CH594138A5 - - Google Patents

Info

Publication number
CH594138A5
CH594138A5 CH272574A CH272574A CH594138A5 CH 594138 A5 CH594138 A5 CH 594138A5 CH 272574 A CH272574 A CH 272574A CH 272574 A CH272574 A CH 272574A CH 594138 A5 CH594138 A5 CH 594138A5
Authority
CH
Switzerland
Application number
CH272574A
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of CH594138A5 publication Critical patent/CH594138A5/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH272574A 1973-02-27 1974-02-26 CH594138A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2309665A DE2309665C3 (en) 1973-02-27 1973-02-27 Turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
CH594138A5 true CH594138A5 (en) 1977-12-30

Family

ID=5873200

Family Applications (1)

Application Number Title Priority Date Filing Date
CH272574A CH594138A5 (en) 1973-02-27 1974-02-26

Country Status (3)

Country Link
CH (1) CH594138A5 (en)
DE (1) DE2309665C3 (en)
FR (1) FR2219320B3 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3708663A1 (en) * 1986-03-18 1987-10-01 Mitsubishi Electric Corp Turbomolecular pump

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
CA1240302A (en) * 1983-10-07 1988-08-09 Gordon E. Osterstrom Turbomolecular pump with improved bearing system
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3926577A1 (en) * 1989-08-11 1991-02-14 Leybold Ag VACUUM PUMP WITH A ROTOR AND ROTOR BEARINGS OPERATED WITH VACUUM
DE102006049974A1 (en) * 2006-10-24 2008-04-30 Oerlikon Leybold Vacuum Gmbh Turbomachine i.e. turbo-molecular pump, has bearing part of safety bearing made of metal, and bearing surface of bearing part provided with surface coating, which is applied using chemical vapor deposition/physical vapor deposition method
DE102007053979A1 (en) 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vacuum pump with lubricant pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
FR1475765A (en) * 1966-01-31 1967-04-07 Snecma Improvements to devices with vertical shaft rotating at high speed
US3399827A (en) * 1967-05-19 1968-09-03 Everett H. Schwartzman Vacuum pump system
DE2119857A1 (en) * 1971-04-23 1972-11-02 Leybold-Heraeus GmbH & Co KG, 5000 Köln Device for supplying oil to bearings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3708663A1 (en) * 1986-03-18 1987-10-01 Mitsubishi Electric Corp Turbomolecular pump

Also Published As

Publication number Publication date
FR2219320B3 (en) 1976-11-26
DE2309665B2 (en) 1980-11-06
DE2309665C3 (en) 1981-07-09
FR2219320A1 (en) 1974-09-20
DE2309665A1 (en) 1974-09-05

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Legal Events

Date Code Title Description
PL Patent ceased