AT249418B - Ionenpumpe - Google Patents

Ionenpumpe

Info

Publication number
AT249418B
AT249418B AT627863A AT627863A AT249418B AT 249418 B AT249418 B AT 249418B AT 627863 A AT627863 A AT 627863A AT 627863 A AT627863 A AT 627863A AT 249418 B AT249418 B AT 249418B
Authority
AT
Austria
Prior art keywords
ion pump
ion
pump
Prior art date
Application number
AT627863A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of AT249418B publication Critical patent/AT249418B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
AT627863A 1962-08-08 1963-08-05 Ionenpumpe AT249418B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3039162A GB1015723A (en) 1962-08-08 1962-08-08 Vacuum ion pumps

Publications (1)

Publication Number Publication Date
AT249418B true AT249418B (de) 1966-09-26

Family

ID=10306929

Family Applications (1)

Application Number Title Priority Date Filing Date
AT627863A AT249418B (de) 1962-08-08 1963-08-05 Ionenpumpe

Country Status (4)

Country Link
AT (1) AT249418B (de)
CH (1) CH425075A (de)
DE (1) DE1215295B (de)
GB (1) GB1015723A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539133B1 (de) * 1966-04-28 1969-10-02 Leybold Heraeus Gmbh & Co Kg Ionengetterpumpe
CN112768337B (zh) * 2020-12-25 2023-12-22 上海三井光中真空设备股份有限公司 一种离子泵抽口结构

Also Published As

Publication number Publication date
DE1215295B (de) 1966-04-28
CH425075A (de) 1966-11-30
GB1015723A (en) 1966-01-05

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