes Heidenhain Gmbh XY-Tisch mit einer Messanordnung zur Positionsbestimmung
JP5601876B2 (ja) * 2010-05-07 2014-10-08 株式会社ミツトヨ セパレート型エンコーダ、及び、その取付方法
JP6114538B2 (ja) 2012-12-04 2017-04-12 株式会社ミツトヨ 光電式絶対位置検出器、及び、その取付方法
CN106104212A (zh) * 2013-10-01 2016-11-09 瑞尼斯豪公司 位置测量编码器
JP6875923B2 (ja) * 2017-04-27 2021-05-26 Dmg森精機株式会社 スケール装置および二軸変位検出装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534490A (en) * 1978-09-01 1980-03-11 Canon Inc Alignment device
JPS576994A (en) * 1980-06-17 1982-01-13 Tokyo Optical Coding board for encoder
DE3104972C2 (de) * 1981-02-12 1985-06-20 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Positioniereinrichtung
DE3144334C2 (de) * 1981-11-07 1985-06-13 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Wegmeßeinrichtung mit Referenzmarken
DE3150977A1 (de) * 1981-12-23 1983-06-30 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und einrichtung zur ermittlung und korrektur von fuehrungsfehlern
DE3216616C2 (de) * 1982-05-04 1985-06-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Elektrisches Längen- oder Winkelmeßsystem
JPS5963503A (ja) * 1982-10-02 1984-04-11 Canon Inc マ−ク位置検出方法
JPS5999721A (ja) * 1982-11-29 1984-06-08 Canon Inc マーク検出装置
DE3308813C2 (de) * 1983-03-12 1985-02-07 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
GB2146427B (en) * 1983-08-01 1987-10-21 Canon Kk Semiconductor manufacture
DE3334400C1 (de) * 1983-09-23 1985-06-05 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107532886A (zh) * 2015-06-30 2018-01-02 别格大昭和株式会社 工具形状测定装置
CN107532886B (zh) * 2015-06-30 2020-01-24 别格大昭和株式会社 工具形状测定装置

Also Published As

Publication number Publication date
US4758720A (en) 1988-07-19
DE3542514C2 (en, 2012) 1992-01-16
DE3542514A1 (de) 1987-06-04
JPS62133306A (ja) 1987-06-16

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