CH380706A - Process for cleaning gaseous silicon compounds - Google Patents

Process for cleaning gaseous silicon compounds

Info

Publication number
CH380706A
CH380706A CH6362058A CH6362058A CH380706A CH 380706 A CH380706 A CH 380706A CH 6362058 A CH6362058 A CH 6362058A CH 6362058 A CH6362058 A CH 6362058A CH 380706 A CH380706 A CH 380706A
Authority
CH
Switzerland
Prior art keywords
silicon compounds
gaseous silicon
cleaning gaseous
cleaning
compounds
Prior art date
Application number
CH6362058A
Other languages
German (de)
Inventor
Langley Bush Eric
Original Assignee
Standard Telephon & Radio Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephon & Radio Ag filed Critical Standard Telephon & Radio Ag
Publication of CH380706A publication Critical patent/CH380706A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Silicon Compounds (AREA)
CH6362058A 1957-09-13 1958-09-05 Process for cleaning gaseous silicon compounds CH380706A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2891557A GB832570A (en) 1957-09-13 1957-09-13 Improvements in or relating to the purification of silane used in production of silicon

Publications (1)

Publication Number Publication Date
CH380706A true CH380706A (en) 1964-08-15

Family

ID=10283247

Family Applications (1)

Application Number Title Priority Date Filing Date
CH6362058A CH380706A (en) 1957-09-13 1958-09-05 Process for cleaning gaseous silicon compounds

Country Status (5)

Country Link
BE (1) BE571148A (en)
CH (1) CH380706A (en)
DE (1) DE1075574B (en)
FR (2) FR1182797A (en)
GB (1) GB832570A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3050366A (en) * 1959-07-15 1962-08-21 Du Pont Production of silane by the use of a zinc catalyst
CN110950382B (en) * 2018-09-26 2022-03-15 紫石能源有限公司 Process for the preparation of arsine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1028543B (en) 1954-12-17 1958-04-24 Siemens Ag Process for cleaning halides which form gel with water, in particular germanium or silicon, preferably for the production of semiconductor materials

Also Published As

Publication number Publication date
GB832570A (en) 1960-04-13
DE1075574B (en) 1960-02-18
FR74159E (en) 1960-11-07
FR1182797A (en) 1959-06-29
BE571148A (en) 1959-03-12

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