CH418481A - Corpuscular beam device, in particular an electron microscope with an arrangement for removing and inserting pole shoe systems or parts thereof - Google Patents

Corpuscular beam device, in particular an electron microscope with an arrangement for removing and inserting pole shoe systems or parts thereof

Info

Publication number
CH418481A
CH418481A CH9864A CH9864A CH418481A CH 418481 A CH418481 A CH 418481A CH 9864 A CH9864 A CH 9864A CH 9864 A CH9864 A CH 9864A CH 418481 A CH418481 A CH 418481A
Authority
CH
Switzerland
Prior art keywords
arrangement
parts
electron microscope
beam device
pole shoe
Prior art date
Application number
CH9864A
Other languages
German (de)
Inventor
Schmidt Horst
Schomburg Willi
Kempien Hans-Joachim
Karl-Heinz Dr Herrmann
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH418481A publication Critical patent/CH418481A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
CH9864A 1963-02-15 1964-01-07 Corpuscular beam device, in particular an electron microscope with an arrangement for removing and inserting pole shoe systems or parts thereof CH418481A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES83762A DE1192760B (en) 1963-02-15 1963-02-15 Arrangement in corpuscular beam devices, in particular electron microscopes, for removing and inserting pole shoe systems or parts thereof

Publications (1)

Publication Number Publication Date
CH418481A true CH418481A (en) 1966-08-15

Family

ID=7511245

Family Applications (1)

Application Number Title Priority Date Filing Date
CH9864A CH418481A (en) 1963-02-15 1964-01-07 Corpuscular beam device, in particular an electron microscope with an arrangement for removing and inserting pole shoe systems or parts thereof

Country Status (4)

Country Link
US (1) US3316402A (en)
CH (1) CH418481A (en)
DE (1) DE1192760B (en)
GB (1) GB1023104A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3445652A (en) * 1965-09-28 1969-05-20 Nippon Electron Optics Lab Beam deflecting apparatus with deflection coils located within an electron microscope specimen chamber
DE1564674B1 (en) * 1966-07-27 1971-07-29 Siemens AG, 1000 Berlin u 8000 Munchf Corpuscular beam device working on the pump, in particular an electron microscope, with a deflection system for the corpuscular beam and an object lock device
DE1614122B1 (en) * 1967-02-24 1970-06-25 Max Planck Gesellschaft Magnetic, in particular electromagnetic, pole piece lens for corpuscular beam devices, in particular for electron microscopes and methods for their adjustment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system

Also Published As

Publication number Publication date
DE1192760B (en) 1965-05-13
GB1023104A (en) 1966-03-16
US3316402A (en) 1967-04-25

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