CH660916A5 - Vorrichtung zur modulation optischer gangunterschiede. - Google Patents

Vorrichtung zur modulation optischer gangunterschiede. Download PDF

Info

Publication number
CH660916A5
CH660916A5 CH416383A CH416383A CH660916A5 CH 660916 A5 CH660916 A5 CH 660916A5 CH 416383 A CH416383 A CH 416383A CH 416383 A CH416383 A CH 416383A CH 660916 A5 CH660916 A5 CH 660916A5
Authority
CH
Switzerland
Prior art keywords
triple prism
piezoelectric bending
mounting plate
movable tongue
bending element
Prior art date
Application number
CH416383A
Other languages
German (de)
English (en)
Inventor
Gerd Prof Dr Jaeger
Walter Dipl-Ing Schott
Detlef Dipl-Ing Heydenbluth
Wilfried Dr-Ing Hirschfeld
Roland Dipl-Ing Beyer
Uwe Dipl-Ing Foerster
Michael Dipl-Ing Laubstein
Georg Dipl-Ing Ranft
Original Assignee
Nagema Veb K
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagema Veb K filed Critical Nagema Veb K
Publication of CH660916A5 publication Critical patent/CH660916A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CH416383A 1982-11-01 1983-07-29 Vorrichtung zur modulation optischer gangunterschiede. CH660916A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD24441982A DD211168A1 (de) 1982-11-01 1982-11-01 Vorrichtung zur modulation optischer gangunterschiede

Publications (1)

Publication Number Publication Date
CH660916A5 true CH660916A5 (de) 1987-05-29

Family

ID=5542074

Family Applications (1)

Application Number Title Priority Date Filing Date
CH416383A CH660916A5 (de) 1982-11-01 1983-07-29 Vorrichtung zur modulation optischer gangunterschiede.

Country Status (3)

Country Link
CH (1) CH660916A5 (enrdf_load_stackoverflow)
DD (1) DD211168A1 (enrdf_load_stackoverflow)
DE (1) DE3326660A1 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4577131A (en) * 1983-12-29 1986-03-18 Zygo Corporation Piezoelectric micromotion actuator
JPS60253945A (ja) * 1984-05-31 1985-12-14 Matsushita Electric Ind Co Ltd 形状測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD137619A1 (de) * 1978-07-11 1979-09-12 Gerd Jaeger Vorrichtung,insbesondere zur digitalen kraftmessung
DE3014328C2 (de) * 1980-04-15 1984-01-12 Kernforschungsanlage Jülich GmbH, 5170 Jülich Vorrichtung zur Modulation der optischen Durchlässigkeit eines Strahlenganges

Also Published As

Publication number Publication date
DE3326660A1 (de) 1984-05-03
DD211168A1 (de) 1984-07-04
DE3326660C2 (enrdf_load_stackoverflow) 1991-01-24

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Legal Events

Date Code Title Description
PFA Name/firm changed

Owner name: NAGEMA AKTIENGESELLSCHAFT

PL Patent ceased
PL Patent ceased