CH516226A - Device for the optional atomization of solid substances by ion bombardment using the plasma or ion beam method - Google Patents
Device for the optional atomization of solid substances by ion bombardment using the plasma or ion beam methodInfo
- Publication number
- CH516226A CH516226A CH1512569A CH1512569A CH516226A CH 516226 A CH516226 A CH 516226A CH 1512569 A CH1512569 A CH 1512569A CH 1512569 A CH1512569 A CH 1512569A CH 516226 A CH516226 A CH 516226A
- Authority
- CH
- Switzerland
- Prior art keywords
- plasma
- ion
- beam method
- solid substances
- ion beam
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
- B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
- B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
- B23B31/16158—Jaws movement actuated by coaxial conical surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
- B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
- B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
- B23B31/16233—Jaws movement actuated by oblique surfaces of a coaxial control rod
- B23B31/16254—Jaws movement actuated by oblique surfaces of a coaxial control rod using fluid-pressure means to actuate the gripping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
- B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
- B23B31/20—Longitudinally-split sleeves, e.g. collet chucks
- B23B31/201—Characterized by features relating primarily to remote control of the gripping means
- B23B31/204—Characterized by features relating primarily to remote control of the gripping means using fluid-pressure means to actuate the gripping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
- B23B31/02—Chucks
- B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
- B23B31/28—Chucks characterised by features relating primarily to remote control of the gripping means using electric or magnetic means in the chuck
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for
- B23B2270/38—Using magnetic fields
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Combustion & Propulsion (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Gripping On Spindles (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD13543168 | 1968-10-17 | ||
DD13774469 | 1969-02-10 | ||
DE19691934320 DE1934320A1 (en) | 1968-10-17 | 1969-07-07 | Power chucks for clamping workpieces on machines |
FR6930469A FR2063256A5 (en) | 1968-10-17 | 1969-09-08 | |
FR6931339A FR2064480A5 (en) | 1968-10-17 | 1969-09-15 | |
GB5503769A GB1294697A (en) | 1968-10-17 | 1969-11-11 | Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process |
Publications (1)
Publication Number | Publication Date |
---|---|
CH516226A true CH516226A (en) | 1971-11-30 |
Family
ID=27543993
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1512669A CH522951A (en) | 1968-10-17 | 1969-10-08 | Multi-beam ion sputtering device for the production of thin, uniform or alloyed layers |
CH1512569A CH516226A (en) | 1968-10-17 | 1969-10-08 | Device for the optional atomization of solid substances by ion bombardment using the plasma or ion beam method |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1512669A CH522951A (en) | 1968-10-17 | 1969-10-08 | Multi-beam ion sputtering device for the production of thin, uniform or alloyed layers |
Country Status (4)
Country | Link |
---|---|
CH (2) | CH522951A (en) |
DE (3) | DE1934326A1 (en) |
FR (2) | FR2063256A5 (en) |
GB (1) | GB1294697A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3998718A (en) * | 1976-02-18 | 1976-12-21 | Bell Telephone Laboratories, Incorporated | Ion milling apparatus |
FR2410360A1 (en) * | 1977-11-28 | 1979-06-22 | Anvar | SOURCE OF ION, ESPECIALLY FOR ION IMPLANTER |
DE2853251C2 (en) * | 1978-12-09 | 1983-07-28 | Willy 5222 Morsbach Klein | Dismountable and transportable material hut |
US4250009A (en) * | 1979-05-18 | 1981-02-10 | International Business Machines Corporation | Energetic particle beam deposition system |
AU566986B2 (en) * | 1984-09-04 | 1987-11-05 | Standard Oil Company, The | Deposition of passivated amorphous semi-conductor films by sputtering |
US4785220A (en) * | 1985-01-30 | 1988-11-15 | Brown Ian G | Multi-cathode metal vapor arc ion source |
DE102010007542A1 (en) | 2010-02-08 | 2011-08-11 | KHS Corpoplast GmbH, 22145 | Method and apparatus for blow molding containers |
CN115188648B (en) * | 2022-09-08 | 2022-12-23 | 合肥中科离子医学技术装备有限公司 | Internal penning source structure and cyclotron |
-
1969
- 1969-07-07 DE DE19691934326 patent/DE1934326A1/en active Pending
- 1969-07-07 DE DE19691934328 patent/DE1934328A1/en active Pending
- 1969-07-07 DE DE19691934320 patent/DE1934320A1/en active Pending
- 1969-09-08 FR FR6930469A patent/FR2063256A5/fr not_active Expired
- 1969-09-15 FR FR6931339A patent/FR2064480A5/fr not_active Expired
- 1969-10-08 CH CH1512669A patent/CH522951A/en not_active IP Right Cessation
- 1969-10-08 CH CH1512569A patent/CH516226A/en not_active IP Right Cessation
- 1969-11-11 GB GB5503769A patent/GB1294697A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2064480A5 (en) | 1971-07-23 |
FR2063256A5 (en) | 1971-07-09 |
DE1934320A1 (en) | 1971-05-13 |
CH522951A (en) | 1972-05-15 |
GB1294697A (en) | 1972-11-01 |
DE1934326A1 (en) | 1970-08-06 |
DE1934328A1 (en) | 1970-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |