CH608898A5 - - Google Patents

Info

Publication number
CH608898A5
CH608898A5 CH766283A CH628376A CH608898A5 CH 608898 A5 CH608898 A5 CH 608898A5 CH 766283 A CH766283 A CH 766283A CH 628376 A CH628376 A CH 628376A CH 608898 A5 CH608898 A5 CH 608898A5
Authority
CH
Switzerland
Application number
CH766283A
Inventor
Gerald Bachur
George Edwards Richardson
Original Assignee
Optical Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Associates Inc filed Critical Optical Associates Inc
Publication of CH608898A5 publication Critical patent/CH608898A5/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure Control For Cameras (AREA)
CH766283A 1975-05-19 1976-05-19 CH608898A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/578,915 US4024428A (en) 1975-05-19 1975-05-19 Radiation-sensitive control circuit for driving lamp at various power levels

Publications (1)

Publication Number Publication Date
CH608898A5 true CH608898A5 (xx) 1979-01-31

Family

ID=24314847

Family Applications (1)

Application Number Title Priority Date Filing Date
CH766283A CH608898A5 (xx) 1975-05-19 1976-05-19

Country Status (8)

Country Link
US (2) US4024428A (xx)
JP (1) JPS51143411A (xx)
CA (1) CA1078913A (xx)
CH (1) CH608898A5 (xx)
DE (1) DE2621378A1 (xx)
FR (1) FR2312048A1 (xx)
GB (1) GB1520534A (xx)
NL (1) NL7605340A (xx)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3328578A1 (de) * 1982-08-09 1984-04-05 Hitachi Ome Electronic Co., Ltd., Ome, Tokyo Projektions-justiervorrichtung
DE3510478A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510480A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510479A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510522A1 (de) * 1984-07-07 1986-02-27 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3527855A1 (de) * 1985-02-19 1986-08-21 Ushio Denki K.K., Tokio/Tokyo Belichtungsverfahren fuer eine halbleiterscheibe mittels einer mit seltenem gas und quecksilber gefuellten entladungslampe

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4227119A (en) * 1975-11-12 1980-10-07 Minolta Camera Kabushiki Kaisha Controlled lighting device
JPS5491071U (xx) * 1977-12-12 1979-06-27
USRE30571E (en) * 1979-04-18 1981-04-07 Optical Associates, Inc. Radiation-sensitive control circuit for driving lamp at various power levels
FR2465241A1 (fr) * 1979-09-10 1981-03-20 Thomson Csf Dispositif illuminateur destine a fournir un faisceau d'eclairement a distribution d'intensite ajustable et systeme de transfert de motifs comprenant un tel dispositif
JPS5694372A (en) * 1979-12-27 1981-07-30 Canon Inc Exposure control device
JPS56132317A (en) * 1980-03-19 1981-10-16 Minolta Camera Co Ltd Photographing apparatus using auxiliary light
DE3133168C2 (de) * 1980-08-23 1986-11-27 Ricoh Co., Ltd., Tokio/Tokyo Einrichtung zur Konstanthaltung des von einer Leuchtstoffröhre einer Faseroptik zugeführten Lichtstroms für ein Kopiergerät
JPS57141923A (en) * 1981-02-27 1982-09-02 Hitachi Ltd Projection type exposure device
JPS57181539A (en) * 1981-04-30 1982-11-09 Ricoh Co Ltd Exposure controller for copying machine
DE3303450A1 (de) * 1982-02-04 1983-08-11 Canon K.K., Tokyo Steuereinrichtung fuer kopiergeraete oder dergleichen
JPS5918965A (ja) * 1982-07-23 1984-01-31 Fuji Xerox Co Ltd 複写機の露光量検出装置
US4618254A (en) * 1982-10-15 1986-10-21 Ncr Canada Ltd Automatic light control system
US4555621A (en) * 1983-06-24 1985-11-26 Xerox Corporation Illumination control system utilizing an integrating feedback detector
US4716285A (en) * 1984-08-23 1987-12-29 Fuji Photo Film Co., Ltd. Light amount correction method and apparatus for image output system
DE3535749C2 (de) * 1985-04-12 1987-02-26 Fa. Carl Zeiss, 7920 Heidenheim Einrichtung zur Helligkeitsregelung in Mikroskopen
US5153419A (en) * 1985-04-22 1992-10-06 Canon Kabushiki Kaisha Device for detecting position of a light source with source position adjusting means
US4947030A (en) * 1985-05-22 1990-08-07 Canon Kabushiki Kaisha Illuminating optical device
US4713675A (en) * 1985-10-31 1987-12-15 Canon Kabushiki Kaisha Exposure apparatus
DE3633566A1 (de) * 1986-10-02 1988-04-21 Guenter Steinbach Schaltungsanordnung fuer geregelte hochenergieimpulserzeugung fuer gasentladungsblitzlampen
DE3731153A1 (de) * 1986-10-02 1989-03-23 Steinbach Guenter Schaltungsanordnung fuer geregelte hochenergieimpulserzeugung fuer gasentladungsblitzlampen
DE3854653T2 (de) * 1987-06-04 1996-03-21 Dainippon Screen Mfg Gerät zur Stabilisierung der Lichtmenge einer Fluoreszenzlampe.
CA2069132C (en) * 1991-08-29 1996-01-09 Koji Fujii Light-beam heating apparatus
US5521392A (en) * 1994-04-29 1996-05-28 Efos Canada Inc. Light cure system with closed loop control and work piece recording
US6310337B1 (en) 1998-08-13 2001-10-30 Joseph M. Chiapperi Method of preselecting flashlamp voltages for assays
US6535829B2 (en) * 2001-06-12 2003-03-18 United Microelectronics Corp. System for calculating exposure energy
US20090002669A1 (en) * 2007-06-29 2009-01-01 Optical Associates, Inc. Ultraviolet light-emitting diode exposure apparatus for microfabrication
US20090224690A1 (en) * 2008-03-05 2009-09-10 Jian Xu Economy mode for lighting control system
WO2017005271A1 (en) * 2015-07-08 2017-01-12 Glunz & Jensen A/S Method for controlling radiation emitting from one or more tubular lamps in an exposure apparatus

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2298344A (en) * 1941-03-22 1942-10-13 Eastman Kodak Co Photographic printing apparatus
US2885563A (en) * 1954-10-05 1959-05-05 W M Welch Mfg Company Photographic exposure timer
US3360650A (en) * 1964-02-12 1967-12-26 American Cyanamid Co Apparatus for ultraviolet source stabilization in exposure testing
US3456155A (en) * 1965-04-30 1969-07-15 Advance Data Systems Corp Photosensitive circuit for controlling the intensity of a lamp
US3431427A (en) * 1965-10-24 1969-03-04 Henry D Pahl Jr Solid state color balance controller for incandescent lamps
US3366835A (en) * 1967-02-09 1968-01-30 Harold L. Morris Circuits for energizing a flashtube
US3483428A (en) * 1967-07-24 1969-12-09 Bell & Howell Co Arc lamp supply with constant light regulation and over current protection
US3726197A (en) * 1969-03-26 1973-04-10 Canon Kk Apparatus for automatic electronic flash photography
US3681654A (en) * 1971-02-18 1972-08-01 Wagner Electric Corp Light-regulating power supply circuit for gaseous discharge lamp
US3743405A (en) * 1971-06-17 1973-07-03 Eastman Kodak Co Automatic exposure control in electrophotography
JPS4838718A (xx) * 1971-09-16 1973-06-07

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3328578A1 (de) * 1982-08-09 1984-04-05 Hitachi Ome Electronic Co., Ltd., Ome, Tokyo Projektions-justiervorrichtung
FR2536547A1 (fr) * 1982-08-09 1984-05-25 Hitachi Ltd Dispositif d'alignement pour projection, notamment pour la fabrication de dispositifs a semi-conducteurs
US4701608A (en) * 1982-08-09 1987-10-20 Hitachi, Ltd. Projection aligner with a sensor for monitoring light quantity
DE3510478A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510480A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510479A1 (de) * 1984-07-07 1986-01-16 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3510522A1 (de) * 1984-07-07 1986-02-27 Ushio Denki K.K., Tokio/Tokyo Verfahren zur belichtung einer halbleiterwafer mittels einer quecksilberdampflampe
DE3527855A1 (de) * 1985-02-19 1986-08-21 Ushio Denki K.K., Tokio/Tokyo Belichtungsverfahren fuer eine halbleiterscheibe mittels einer mit seltenem gas und quecksilber gefuellten entladungslampe

Also Published As

Publication number Publication date
CA1078913A (en) 1980-06-03
JPS51143411A (en) 1976-12-09
GB1520534A (en) 1978-08-09
US4024428A (en) 1977-05-17
FR2312048B3 (xx) 1980-10-24
NL7605340A (nl) 1976-11-23
DE2621378A1 (de) 1976-12-02
US4117375A (en) 1978-09-26
FR2312048A1 (fr) 1976-12-17

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Legal Events

Date Code Title Description
PL Patent ceased