CH607939A5 - - Google Patents

Info

Publication number
CH607939A5
CH607939A5 CH1506675A CH1506675A CH607939A5 CH 607939 A5 CH607939 A5 CH 607939A5 CH 1506675 A CH1506675 A CH 1506675A CH 1506675 A CH1506675 A CH 1506675A CH 607939 A5 CH607939 A5 CH 607939A5
Authority
CH
Switzerland
Application number
CH1506675A
Inventor
Pierre Beucherie
Original Assignee
Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Euratom filed Critical Euratom
Publication of CH607939A5 publication Critical patent/CH607939A5/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Inorganic Insulating Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
CH1506675A 1974-11-22 1975-11-20 CH607939A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU71343A LU71343A1 (xx) 1974-11-22 1974-11-22

Publications (1)

Publication Number Publication Date
CH607939A5 true CH607939A5 (xx) 1978-12-15

Family

ID=19727807

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1506675A CH607939A5 (xx) 1974-11-22 1975-11-20

Country Status (14)

Country Link
US (1) US4050408A (xx)
JP (1) JPS5176596A (xx)
BE (1) BE835669A (xx)
CA (1) CA1071936A (xx)
CH (1) CH607939A5 (xx)
DE (1) DE2552380A1 (xx)
DK (1) DK513875A (xx)
FR (1) FR2292051A1 (xx)
GB (1) GB1504548A (xx)
IE (1) IE41938B1 (xx)
IT (1) IT1052238B (xx)
LU (1) LU71343A1 (xx)
NL (1) NL7513401A (xx)
SE (1) SE7513124L (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0295752A1 (en) * 1987-06-16 1988-12-21 Shell Internationale Researchmaatschappij B.V. Apparatus suitable for plasma surface treating and process for preparing membrane layers

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4125086A (en) * 1977-01-06 1978-11-14 The United States Of America As Represented By The Secretary Of The Army Nozzle beam type metal vapor source
US4231774A (en) * 1978-04-10 1980-11-04 International Telephone And Telegraph Corporation Method of fabricating large optical preforms
JPS5940227B2 (ja) * 1980-06-24 1984-09-28 富士通株式会社 リアクティブスパッタリング方法
US4406252A (en) * 1980-12-29 1983-09-27 Rockwell International Corporation Inductive heating arrangement for evaporating thin film alloy onto a substrate
JPS57123969A (en) * 1981-01-26 1982-08-02 Semiconductor Energy Lab Co Ltd Formation of zinc oxide film by vapor phase method using plasma
JPS57158369A (en) * 1981-03-26 1982-09-30 Semiconductor Energy Lab Co Ltd Formation of dielectric film by plasma vapor phase method
US4428812A (en) * 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of metallic compounds
EP0162842A1 (en) * 1983-12-01 1985-12-04 Shatterproof Glass Corporation Gas distribution system for sputtering cathodes
JPH074523B2 (ja) * 1986-09-25 1995-01-25 キヤノン株式会社 反応装置
GB2217349B (en) * 1988-03-29 1992-06-24 Univ Hull Vapour deposited self-sealing ceramic coatings
US5356674A (en) * 1989-05-04 1994-10-18 Deutsche Forschungsanstalt Fuer Luft-Raumfahrt E.V. Process for applying ceramic coatings using a plasma jet carrying a free form non-metallic element
DE3914722A1 (de) * 1989-05-04 1990-11-08 Deutsche Forsch Luft Raumfahrt Verfahren zum auftragen von keramischen material
US5601652A (en) * 1989-08-03 1997-02-11 United Technologies Corporation Apparatus for applying ceramic coatings
DE4237980A1 (de) * 1992-11-11 1994-05-19 Krupp Ag Hoesch Krupp Verfahren zur Erzeugung einer mehrlagigen nitrierten oder Nitrid-Beschichtung durch reaktives Plasmaspritzen
US5620523A (en) * 1994-04-11 1997-04-15 Canon Sales Co., Inc. Apparatus for forming film
US7591957B2 (en) * 2001-01-30 2009-09-22 Rapt Industries, Inc. Method for atmospheric pressure reactive atom plasma processing for surface modification
US7510664B2 (en) 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
US6660177B2 (en) 2001-11-07 2003-12-09 Rapt Industries Inc. Apparatus and method for reactive atom plasma processing for material deposition
US7371992B2 (en) 2003-03-07 2008-05-13 Rapt Industries, Inc. Method for non-contact cleaning of a surface
DE102004022358B3 (de) * 2004-04-30 2005-11-03 Deutsches Zentrum für Luft- und Raumfahrt e.V. Hartstoffbeschichtungsverfahren und dessen Verwendung
US10119195B2 (en) 2009-12-04 2018-11-06 The Regents Of The University Of Michigan Multichannel cold spray apparatus
JP5738885B2 (ja) * 2009-12-04 2015-06-24 ザ リージェンツ オブ ユニバーシティー オブ ミシガン コールド・スプレー・ノズル組立体、及び基材に粒子の被膜を付着させる方法
EP2543443B1 (en) * 2010-03-04 2019-01-09 Imagineering, Inc. Coating forming device, and method for producing coating forming material

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3010009A (en) * 1958-09-29 1961-11-21 Plasmadyne Corp Method and apparatus for uniting materials in a controlled medium
US3247014A (en) * 1963-05-29 1966-04-19 Battelle Development Corp Method of coating solid particles
US3690291A (en) * 1971-04-28 1972-09-12 Nasa Deposition apparatus
US3710070A (en) * 1971-06-09 1973-01-09 Northern Natural Gas Co Low voltage, compact electrically augmented burner
US3839618A (en) * 1972-01-03 1974-10-01 Geotel Inc Method and apparatus for effecting high-energy dynamic coating of substrates
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus
JPS5213927B2 (xx) * 1972-07-13 1977-04-18
FR2245779B1 (xx) * 1973-09-28 1978-02-10 Cit Alcatel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0295752A1 (en) * 1987-06-16 1988-12-21 Shell Internationale Researchmaatschappij B.V. Apparatus suitable for plasma surface treating and process for preparing membrane layers

Also Published As

Publication number Publication date
BE835669A (fr) 1976-03-16
NL7513401A (nl) 1976-05-25
IE41938L (en) 1976-05-22
FR2292051A1 (fr) 1976-06-18
LU71343A1 (xx) 1976-03-17
DE2552380A1 (de) 1976-08-12
JPS5176596A (en) 1976-07-02
IT1052238B (it) 1981-06-20
GB1504548A (en) 1978-03-22
CA1071936A (en) 1980-02-19
DK513875A (da) 1976-05-23
IE41938B1 (en) 1980-04-23
SE7513124L (sv) 1976-05-24
US4050408A (en) 1977-09-27
FR2292051B1 (xx) 1978-05-12

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Legal Events

Date Code Title Description
PL Patent ceased