CH565500A5 - - Google Patents

Info

Publication number
CH565500A5
CH565500A5 CH539372A CH539372A CH565500A5 CH 565500 A5 CH565500 A5 CH 565500A5 CH 539372 A CH539372 A CH 539372A CH 539372 A CH539372 A CH 539372A CH 565500 A5 CH565500 A5 CH 565500A5
Authority
CH
Switzerland
Application number
CH539372A
Original Assignee
Mettler Instrumente Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mettler Instrumente Ag filed Critical Mettler Instrumente Ag
Priority to CH539372A priority Critical patent/CH565500A5/xx
Priority to GB5260672A priority patent/GB1359250A/en
Priority to JP12728272A priority patent/JPS4915961A/ja
Priority to NL7300287A priority patent/NL7300287A/xx
Priority to DE19732308627 priority patent/DE2308627A1/de
Publication of CH565500A5 publication Critical patent/CH565500A5/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Compounds Of Iron (AREA)
CH539372A 1972-04-11 1972-04-11 CH565500A5 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH539372A CH565500A5 (fr) 1972-04-11 1972-04-11
GB5260672A GB1359250A (en) 1972-04-11 1972-11-14 Semi-transparent iron oxide layer on a substrate
JP12728272A JPS4915961A (fr) 1972-04-11 1972-12-20
NL7300287A NL7300287A (fr) 1972-04-11 1973-01-09
DE19732308627 DE2308627A1 (de) 1972-04-11 1973-02-21 Semitransparente, aetzbare duenne schicht auf einem substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH539372A CH565500A5 (fr) 1972-04-11 1972-04-11

Publications (1)

Publication Number Publication Date
CH565500A5 true CH565500A5 (fr) 1975-08-15

Family

ID=4292810

Family Applications (1)

Application Number Title Priority Date Filing Date
CH539372A CH565500A5 (fr) 1972-04-11 1972-04-11

Country Status (5)

Country Link
JP (1) JPS4915961A (fr)
CH (1) CH565500A5 (fr)
DE (1) DE2308627A1 (fr)
GB (1) GB1359250A (fr)
NL (1) NL7300287A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071389B2 (ja) * 1985-11-22 1995-01-11 シャープ株式会社 フオトマスクの製造方法
JPS63121054A (ja) * 1986-11-10 1988-05-25 Nec Corp フオトマスク

Also Published As

Publication number Publication date
NL7300287A (fr) 1973-10-15
JPS4915961A (fr) 1974-02-12
GB1359250A (en) 1974-07-10
DE2308627A1 (de) 1973-10-18

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Legal Events

Date Code Title Description
PL Patent ceased