CH412181A - Zerstäubungs-Vakuumpumpe - Google Patents

Zerstäubungs-Vakuumpumpe

Info

Publication number
CH412181A
CH412181A CH671963A CH671963A CH412181A CH 412181 A CH412181 A CH 412181A CH 671963 A CH671963 A CH 671963A CH 671963 A CH671963 A CH 671963A CH 412181 A CH412181 A CH 412181A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
atomizing vacuum
atomizing
pump
vacuum
Prior art date
Application number
CH671963A
Other languages
English (en)
Inventor
Kienel Gerhard Dr Dipl-Phys
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH412181A publication Critical patent/CH412181A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH671963A 1962-06-08 1963-05-29 Zerstäubungs-Vakuumpumpe CH412181A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH46008A DE1201945B (de) 1962-06-08 1962-06-08 Zerstaeubungs-Vakuumpumpe

Publications (1)

Publication Number Publication Date
CH412181A true CH412181A (de) 1966-04-30

Family

ID=7155974

Family Applications (1)

Application Number Title Priority Date Filing Date
CH671963A CH412181A (de) 1962-06-08 1963-05-29 Zerstäubungs-Vakuumpumpe

Country Status (3)

Country Link
US (1) US3198422A (de)
CH (1) CH412181A (de)
DE (1) DE1201945B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3398879A (en) * 1966-10-07 1968-08-27 Perkin Elmer Corp Asymmetric ion pump and method
CH479161A (de) * 1967-08-25 1969-09-30 Schoenhuber Max Josef Dr Ing Ionen-Getterpumpe zur Herstellung und Aufrechterhaltung eines Hochvakuums
DE2826501B1 (de) * 1978-06-16 1979-11-08 Siemens Ag Evakuierungsvorrichtung zur Erzeugung eines Isoliervakuums um die supraleitende Wicklung eines Rotors
JPS5650042A (en) * 1979-09-29 1981-05-07 Univ Tohoku Ion pump for super high vacuum
FR2740607B1 (fr) * 1995-10-27 1997-11-21 Commissariat Energie Atomique Pompe ionique a anode ajouree
WO2009101814A1 (ja) * 2008-02-14 2009-08-20 National Institute Of Information And Communications Technology イオンポンプシステム及び電磁場発生装置
DE102010055420A1 (de) * 2010-12-21 2012-06-21 Vacom Vakuum Komponenten & Messtechnik Gmbh Elektrodenvorrichtung für eine Ionenzerstäuberpumpe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1089505B (de) * 1958-08-02 1960-09-22 Philips Nv Ionenpumpe mit von einem Magnetfeld verlaengerter Entladungsbahn sowie Verfahren zur Verwendung einer derartigen Ionenpumpe
DE1083974B (de) * 1959-08-20 1960-06-23 Heraeus Gmbh W C Verfahren zum Betrieb einer Getter- oder Getter-Ionenpumpe und Getter-Ionenpumpe

Also Published As

Publication number Publication date
US3198422A (en) 1965-08-03
DE1201945B (de) 1965-09-30

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