CH404005A - Electron microscope with photo emission - Google Patents

Electron microscope with photo emission

Info

Publication number
CH404005A
CH404005A CH258263A CH258263A CH404005A CH 404005 A CH404005 A CH 404005A CH 258263 A CH258263 A CH 258263A CH 258263 A CH258263 A CH 258263A CH 404005 A CH404005 A CH 404005A
Authority
CH
Switzerland
Prior art keywords
electron microscope
photo emission
photo
emission
microscope
Prior art date
Application number
CH258263A
Other languages
German (de)
Inventor
Claus Dr Schueler
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DENDAT1250570D priority Critical patent/DE1250570B/de
Application filed by Ibm filed Critical Ibm
Priority to CH258263A priority patent/CH404005A/en
Priority to GB5064/64A priority patent/GB997851A/en
Priority to FR965307A priority patent/FR1383525A/en
Publication of CH404005A publication Critical patent/CH404005A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
CH258263A 1963-02-28 1963-02-28 Electron microscope with photo emission CH404005A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DENDAT1250570D DE1250570B (en) 1963-02-28
CH258263A CH404005A (en) 1963-02-28 1963-02-28 Electron microscope with photo emission
GB5064/64A GB997851A (en) 1963-02-28 1964-02-06 Electron microscope
FR965307A FR1383525A (en) 1963-02-28 1964-02-27 Electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH258263A CH404005A (en) 1963-02-28 1963-02-28 Electron microscope with photo emission

Publications (1)

Publication Number Publication Date
CH404005A true CH404005A (en) 1965-12-15

Family

ID=4237026

Family Applications (1)

Application Number Title Priority Date Filing Date
CH258263A CH404005A (en) 1963-02-28 1963-02-28 Electron microscope with photo emission

Country Status (4)

Country Link
CH (1) CH404005A (en)
DE (1) DE1250570B (en)
FR (1) FR1383525A (en)
GB (1) GB997851A (en)

Also Published As

Publication number Publication date
FR1383525A (en) 1964-12-24
GB997851A (en) 1965-07-07
DE1250570B (en) 1967-09-21

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