CH272698A - Appareil à faisceau électronique focalisé fixe. - Google Patents

Appareil à faisceau électronique focalisé fixe.

Info

Publication number
CH272698A
CH272698A CH272698DA CH272698A CH 272698 A CH272698 A CH 272698A CH 272698D A CH272698D A CH 272698DA CH 272698 A CH272698 A CH 272698A
Authority
CH
Switzerland
Prior art keywords
electron beam
beam device
focused electron
fixed focused
fixed
Prior art date
Application number
Other languages
English (en)
Inventor
F Bertein
Original Assignee
Csf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Csf filed Critical Csf
Publication of CH272698A publication Critical patent/CH272698A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/54—Arrangements for centring ray or beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CH272698D 1947-03-13 1948-01-22 Appareil à faisceau électronique focalisé fixe. CH272698A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR944238T 1947-03-13

Publications (1)

Publication Number Publication Date
CH272698A true CH272698A (fr) 1950-12-31

Family

ID=9471648

Family Applications (1)

Application Number Title Priority Date Filing Date
CH272698D CH272698A (fr) 1947-03-13 1948-01-22 Appareil à faisceau électronique focalisé fixe.

Country Status (4)

Country Link
US (1) US2547994A (fr)
CH (1) CH272698A (fr)
FR (1) FR944238A (fr)
GB (1) GB667268A (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2688092A (en) * 1951-05-21 1954-08-31 Hitachi Ltd Electron lens system
US2688091A (en) * 1951-05-21 1954-08-31 Hitachi Ltd Electron lens system
NL192009A (fr) * 1953-11-02
US2802111A (en) * 1955-05-11 1957-08-06 Rca Corp Electron microscope alignment device
US2926254A (en) * 1955-08-11 1960-02-23 Vickers Electrical Co Ltd Electron lenses
NL96667C (fr) * 1957-01-03
NL108506C (fr) * 1958-09-13
NL266898A (fr) * 1961-07-10
DE1216455B (de) * 1964-03-25 1966-05-12 Siemens Ag Verfahren zum Ausrichten der Feldachse eines elektronenoptischen Linsen, insbesondere in einem Elektronenmikroskop zugeordneten Stigmators und Anordnung zur Durchfuehrung des Verfahrens
DE1802450B1 (de) * 1968-09-02 1970-07-02 Siemens Ag Verfahren zur Scharfstellung eines korpuskularstrahloptischen Bildes
US3689782A (en) * 1971-07-01 1972-09-05 Thomson Csf Electronic transducer for a piezoelectric line
DE2538521C2 (de) * 1975-08-28 1977-09-08 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahl-Transmissionsmikroskop mit einem hinter dem Präparat liegenden Ablenksystem
NL7604553A (nl) * 1975-08-28 1977-03-02 Siemens Ag Met corpusculaire stralen werkende doorstraal- rastermicroscoop met energie-analysator.
US4948971A (en) * 1988-11-14 1990-08-14 Amray Inc. Vibration cancellation system for scanning electron microscopes
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
US6288401B1 (en) * 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
US6791083B2 (en) * 2002-07-29 2004-09-14 Chartered Semiconductor Manufacturing Ltd. Image compensation device for a scanning electron microscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2089692A (en) * 1931-12-09 1937-08-10 Gen Electric Cathode ray tube
US1995376A (en) * 1932-10-29 1935-03-26 Rca Corp Television system
US2103645A (en) * 1932-12-20 1937-12-28 Schlesinger Kurt Braun tube
US2212640A (en) * 1934-07-07 1940-08-27 Radio Inventions Inc Cathode ray system
GB517597A (en) * 1938-08-08 1940-02-02 Baird Television Ltd Improvements in or relating to deflecting means for use with cathode ray tubes
BE475636A (fr) * 1941-09-19

Also Published As

Publication number Publication date
FR944238A (fr) 1949-03-30
GB667268A (en) 1952-02-27
US2547994A (en) 1951-04-10

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