CH425075A - Ionenpumpe - Google Patents

Ionenpumpe

Info

Publication number
CH425075A
CH425075A CH964163A CH964163A CH425075A CH 425075 A CH425075 A CH 425075A CH 964163 A CH964163 A CH 964163A CH 964163 A CH964163 A CH 964163A CH 425075 A CH425075 A CH 425075A
Authority
CH
Switzerland
Prior art keywords
ion pump
ion
pump
Prior art date
Application number
CH964163A
Other languages
English (en)
Inventor
Wright Robinson Norman
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH425075A publication Critical patent/CH425075A/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH964163A 1962-08-08 1963-08-05 Ionenpumpe CH425075A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3039162A GB1015723A (en) 1962-08-08 1962-08-08 Vacuum ion pumps

Publications (1)

Publication Number Publication Date
CH425075A true CH425075A (de) 1966-11-30

Family

ID=10306929

Family Applications (1)

Application Number Title Priority Date Filing Date
CH964163A CH425075A (de) 1962-08-08 1963-08-05 Ionenpumpe

Country Status (4)

Country Link
AT (1) AT249418B (de)
CH (1) CH425075A (de)
DE (1) DE1215295B (de)
GB (1) GB1015723A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539133B1 (de) * 1966-04-28 1969-10-02 Leybold Heraeus Gmbh & Co Kg Ionengetterpumpe
CN112768337B (zh) * 2020-12-25 2023-12-22 上海三井光中真空设备股份有限公司 一种离子泵抽口结构

Also Published As

Publication number Publication date
GB1015723A (en) 1966-01-05
AT249418B (de) 1966-09-26
DE1215295B (de) 1966-04-28

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