CH578891A5 - - Google Patents
Info
- Publication number
- CH578891A5 CH578891A5 CH297673A CH297673A CH578891A5 CH 578891 A5 CH578891 A5 CH 578891A5 CH 297673 A CH297673 A CH 297673A CH 297673 A CH297673 A CH 297673A CH 578891 A5 CH578891 A5 CH 578891A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/961—Ion beam source and generation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722222736 DE2222736A1 (de) | 1972-05-09 | 1972-05-09 | Verfahren zur ionenimplantation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH578891A5 true CH578891A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-08-31 |
Family
ID=5844509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH297673A CH578891A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-05-09 | 1973-03-01 |
Country Status (10)
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4179312A (en) * | 1977-12-08 | 1979-12-18 | International Business Machines Corporation | Formation of epitaxial layers doped with conductivity-determining impurities by ion deposition |
| DE2835121A1 (de) * | 1978-08-10 | 1980-02-14 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zum dotieren von halbleitern mittels ionenimplantation |
| WO1982004351A1 (en) * | 1981-05-26 | 1982-12-09 | Aircraft Co Hughes | Focused ion beam microfabrication column |
| WO1986006875A1 (en) * | 1985-05-17 | 1986-11-20 | J.C. Schumacher Company | Ion implant using alkali or alkaline earth metal tetrafluoroborate as boron ion source |
| US4721683A (en) * | 1987-05-21 | 1988-01-26 | American Cyanamid Company | Use of alkylphosphines and alkylarsines in ion implantation |
| DE69026751T2 (de) * | 1989-05-17 | 1996-11-14 | Kobe Steel Ltd | Ionenbündelfokussierungsvorrichtung |
| JP2863962B2 (ja) * | 1992-04-10 | 1999-03-03 | 株式会社日立製作所 | イオン打ち込み装置 |
| US5837568A (en) * | 1995-12-12 | 1998-11-17 | Sanyo Electric Co., Ltd. | Manufacturing method of semiconductor devices |
| US6521506B1 (en) * | 2001-12-13 | 2003-02-18 | International Business Machines Corporation | Varactors for CMOS and BiCMOS technologies |
| US7361915B2 (en) * | 2005-11-30 | 2008-04-22 | Axcelis Technologies, Inc. | Beam current stabilization utilizing gas feed control loop |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3484313A (en) * | 1965-03-25 | 1969-12-16 | Hitachi Ltd | Method of manufacturing semiconductor devices |
| US3558376A (en) * | 1966-01-07 | 1971-01-26 | Siemens Ag | Method for controlled doping by gas of foreign substance into semiconductor materials |
| US3442725A (en) * | 1966-05-05 | 1969-05-06 | Motorola Inc | Phosphorus diffusion system |
| US3437734A (en) * | 1966-06-21 | 1969-04-08 | Isofilm Intern | Apparatus and method for effecting the restructuring of materials |
| US3477887A (en) * | 1966-07-01 | 1969-11-11 | Motorola Inc | Gaseous diffusion method |
| US3547074A (en) * | 1967-04-13 | 1970-12-15 | Block Engineering | Apparatus for forming microelements |
| US3737346A (en) * | 1971-07-01 | 1973-06-05 | Bell Telephone Labor Inc | Semiconductor device fabrication using combination of energy beams for masking and impurity doping |
-
1972
- 1972-05-09 DE DE19722222736 patent/DE2222736A1/de active Pending
-
1973
- 1973-03-01 CH CH297673A patent/CH578891A5/xx not_active IP Right Cessation
- 1973-05-03 IT IT23653/73A patent/IT987106B/it active
- 1973-05-07 FR FR7316292A patent/FR2183853B1/fr not_active Expired
- 1973-05-07 US US358072A patent/US3909305A/en not_active Expired - Lifetime
- 1973-05-07 LU LU67556A patent/LU67556A1/xx unknown
- 1973-05-08 CA CA170,656A patent/CA1011228A/en not_active Expired
- 1973-05-08 NL NL7306419A patent/NL7306419A/xx unknown
- 1973-05-09 BE BE130933A patent/BE799319A/xx unknown
- 1973-05-09 JP JP48051570A patent/JPS4962076A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| BE799319A (fr) | 1973-08-31 |
| IT987106B (it) | 1975-02-20 |
| DE2222736A1 (de) | 1973-11-22 |
| US3909305A (en) | 1975-09-30 |
| CA1011228A (en) | 1977-05-31 |
| JPS4962076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-06-15 |
| LU67556A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-07-13 |
| FR2183853A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-12-21 |
| FR2183853B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-02-11 |
| NL7306419A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-11-13 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |