CH483497A - Arrangement for vapor deposition of interference layers - Google Patents
Arrangement for vapor deposition of interference layersInfo
- Publication number
- CH483497A CH483497A CH1108767A CH1108767A CH483497A CH 483497 A CH483497 A CH 483497A CH 1108767 A CH1108767 A CH 1108767A CH 1108767 A CH1108767 A CH 1108767A CH 483497 A CH483497 A CH 483497A
- Authority
- CH
- Switzerland
- Prior art keywords
- arrangement
- vapor deposition
- interference layers
- interference
- layers
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT764866A AT264746B (en) | 1966-08-10 | 1966-08-10 | Arrangement for vapor deposition of interference layers |
Publications (1)
Publication Number | Publication Date |
---|---|
CH483497A true CH483497A (en) | 1969-12-31 |
Family
ID=3598185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1108767A CH483497A (en) | 1966-08-10 | 1967-08-07 | Arrangement for vapor deposition of interference layers |
Country Status (5)
Country | Link |
---|---|
AT (1) | AT264746B (en) |
CH (1) | CH483497A (en) |
DE (1) | DE1621385A1 (en) |
GB (1) | GB1199006A (en) |
NL (1) | NL6710981A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0387144A1 (en) * | 1989-03-08 | 1990-09-12 | Commissariat A L'energie Atomique | Apparatus for coating a plane surface with a layer of uniform thickness |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8629552D0 (en) * | 1986-12-10 | 1987-01-21 | Philips Nv | Television system & display tubes |
USRE34131E (en) * | 1986-12-10 | 1992-11-24 | U.S. Philips Corporation | Display tube having improved brightness distribution |
AT408102B (en) * | 2000-03-09 | 2001-09-25 | Miba Gleitlager Ag | METHOD FOR PRODUCING A SLIDING ELEMENT AND A DEVICE FOR COATING A SLIDING ELEMENT |
GB2491152B (en) * | 2011-05-24 | 2017-11-01 | Qioptiq Ltd | Methods and apparatuses for depositing a layer of coating material on a component |
-
1966
- 1966-08-10 AT AT764866A patent/AT264746B/en active
-
1967
- 1967-08-05 DE DE19671621385 patent/DE1621385A1/en active Pending
- 1967-08-07 CH CH1108767A patent/CH483497A/en not_active IP Right Cessation
- 1967-08-09 NL NL6710981A patent/NL6710981A/xx unknown
- 1967-08-10 GB GB3674167A patent/GB1199006A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0387144A1 (en) * | 1989-03-08 | 1990-09-12 | Commissariat A L'energie Atomique | Apparatus for coating a plane surface with a layer of uniform thickness |
FR2644180A1 (en) * | 1989-03-08 | 1990-09-14 | Commissariat Energie Atomique | DEVICE FOR COVERING A FLAT SURFACE OF A LAYER OF UNIFORM THICKNESS |
Also Published As
Publication number | Publication date |
---|---|
DE1621385A1 (en) | 1971-05-13 |
NL6710981A (en) | 1968-02-12 |
AT264746B (en) | 1968-09-10 |
GB1199006A (en) | 1970-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |