GB1359250A - Semi-transparent iron oxide layer on a substrate - Google Patents

Semi-transparent iron oxide layer on a substrate

Info

Publication number
GB1359250A
GB1359250A GB5260672A GB5260672A GB1359250A GB 1359250 A GB1359250 A GB 1359250A GB 5260672 A GB5260672 A GB 5260672A GB 5260672 A GB5260672 A GB 5260672A GB 1359250 A GB1359250 A GB 1359250A
Authority
GB
United Kingdom
Prior art keywords
semi
iron oxide
substrate
oxide layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5260672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mettler Instrumente AG
Original Assignee
Mettler Instrumente AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mettler Instrumente AG filed Critical Mettler Instrumente AG
Publication of GB1359250A publication Critical patent/GB1359250A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Compounds Of Iron (AREA)

Abstract

1359250 Etchable iron oxide coatings METTLER INSTRUMENTE AG 14 Nov 1972 [11 April 1972] 52606/72 Heading B2E [Also in Division G2] A semi-transparent layer on a substrate substantially comprises ferro-magnetic iron oxide, useful as a photomask. Preferably the oxide is γ-Fe 2 O 3 and the layer contains a stabiliser, such as a lithium salt, water or, preferably, 8.5 to 22 molar % bivalent iron. The term semi-transparent means that the layer has differing degrees of transmissivity for light of different wavelengths.
GB5260672A 1972-04-11 1972-11-14 Semi-transparent iron oxide layer on a substrate Expired GB1359250A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH539372A CH565500A5 (en) 1972-04-11 1972-04-11

Publications (1)

Publication Number Publication Date
GB1359250A true GB1359250A (en) 1974-07-10

Family

ID=4292810

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5260672A Expired GB1359250A (en) 1972-04-11 1972-11-14 Semi-transparent iron oxide layer on a substrate

Country Status (5)

Country Link
JP (1) JPS4915961A (en)
CH (1) CH565500A5 (en)
DE (1) DE2308627A1 (en)
GB (1) GB1359250A (en)
NL (1) NL7300287A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071389B2 (en) * 1985-11-22 1995-01-11 シャープ株式会社 Photomask manufacturing method
JPS63121054A (en) * 1986-11-10 1988-05-25 Nec Corp Photomask

Also Published As

Publication number Publication date
CH565500A5 (en) 1975-08-15
NL7300287A (en) 1973-10-15
JPS4915961A (en) 1974-02-12
DE2308627A1 (en) 1973-10-18

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees