CH594249A5 - - Google Patents

Info

Publication number
CH594249A5
CH594249A5 CH1216675A CH1216675A CH594249A5 CH 594249 A5 CH594249 A5 CH 594249A5 CH 1216675 A CH1216675 A CH 1216675A CH 1216675 A CH1216675 A CH 1216675A CH 594249 A5 CH594249 A5 CH 594249A5
Authority
CH
Switzerland
Application number
CH1216675A
Original Assignee
Minnesota Mining & Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining & Mfg filed Critical Minnesota Mining & Mfg
Publication of CH594249A5 publication Critical patent/CH594249A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
CH1216675A 1974-09-20 1975-09-19 CH594249A5 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US507713A US3920989A (en) 1974-09-20 1974-09-20 Ion scattering spectrometer utilizing charge exchange processes

Publications (1)

Publication Number Publication Date
CH594249A5 true CH594249A5 (ja) 1977-12-30

Family

ID=24019819

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1216675A CH594249A5 (ja) 1974-09-20 1975-09-19

Country Status (9)

Country Link
US (1) US3920989A (ja)
JP (1) JPS5435957B2 (ja)
CA (1) CA1021882A (ja)
CH (1) CH594249A5 (ja)
DE (1) DE2542362C3 (ja)
FR (1) FR2285610A1 (ja)
GB (1) GB1526787A (ja)
NL (1) NL7508730A (ja)
SU (1) SU574172A3 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722011B2 (ja) * 1983-03-30 1995-03-08 日新電機株式会社 高分解能イオン散乱分析装置
IT1246375B (it) * 1990-04-11 1994-11-18 Consiglio Nazionale Ricerche Apparecchiatura e metodo per la determinazione assoluta dell'energia di un fascio di ioni
JP2642881B2 (ja) * 1994-09-28 1997-08-20 東京大学長 低速多価イオンによる超高感度水素検出法
WO2018144225A2 (en) * 2017-01-18 2018-08-09 Phoenix Llc High power ion beam generator systems and methods
CN114252653B (zh) * 2021-01-06 2023-12-12 中国科学院物理研究所 超快成像装置及其方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3665182A (en) * 1969-08-18 1972-05-23 Minnesota Mining & Mfg Elemental analyzing apparatus
US3665185A (en) * 1970-10-19 1972-05-23 Minnesota Mining & Mfg Ion scattering spectrometer with neutralization

Also Published As

Publication number Publication date
JPS5435957B2 (ja) 1979-11-06
NL7508730A (nl) 1976-03-23
DE2542362A1 (de) 1976-04-01
US3920989A (en) 1975-11-18
JPS5157494A (ja) 1976-05-19
FR2285610A1 (fr) 1976-04-16
CA1021882A (en) 1977-11-29
DE2542362C3 (de) 1980-01-17
DE2542362B2 (de) 1979-05-23
FR2285610B1 (ja) 1981-08-07
SU574172A3 (ru) 1977-09-25
GB1526787A (en) 1978-09-27

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Legal Events

Date Code Title Description
PL Patent ceased