FR2018682A1 - - Google Patents

Info

Publication number
FR2018682A1
FR2018682A1 FR6932347A FR6932347A FR2018682A1 FR 2018682 A1 FR2018682 A1 FR 2018682A1 FR 6932347 A FR6932347 A FR 6932347A FR 6932347 A FR6932347 A FR 6932347A FR 2018682 A1 FR2018682 A1 FR 2018682A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6932347A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2018682A1 publication Critical patent/FR2018682A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
FR6932347A 1968-09-23 1969-09-23 Withdrawn FR2018682A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681789019 DE1789019B1 (de) 1968-09-23 1968-09-23 Verfahren zur erzeugung eines stereobildes mittels der elektronenstrahlmikroskopie

Publications (1)

Publication Number Publication Date
FR2018682A1 true FR2018682A1 (fr) 1970-06-26

Family

ID=5706761

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6932347A Withdrawn FR2018682A1 (fr) 1968-09-23 1969-09-23

Country Status (6)

Country Link
US (1) US3629577A (fr)
CH (2) CH508213A (fr)
DE (1) DE1789019B1 (fr)
FR (1) FR2018682A1 (fr)
GB (1) GB1274252A (fr)
NL (1) NL6913045A (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993909A (en) * 1973-03-16 1976-11-23 U.S. Philips Corporation Substrate holder for etching thin films
US4128765A (en) * 1976-10-29 1978-12-05 Joseph Franks Ion beam machining techniques and apparatus
US4587431A (en) * 1983-04-22 1986-05-06 Jeol Ltd. Specimen manipulating mechanism for charged-particle beam instrument
DE8328167U1 (de) * 1983-09-30 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Probenhalterung für Sekundärionen-Massenspektrometrie und andere empfindliche Teilchenstrahl-Analysenmethoden
JPS625548A (ja) * 1985-07-01 1987-01-12 Hitachi Ltd イオンビ−ム加工装置
NL8803101A (nl) * 1988-12-19 1990-07-16 Philips Nv Objecthouder voor positionering van een object in een stralenbundel.
NL8803153A (nl) * 1988-12-23 1990-07-16 Philips Nv Elektronenbundel apparaat met dynamische focussering.
US4975586A (en) * 1989-02-28 1990-12-04 Eaton Corporation Ion implanter end station
JP3133307B2 (ja) * 1989-10-13 2001-02-05 株式会社日立製作所 電子顕微鏡
DE4140710A1 (de) * 1991-12-10 1993-06-17 Integrated Circuit Testing Positioniersystem
US5337178A (en) * 1992-12-23 1994-08-09 International Business Machines Corporation Titlable optical microscope stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column
IT247963Y1 (it) * 1999-12-23 2002-09-20 Fiat Auto Spa Dispositivo porta-campioni accessorio, per analisi stereoscopiche almicroscopio elettronico a scansione .
EP1158563A1 (fr) * 2000-05-22 2001-11-28 Advantest Corporation Système à faisceau de particules
DE102010021534A1 (de) * 2010-05-19 2011-11-24 Eberhard-Karls-Universität Tübingen Universitätsklinikum Direktuntersuchung von biologischem Material ex vivo
US20120043712A1 (en) * 2010-08-17 2012-02-23 Varian Semiconductor Equipment Associates, Inc. Mechanism and method for aligning a workpiece to a shadow mask
US9720220B2 (en) * 2015-03-11 2017-08-01 University Of Manitoba Tomography accessory device for microscopes
US9921400B2 (en) * 2015-12-17 2018-03-20 City University Of Hong Kong System and method for manipulating an object for imaging
CN108626546A (zh) * 2018-08-10 2018-10-09 韶关旭日国际有限公司 一种万向旋转云台
CN110993475B (zh) * 2019-12-05 2020-08-28 山东省分析测试中心 一种用于断口分析的扫描电镜万向转动样品台及扫描电镜

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2360677A (en) * 1941-11-21 1944-10-17 Rca Corp Object support for electron microscopes
DE1226228B (de) * 1959-07-24 1966-10-06 Max Planck Gesellschaft Bewegbarer Praeparattisch fuer einen Korpus-kularstrahlapparat, insbesondere Elektronen-mikroskop oder Elektronenbeugungsgeraet
DE1539063C3 (de) * 1965-03-06 1974-07-04 Ugo Prof. Bologna Valdre (Italien) Präparatpatrone für Elektronenmikroskope mit allseitig kippbarem Präparatträger

Also Published As

Publication number Publication date
CH514840A (de) 1971-10-31
US3629577A (en) 1971-12-21
DE1789019B1 (de) 1972-04-27
GB1274252A (en) 1972-05-17
CH508213A (de) 1971-05-31
NL6913045A (fr) 1970-03-25

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Legal Events

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