CH615757A5 - - Google Patents

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Publication number
CH615757A5
CH615757A5 CH693377A CH693377A CH615757A5 CH 615757 A5 CH615757 A5 CH 615757A5 CH 693377 A CH693377 A CH 693377A CH 693377 A CH693377 A CH 693377A CH 615757 A5 CH615757 A5 CH 615757A5
Authority
CH
Switzerland
Prior art keywords
radiation
measuring
lens
radiation source
receiver
Prior art date
Application number
CH693377A
Other languages
German (de)
English (en)
Inventor
Marcel Dr Lardon
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Priority to CH693377A priority Critical patent/CH615757A5/de
Priority to NL7707660A priority patent/NL7707660A/xx
Priority to US05/909,808 priority patent/US4201479A/en
Priority to DE19782823912 priority patent/DE2823912A1/de
Priority to FR787816725A priority patent/FR2394071A1/fr
Publication of CH615757A5 publication Critical patent/CH615757A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CH693377A 1977-06-06 1977-06-06 CH615757A5 (US06229276-20010508-P00081.png)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH693377A CH615757A5 (US06229276-20010508-P00081.png) 1977-06-06 1977-06-06
NL7707660A NL7707660A (nl) 1977-06-06 1977-07-08 Inrichting voor het meten van de reflektie van een vlak, spiegelend reflekterend oppervlak.
US05/909,808 US4201479A (en) 1977-06-06 1978-05-26 Device for measuring the reflection of a plane, specularly reflecting surface
DE19782823912 DE2823912A1 (de) 1977-06-06 1978-05-31 Vorrichtung zur messung der reflexion einer ebenen, spiegelnd reflektierenden flaeche
FR787816725A FR2394071A1 (fr) 1977-06-06 1978-06-05 Dispositif de mesure de la reflexion d'une surface plane reflechissante

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH693377A CH615757A5 (US06229276-20010508-P00081.png) 1977-06-06 1977-06-06

Publications (1)

Publication Number Publication Date
CH615757A5 true CH615757A5 (US06229276-20010508-P00081.png) 1980-02-15

Family

ID=4317321

Family Applications (1)

Application Number Title Priority Date Filing Date
CH693377A CH615757A5 (US06229276-20010508-P00081.png) 1977-06-06 1977-06-06

Country Status (5)

Country Link
US (1) US4201479A (US06229276-20010508-P00081.png)
CH (1) CH615757A5 (US06229276-20010508-P00081.png)
DE (1) DE2823912A1 (US06229276-20010508-P00081.png)
FR (1) FR2394071A1 (US06229276-20010508-P00081.png)
NL (1) NL7707660A (US06229276-20010508-P00081.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3305284A1 (de) * 1983-02-16 1984-08-23 Siemens AG, 1000 Berlin und 8000 München Beruehrungslose glanzmessung von oberflaechen und beschichtungen
GB8415128D0 (en) * 1984-06-14 1984-07-18 Chaimowicz J C A Optical displacement sensors
DE3604624A1 (de) * 1986-02-14 1987-08-20 Leybold Heraeus Gmbh & Co Kg Testglaswechsler zur optischen messung von schichteigenschaften in vakuumbeschichtungsanlagen
US5699164A (en) * 1996-04-04 1997-12-16 The Boc Group, Inc. Telecentric reflection head for optical monitor
US6445451B1 (en) * 1998-02-12 2002-09-03 Hamilton Thorne Research Colorimeter and assay device
US6342707B1 (en) 2000-06-20 2002-01-29 Katsina Optics, Inc. Laser scatterometer with adjustable beam block

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229564A (en) * 1961-05-12 1966-01-18 Bausch & Lomb Reflectometer
DE1548263C3 (de) * 1966-11-10 1975-05-22 Ernst Leitz Gmbh, 6330 Wetzlar Verfahren zur Bestimmung der Größe geometrischer Veränderungen oder Abweichungen einer reflektierenden Oberfläche von einer Solloberfläche mittels optischer Mittel
DE1959612A1 (de) * 1969-11-27 1971-06-03 Eppendorf Geraetebau Netheler Vorrichtung zur fotometrischen Messung

Also Published As

Publication number Publication date
DE2823912A1 (de) 1979-01-18
US4201479A (en) 1980-05-06
FR2394071A1 (fr) 1979-01-05
NL7707660A (nl) 1978-12-08

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Legal Events

Date Code Title Description
PL Patent ceased