FR2219320A1 - - Google Patents

Info

Publication number
FR2219320A1
FR2219320A1 FR7404943A FR7404943A FR2219320A1 FR 2219320 A1 FR2219320 A1 FR 2219320A1 FR 7404943 A FR7404943 A FR 7404943A FR 7404943 A FR7404943 A FR 7404943A FR 2219320 A1 FR2219320 A1 FR 2219320A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7404943A
Other languages
French (fr)
Other versions
FR2219320B3 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2219320A1 publication Critical patent/FR2219320A1/fr
Application granted granted Critical
Publication of FR2219320B3 publication Critical patent/FR2219320B3/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR7404943A 1973-02-27 1974-02-08 Expired FR2219320B3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2309665A DE2309665C3 (en) 1973-02-27 1973-02-27 Turbomolecular vacuum pump

Publications (2)

Publication Number Publication Date
FR2219320A1 true FR2219320A1 (en) 1974-09-20
FR2219320B3 FR2219320B3 (en) 1976-11-26

Family

ID=5873200

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7404943A Expired FR2219320B3 (en) 1973-02-27 1974-02-08

Country Status (3)

Country Link
CH (1) CH594138A5 (en)
DE (1) DE2309665C3 (en)
FR (1) FR2219320B3 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147015A2 (en) * 1983-10-07 1985-07-03 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
JPS62218692A (en) * 1986-03-18 1987-09-26 Mitsubishi Electric Corp Turbo-molecular pump device
DE3926577A1 (en) * 1989-08-11 1991-02-14 Leybold Ag VACUUM PUMP WITH A ROTOR AND ROTOR BEARINGS OPERATED WITH VACUUM
DE102006049974A1 (en) * 2006-10-24 2008-04-30 Oerlikon Leybold Vacuum Gmbh Turbomachine i.e. turbo-molecular pump, has bearing part of safety bearing made of metal, and bearing surface of bearing part provided with surface coating, which is applied using chemical vapor deposition/physical vapor deposition method
DE102007053979A1 (en) 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vacuum pump with lubricant pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
FR1475765A (en) * 1966-01-31 1967-04-07 Snecma Improvements to devices with vertical shaft rotating at high speed
US3399827A (en) * 1967-05-19 1968-09-03 Everett H. Schwartzman Vacuum pump system
DE2119857A1 (en) * 1971-04-23 1972-11-02 Leybold-Heraeus GmbH & Co KG, 5000 Köln Device for supplying oil to bearings

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147015A2 (en) * 1983-10-07 1985-07-03 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
EP0147015A3 (en) * 1983-10-07 1986-03-19 Sargent-Welch Scientific Company Turbomolecular pump and bearing assembly therefor
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly

Also Published As

Publication number Publication date
FR2219320B3 (en) 1976-11-26
DE2309665B2 (en) 1980-11-06
DE2309665C3 (en) 1981-07-09
CH594138A5 (en) 1977-12-30
DE2309665A1 (en) 1974-09-05

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