CH424997A - Halbleiterbauelement und Verfahren zu seiner Herstellung - Google Patents

Halbleiterbauelement und Verfahren zu seiner Herstellung

Info

Publication number
CH424997A
CH424997A CH1073265A CH1073265A CH424997A CH 424997 A CH424997 A CH 424997A CH 1073265 A CH1073265 A CH 1073265A CH 1073265 A CH1073265 A CH 1073265A CH 424997 A CH424997 A CH 424997A
Authority
CH
Switzerland
Prior art keywords
manufacture
semiconductor component
semiconductor
component
Prior art date
Application number
CH1073265A
Other languages
English (en)
Inventor
Friedrich Dr Dannhaeuser
Emeis Reimer Dr Dipl-Phys
Arnulf Dr Hoffmann
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH424997A publication Critical patent/CH424997A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02258—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by anodic treatment, e.g. anodic oxidation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)
CH1073265A 1964-08-19 1965-07-30 Halbleiterbauelement und Verfahren zu seiner Herstellung CH424997A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0092709 1964-08-19

Publications (1)

Publication Number Publication Date
CH424997A true CH424997A (de) 1966-11-30

Family

ID=7517403

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1073265A CH424997A (de) 1964-08-19 1965-07-30 Halbleiterbauelement und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
BE (1) BE668270A (de)
CH (1) CH424997A (de)
GB (1) GB1061243A (de)
NL (1) NL6510805A (de)

Also Published As

Publication number Publication date
NL6510805A (de) 1966-02-21
BE668270A (de) 1966-02-14
GB1061243A (en) 1967-03-08

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