CH425075A - Ionenpumpe - Google Patents
IonenpumpeInfo
- Publication number
- CH425075A CH425075A CH964163A CH964163A CH425075A CH 425075 A CH425075 A CH 425075A CH 964163 A CH964163 A CH 964163A CH 964163 A CH964163 A CH 964163A CH 425075 A CH425075 A CH 425075A
- Authority
- CH
- Switzerland
- Prior art keywords
- ion pump
- ion
- pump
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3039162A GB1015723A (en) | 1962-08-08 | 1962-08-08 | Vacuum ion pumps |
Publications (1)
Publication Number | Publication Date |
---|---|
CH425075A true CH425075A (de) | 1966-11-30 |
Family
ID=10306929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH964163A CH425075A (de) | 1962-08-08 | 1963-08-05 | Ionenpumpe |
Country Status (4)
Country | Link |
---|---|
AT (1) | AT249418B (de) |
CH (1) | CH425075A (de) |
DE (1) | DE1215295B (de) |
GB (1) | GB1015723A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1539133B1 (de) * | 1966-04-28 | 1969-10-02 | Leybold Heraeus Gmbh & Co Kg | Ionengetterpumpe |
CN112768337B (zh) * | 2020-12-25 | 2023-12-22 | 上海三井光中真空设备股份有限公司 | 一种离子泵抽口结构 |
-
1962
- 1962-08-08 GB GB3039162A patent/GB1015723A/en not_active Expired
-
1963
- 1963-08-03 DE DEN23558A patent/DE1215295B/de active Pending
- 1963-08-05 CH CH964163A patent/CH425075A/de unknown
- 1963-08-05 AT AT627863A patent/AT249418B/de active
Also Published As
Publication number | Publication date |
---|---|
GB1015723A (en) | 1966-01-05 |
AT249418B (de) | 1966-09-26 |
DE1215295B (de) | 1966-04-28 |
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