CH483497A - Arrangement for vapor deposition of interference layers - Google Patents

Arrangement for vapor deposition of interference layers

Info

Publication number
CH483497A
CH483497A CH1108767A CH1108767A CH483497A CH 483497 A CH483497 A CH 483497A CH 1108767 A CH1108767 A CH 1108767A CH 1108767 A CH1108767 A CH 1108767A CH 483497 A CH483497 A CH 483497A
Authority
CH
Switzerland
Prior art keywords
arrangement
vapor deposition
interference layers
interference
layers
Prior art date
Application number
CH1108767A
Other languages
German (de)
Inventor
Otto Dr Schwomma
Original Assignee
Vockenhuber Karl
Hauser Raimund
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vockenhuber Karl, Hauser Raimund filed Critical Vockenhuber Karl
Publication of CH483497A publication Critical patent/CH483497A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1108767A 1966-08-10 1967-08-07 Arrangement for vapor deposition of interference layers CH483497A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT764866A AT264746B (en) 1966-08-10 1966-08-10 Arrangement for vapor deposition of interference layers

Publications (1)

Publication Number Publication Date
CH483497A true CH483497A (en) 1969-12-31

Family

ID=3598185

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1108767A CH483497A (en) 1966-08-10 1967-08-07 Arrangement for vapor deposition of interference layers

Country Status (5)

Country Link
AT (1) AT264746B (en)
CH (1) CH483497A (en)
DE (1) DE1621385A1 (en)
GB (1) GB1199006A (en)
NL (1) NL6710981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387144A1 (en) * 1989-03-08 1990-09-12 Commissariat A L'energie Atomique Apparatus for coating a plane surface with a layer of uniform thickness

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE34131E (en) * 1986-12-10 1992-11-24 U.S. Philips Corporation Display tube having improved brightness distribution
GB8629552D0 (en) * 1986-12-10 1987-01-21 Philips Nv Television system & display tubes
AT408102B (en) * 2000-03-09 2001-09-25 Miba Gleitlager Ag METHOD FOR PRODUCING A SLIDING ELEMENT AND A DEVICE FOR COATING A SLIDING ELEMENT
GB2491152B (en) * 2011-05-24 2017-11-01 Qioptiq Ltd Methods and apparatuses for depositing a layer of coating material on a component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0387144A1 (en) * 1989-03-08 1990-09-12 Commissariat A L'energie Atomique Apparatus for coating a plane surface with a layer of uniform thickness
FR2644180A1 (en) * 1989-03-08 1990-09-14 Commissariat Energie Atomique DEVICE FOR COVERING A FLAT SURFACE OF A LAYER OF UNIFORM THICKNESS

Also Published As

Publication number Publication date
AT264746B (en) 1968-09-10
NL6710981A (en) 1968-02-12
GB1199006A (en) 1970-07-15
DE1621385A1 (en) 1971-05-13

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Legal Events

Date Code Title Description
PL Patent ceased