CA997228A - Deposition of films - Google Patents

Deposition of films

Info

Publication number
CA997228A
CA997228A CA179,634A CA174634A CA997228A CA 997228 A CA997228 A CA 997228A CA 174634 A CA174634 A CA 174634A CA 997228 A CA997228 A CA 997228A
Authority
CA
Canada
Prior art keywords
films
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA179,634A
Other languages
English (en)
Other versions
CA174634S (en
Inventor
Hans-Juergen C. Blume
Harry H. Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aeronautics and Space Administration NASA
Original Assignee
National Aeronautics and Space Administration NASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Aeronautics and Space Administration NASA filed Critical National Aeronautics and Space Administration NASA
Application granted granted Critical
Publication of CA997228A publication Critical patent/CA997228A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CA179,634A 1972-06-27 1973-06-21 Deposition of films Expired CA997228A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26677272A 1972-06-27 1972-06-27

Publications (1)

Publication Number Publication Date
CA997228A true CA997228A (en) 1976-09-21

Family

ID=23015944

Family Applications (1)

Application Number Title Priority Date Filing Date
CA179,634A Expired CA997228A (en) 1972-06-27 1973-06-21 Deposition of films

Country Status (4)

Country Link
JP (1) JPS4952734A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA997228A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2332020A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2190947A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19503589A1 (de) * 1995-02-03 1996-08-08 Bosch Siemens Hausgeraete Wasserzuführungs-Einrichtung für ein wasserführendes Haushaltgerät

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2482329A (en) * 1946-05-27 1949-09-20 Rca Corp Apparatus for selective vapor coating
NL291466A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1962-04-13
US3554512A (en) * 1969-03-24 1971-01-12 George H Elliott Crucible for holding molten semiconductor materials
US3667424A (en) * 1969-04-14 1972-06-06 Stanford Research Inst Multi-station vacuum apparatus

Also Published As

Publication number Publication date
FR2190947B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-13
JPS4952734A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-22
FR2190947A1 (en) 1974-02-01
DE2332020A1 (de) 1974-01-10

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