NL266898A - - Google Patents
Info
- Publication number
- NL266898A NL266898A NL266898DA NL266898A NL 266898 A NL266898 A NL 266898A NL 266898D A NL266898D A NL 266898DA NL 266898 A NL266898 A NL 266898A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Adjustable Resistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL266898 | 1961-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL266898A true NL266898A (fr) |
Family
ID=19753149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL266898D NL266898A (fr) | 1961-07-10 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3197635A (fr) |
| DE (1) | DE1464282A1 (fr) |
| GB (1) | GB961089A (fr) |
| NL (1) | NL266898A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5041731A (en) * | 1989-01-20 | 1991-08-20 | Fujitsu Limited | Deflection compensating device for converging lens |
| DE3901980C2 (de) * | 1989-01-24 | 2001-06-28 | Ceos Gmbh | Multipolelement und Verfahren zur Herstellung eines Multipolelements |
| US4962309A (en) * | 1989-08-21 | 1990-10-09 | Rockwell International Corporation | Magnetic optics adaptive technique |
| US5546319A (en) * | 1994-01-28 | 1996-08-13 | Fujitsu Limited | Method of and system for charged particle beam exposure |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1826673A (en) * | 1925-10-03 | 1931-10-06 | Mcilvaine Patent Corp | Resistance apparatus |
| US2432029A (en) * | 1945-10-05 | 1947-12-02 | Howe & Fant Inc | Correction of selsyn transmitter errors |
| FR944238A (fr) * | 1947-03-13 | 1949-03-30 | Csf | Méthode de correction des optiques électroniques |
| BE481554A (fr) * | 1947-06-26 | |||
| US2919381A (en) * | 1956-07-25 | 1959-12-29 | Farrand Optical Co Inc | Electron lens |
-
0
- NL NL266898D patent/NL266898A/xx unknown
-
1962
- 1962-06-25 US US204912A patent/US3197635A/en not_active Expired - Lifetime
- 1962-07-06 GB GB26033/62A patent/GB961089A/en not_active Expired
- 1962-07-06 DE DE19621464282 patent/DE1464282A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US3197635A (en) | 1965-07-27 |
| DE1464282A1 (de) | 1968-12-12 |
| GB961089A (en) | 1964-06-17 |