CH508213A - Method for generating a stereo image pair by means of an electron beam microscope - Google Patents

Method for generating a stereo image pair by means of an electron beam microscope

Info

Publication number
CH508213A
CH508213A CH1389669A CH1389669A CH508213A CH 508213 A CH508213 A CH 508213A CH 1389669 A CH1389669 A CH 1389669A CH 1389669 A CH1389669 A CH 1389669A CH 508213 A CH508213 A CH 508213A
Authority
CH
Switzerland
Prior art keywords
generating
electron beam
stereo image
image pair
beam microscope
Prior art date
Application number
CH1389669A
Other languages
German (de)
Inventor
Nat Weber Ulrich Dr Rer
Juergen Dipl Phys Gullasch
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH508213A publication Critical patent/CH508213A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
CH1389669A 1968-09-23 1969-09-15 Method for generating a stereo image pair by means of an electron beam microscope CH508213A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681789019 DE1789019B1 (en) 1968-09-23 1968-09-23 METHOD OF GENERATING A STEREO IMAGE BY USING ELECTRON BEAM MICROSCOPY

Publications (1)

Publication Number Publication Date
CH508213A true CH508213A (en) 1971-05-31

Family

ID=5706761

Family Applications (2)

Application Number Title Priority Date Filing Date
CH1389669A CH508213A (en) 1968-09-23 1969-09-15 Method for generating a stereo image pair by means of an electron beam microscope
CH1389769A CH514840A (en) 1968-09-23 1969-09-15 Method for generating a stereo image pair using an electron microscope

Family Applications After (1)

Application Number Title Priority Date Filing Date
CH1389769A CH514840A (en) 1968-09-23 1969-09-15 Method for generating a stereo image pair using an electron microscope

Country Status (6)

Country Link
US (1) US3629577A (en)
CH (2) CH508213A (en)
DE (1) DE1789019B1 (en)
FR (1) FR2018682A1 (en)
GB (1) GB1274252A (en)
NL (1) NL6913045A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106891331A (en) * 2015-12-17 2017-06-27 香港城市大学 System and method for manipulating objects to be imaged
CN110993475A (en) * 2019-12-05 2020-04-10 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993909A (en) * 1973-03-16 1976-11-23 U.S. Philips Corporation Substrate holder for etching thin films
US4128765A (en) * 1976-10-29 1978-12-05 Joseph Franks Ion beam machining techniques and apparatus
US4587431A (en) * 1983-04-22 1986-05-06 Jeol Ltd. Specimen manipulating mechanism for charged-particle beam instrument
DE8328167U1 (en) * 1983-09-30 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Sample holder for secondary ion mass spectrometry and other sensitive particle beam analysis methods
JPS625548A (en) * 1985-07-01 1987-01-12 Hitachi Ltd Ion beam processing device
NL8803101A (en) * 1988-12-19 1990-07-16 Philips Nv OBJECT HOLDER FOR POSITIONING AN OBJECT IN A BEAM.
NL8803153A (en) * 1988-12-23 1990-07-16 Philips Nv ELECTRON BUNDLE DEVICE WITH DYNAMIC FOCUSING.
US4975586A (en) * 1989-02-28 1990-12-04 Eaton Corporation Ion implanter end station
JP3133307B2 (en) * 1989-10-13 2001-02-05 株式会社日立製作所 electronic microscope
DE4140710A1 (en) * 1991-12-10 1993-06-17 Integrated Circuit Testing POSITIONING SYSTEM
US5337178A (en) * 1992-12-23 1994-08-09 International Business Machines Corporation Titlable optical microscope stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column
IT247963Y1 (en) * 1999-12-23 2002-09-20 Fiat Auto Spa ACCESSORY SAMPLE HOLDER DEVICE, FOR STEREOSCOPIC ANALYSIS. ELECTRONIC SCANNING MICROSCOPE.
EP1158563A1 (en) * 2000-05-22 2001-11-28 Advantest Corporation Particle beam system
DE102010021534A1 (en) * 2010-05-19 2011-11-24 Eberhard-Karls-Universität Tübingen Universitätsklinikum Direct investigation of biological material ex vivo
US20120043712A1 (en) * 2010-08-17 2012-02-23 Varian Semiconductor Equipment Associates, Inc. Mechanism and method for aligning a workpiece to a shadow mask
US9720220B2 (en) * 2015-03-11 2017-08-01 University Of Manitoba Tomography accessory device for microscopes
CN108626546A (en) * 2018-08-10 2018-10-09 韶关旭日国际有限公司 A kind of Universal rotary holder

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2360677A (en) * 1941-11-21 1944-10-17 Rca Corp Object support for electron microscopes
DE1226228B (en) * 1959-07-24 1966-10-06 Max Planck Gesellschaft Movable preparation table for a body beam apparatus, in particular an electron microscope or electron diffraction device
DE1539063C3 (en) * 1965-03-06 1974-07-04 Ugo Prof. Bologna Valdre (Italien) Preparation cartridge for electron microscopes with slide carrier that can be tilted in all directions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106891331A (en) * 2015-12-17 2017-06-27 香港城市大学 System and method for manipulating objects to be imaged
CN106891331B (en) * 2015-12-17 2021-10-08 香港城市大学 System and method for manipulating an object for imaging
CN110993475A (en) * 2019-12-05 2020-04-10 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope

Also Published As

Publication number Publication date
CH514840A (en) 1971-10-31
FR2018682A1 (en) 1970-06-26
US3629577A (en) 1971-12-21
DE1789019B1 (en) 1972-04-27
GB1274252A (en) 1972-05-17
NL6913045A (en) 1970-03-25

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Legal Events

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PL Patent ceased