CH412181A - Atomizing vacuum pump - Google Patents

Atomizing vacuum pump

Info

Publication number
CH412181A
CH412181A CH671963A CH671963A CH412181A CH 412181 A CH412181 A CH 412181A CH 671963 A CH671963 A CH 671963A CH 671963 A CH671963 A CH 671963A CH 412181 A CH412181 A CH 412181A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
atomizing vacuum
atomizing
pump
vacuum
Prior art date
Application number
CH671963A
Other languages
German (de)
Inventor
Kienel Gerhard Dr Dipl-Phys
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH412181A publication Critical patent/CH412181A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH671963A 1962-06-08 1963-05-29 Atomizing vacuum pump CH412181A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH46008A DE1201945B (en) 1962-06-08 1962-06-08 Atomizing vacuum pump

Publications (1)

Publication Number Publication Date
CH412181A true CH412181A (en) 1966-04-30

Family

ID=7155974

Family Applications (1)

Application Number Title Priority Date Filing Date
CH671963A CH412181A (en) 1962-06-08 1963-05-29 Atomizing vacuum pump

Country Status (3)

Country Link
US (1) US3198422A (en)
CH (1) CH412181A (en)
DE (1) DE1201945B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3398879A (en) * 1966-10-07 1968-08-27 Perkin Elmer Corp Asymmetric ion pump and method
CH479161A (en) * 1967-08-25 1969-09-30 Schoenhuber Max Josef Dr Ing Ion getter pump for creating and maintaining a high vacuum
DE2826501B1 (en) * 1978-06-16 1979-11-08 Siemens Ag Evacuation device for generating an insulating vacuum around the superconducting winding of a rotor
JPS5650042A (en) * 1979-09-29 1981-05-07 Univ Tohoku Ion pump for super high vacuum
FR2740607B1 (en) * 1995-10-27 1997-11-21 Commissariat Energie Atomique IONIC PUMP WITH ADJUSTED ANODE
JP4835756B2 (en) * 2008-02-14 2011-12-14 独立行政法人情報通信研究機構 Ion pump system and electromagnetic field generator
DE102010055420A1 (en) * 2010-12-21 2012-06-21 Vacom Vakuum Komponenten & Messtechnik Gmbh Electrode device for use in e.g. sorption pump utilized for generating low pressures in specific range, has anode including structure that is recessed and articulated from single block for forming open and closed penning cells

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1089505B (en) * 1958-08-02 1960-09-22 Philips Nv Ion pump with a discharge path lengthened by a magnetic field and a method for using such an ion pump
DE1083974B (en) * 1959-08-20 1960-06-23 Heraeus Gmbh W C Method for operating a getter or getter ion pump and getter ion pump

Also Published As

Publication number Publication date
US3198422A (en) 1965-08-03
DE1201945B (en) 1965-09-30

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