CH469103A - Process for polishing the surface of semiconductor crystals - Google Patents

Process for polishing the surface of semiconductor crystals

Info

Publication number
CH469103A
CH469103A CH684466A CH684466A CH469103A CH 469103 A CH469103 A CH 469103A CH 684466 A CH684466 A CH 684466A CH 684466 A CH684466 A CH 684466A CH 469103 A CH469103 A CH 469103A
Authority
CH
Switzerland
Prior art keywords
polishing
semiconductor crystals
crystals
semiconductor
Prior art date
Application number
CH684466A
Other languages
German (de)
Inventor
Francis Rydman Gerald
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Publication of CH469103A publication Critical patent/CH469103A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C23F3/04—Heavy metals
    • C23F3/06—Heavy metals with acidic solutions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02019—Chemical etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
CH684466A 1965-05-11 1966-05-11 Process for polishing the surface of semiconductor crystals CH469103A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45479665A 1965-05-11 1965-05-11

Publications (1)

Publication Number Publication Date
CH469103A true CH469103A (en) 1969-02-28

Family

ID=23806130

Family Applications (1)

Application Number Title Priority Date Filing Date
CH684466A CH469103A (en) 1965-05-11 1966-05-11 Process for polishing the surface of semiconductor crystals

Country Status (4)

Country Link
CH (1) CH469103A (en)
DE (1) DE1521728B2 (en)
GB (1) GB1114609A (en)
NL (1) NL6606411A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838494A (en) * 1971-09-18 1973-06-06

Also Published As

Publication number Publication date
NL6606411A (en) 1966-11-14
GB1114609A (en) 1968-05-22
DE1521728A1 (en) 1969-06-12
DE1521728B2 (en) 1970-02-12

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