CH272698A - Appareil à faisceau électronique focalisé fixe. - Google Patents
Appareil à faisceau électronique focalisé fixe.Info
- Publication number
- CH272698A CH272698A CH272698DA CH272698A CH 272698 A CH272698 A CH 272698A CH 272698D A CH272698D A CH 272698DA CH 272698 A CH272698 A CH 272698A
- Authority
- CH
- Switzerland
- Prior art keywords
- electron beam
- beam device
- focused electron
- fixed focused
- fixed
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/54—Arrangements for centring ray or beam
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR944238T | 1947-03-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH272698A true CH272698A (fr) | 1950-12-31 |
Family
ID=9471648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH272698D CH272698A (fr) | 1947-03-13 | 1948-01-22 | Appareil à faisceau électronique focalisé fixe. |
Country Status (4)
Country | Link |
---|---|
US (1) | US2547994A (fr) |
CH (1) | CH272698A (fr) |
FR (1) | FR944238A (fr) |
GB (1) | GB667268A (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2688092A (en) * | 1951-05-21 | 1954-08-31 | Hitachi Ltd | Electron lens system |
US2688091A (en) * | 1951-05-21 | 1954-08-31 | Hitachi Ltd | Electron lens system |
NL192009A (fr) * | 1953-11-02 | |||
US2802111A (en) * | 1955-05-11 | 1957-08-06 | Rca Corp | Electron microscope alignment device |
US2926254A (en) * | 1955-08-11 | 1960-02-23 | Vickers Electrical Co Ltd | Electron lenses |
BE563662A (fr) * | 1957-01-03 | |||
NL108506C (fr) * | 1958-09-13 | |||
NL266898A (fr) * | 1961-07-10 | |||
DE1216455B (de) * | 1964-03-25 | 1966-05-12 | Siemens Ag | Verfahren zum Ausrichten der Feldachse eines elektronenoptischen Linsen, insbesondere in einem Elektronenmikroskop zugeordneten Stigmators und Anordnung zur Durchfuehrung des Verfahrens |
DE1802450B1 (de) * | 1968-09-02 | 1970-07-02 | Siemens Ag | Verfahren zur Scharfstellung eines korpuskularstrahloptischen Bildes |
US3689782A (en) * | 1971-07-01 | 1972-09-05 | Thomson Csf | Electronic transducer for a piezoelectric line |
NL7604553A (nl) * | 1975-08-28 | 1977-03-02 | Siemens Ag | Met corpusculaire stralen werkende doorstraal- rastermicroscoop met energie-analysator. |
DE2538521C2 (de) * | 1975-08-28 | 1977-09-08 | Siemens AG, 1000 Berlin und 8000 München | Korpuskularstrahl-Transmissionsmikroskop mit einem hinter dem Präparat liegenden Ablenksystem |
US4948971A (en) * | 1988-11-14 | 1990-08-14 | Amray Inc. | Vibration cancellation system for scanning electron microscopes |
US4962309A (en) * | 1989-08-21 | 1990-10-09 | Rockwell International Corporation | Magnetic optics adaptive technique |
US6288401B1 (en) * | 1999-07-30 | 2001-09-11 | Etec Systems, Inc. | Electrostatic alignment of a charged particle beam |
US6791083B2 (en) * | 2002-07-29 | 2004-09-14 | Chartered Semiconductor Manufacturing Ltd. | Image compensation device for a scanning electron microscope |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2089692A (en) * | 1931-12-09 | 1937-08-10 | Gen Electric | Cathode ray tube |
US1995376A (en) * | 1932-10-29 | 1935-03-26 | Rca Corp | Television system |
US2103645A (en) * | 1932-12-20 | 1937-12-28 | Schlesinger Kurt | Braun tube |
US2212640A (en) * | 1934-07-07 | 1940-08-27 | Radio Inventions Inc | Cathode ray system |
GB517597A (en) * | 1938-08-08 | 1940-02-02 | Baird Television Ltd | Improvements in or relating to deflecting means for use with cathode ray tubes |
BE475636A (fr) * | 1941-09-19 |
-
1947
- 1947-03-13 FR FR944238D patent/FR944238A/fr not_active Expired
-
1948
- 1948-01-22 CH CH272698D patent/CH272698A/fr unknown
- 1948-03-01 US US12228A patent/US2547994A/en not_active Expired - Lifetime
- 1948-03-12 GB GB7653/48A patent/GB667268A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR944238A (fr) | 1949-03-30 |
GB667268A (en) | 1952-02-27 |
US2547994A (en) | 1951-04-10 |
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