CH550941A - Procede et installation de pompage de gaz. - Google Patents

Procede et installation de pompage de gaz.

Info

Publication number
CH550941A
CH550941A CH1641671A CH1641671A CH550941A CH 550941 A CH550941 A CH 550941A CH 1641671 A CH1641671 A CH 1641671A CH 1641671 A CH1641671 A CH 1641671A CH 550941 A CH550941 A CH 550941A
Authority
CH
Switzerland
Prior art keywords
installation
gas pumping
pumping process
gas
pumping
Prior art date
Application number
CH1641671A
Other languages
English (en)
French (fr)
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of CH550941A publication Critical patent/CH550941A/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH1641671A 1970-11-13 1971-11-11 Procede et installation de pompage de gaz. CH550941A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (pt) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
CH550941A true CH550941A (fr) 1974-06-28

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1641671A CH550941A (fr) 1970-11-13 1971-11-11 Procede et installation de pompage de gaz.

Country Status (12)

Country Link
US (1) US3769806A (pt)
JP (1) JPS56637B1 (pt)
BE (1) BE775243A (pt)
CA (1) CA947990A (pt)
CH (1) CH550941A (pt)
DE (1) DE2155994A1 (pt)
FR (1) FR2114039A5 (pt)
GB (1) GB1375734A (pt)
IT (1) IT941125B (pt)
LU (1) LU64250A1 (pt)
NL (1) NL172590C (pt)
SE (1) SE377830B (pt)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (it) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa Trappola a fluido refrigerante per evaporatori sotto vuoto per la deposizione di sottili pellicole metalliche
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (pt) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
WO2012109304A2 (en) 2011-02-09 2012-08-16 Brooks Automation, Inc. Cryopump
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (pt) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
FR2114039A5 (pt) 1972-06-30
NL172590B (nl) 1983-04-18
US3769806A (en) 1973-11-06
CA947990A (en) 1974-05-28
BE775243A (fr) 1972-05-12
NL172590C (nl) 1983-09-16
GB1375734A (pt) 1974-11-27
NL7115666A (pt) 1972-05-16
IT941125B (it) 1973-03-01
DE2155994A1 (de) 1972-05-18
LU64250A1 (pt) 1972-06-02
JPS56637B1 (pt) 1981-01-08
SE377830B (pt) 1975-07-28

Similar Documents

Publication Publication Date Title
CH550941A (fr) Procede et installation de pompage de gaz.
DK130857B (da) Ioniseringsbrandalarmeringsanlæg.
DK129069B (da) Brandalarmanlæg.
DK131954B (da) Gasbrænder.
ES197591Y (es) Quemador de gas.
AT314061B (de) Gasbrennersystem
BE763337A (fr) Installation cryogene
NL176617C (nl) Gasontladingspaneel.
DK125959B (da) Gasrensningsapparat.
CH530813A (fr) Epurateur de gaz
BE770827A (fr) Installation de rayonnage et son procede de construction
NL173333B (nl) Gasontladingspaneel.
BE765920A (fr) Production de gaz reducteur
NL180710C (nl) Gasontladingsweergeefstelsel.
BE777071A (fr) Procede de production d'un gaz reducteur
NL175355C (nl) Gasontladingspaneel.
BE763647A (fr) Procede et installation pour le filtrage de gaz
NL169790C (nl) Gasdrukregelaar.
BR7108277D0 (pt) Aparelho condicionador de gas
CH558059A (de) Ionisations-feuermelder.
AT306217B (de) Selbsttätig wirkende Gasbrenneranlage
ES160222Y (es) Cocina de gas con transportador de bombona incorporado.
NL170067C (nl) Gasontladingspaneel.
NL143682B (nl) Gasbrander.
NL158374B (nl) Looprolgarnituur.

Legal Events

Date Code Title Description
PL Patent ceased