CA996144A - Wafer interlocking transport system - Google Patents

Wafer interlocking transport system

Info

Publication number
CA996144A
CA996144A CA184,337A CA184337A CA996144A CA 996144 A CA996144 A CA 996144A CA 184337 A CA184337 A CA 184337A CA 996144 A CA996144 A CA 996144A
Authority
CA
Canada
Prior art keywords
wafer
transport system
interlocking transport
interlocking
wafer interlocking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA184,337A
Other languages
English (en)
Other versions
CA184337S (en
Inventor
Henry A. Appenzeller
Joseph C. Miller
Vincent Shea
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA996144A publication Critical patent/CA996144A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D43/00—Feeding, positioning or storing devices combined with, or arranged in, or specially adapted for use in connection with, apparatus for working or processing sheet metal, metal tubes or metal profiles; Associations therewith of cutting devices
    • B21D43/003—Positioning devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA184,337A 1972-11-24 1973-10-26 Wafer interlocking transport system Expired CA996144A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30940872A 1972-11-24 1972-11-24

Publications (1)

Publication Number Publication Date
CA996144A true CA996144A (en) 1976-08-31

Family

ID=23198112

Family Applications (1)

Application Number Title Priority Date Filing Date
CA184,337A Expired CA996144A (en) 1972-11-24 1973-10-26 Wafer interlocking transport system

Country Status (7)

Country Link
US (1) US3786660A (de)
JP (1) JPS5314425B2 (de)
CA (1) CA996144A (de)
DE (1) DE2356954C2 (de)
FR (1) FR2207783B1 (de)
GB (1) GB1446564A (de)
IT (1) IT993601B (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110355294A (zh) * 2019-07-17 2019-10-22 江西理工大学 一种冲孔加工机械用工装夹具
CN113356559B (zh) * 2021-06-13 2024-05-14 湖南金峰金属构件有限公司 冷挤压脚手架定位装填座模

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1384278A (en) * 1918-09-26 1921-07-12 Pilkington Brothers Ltd Apparatus for grinding and polishing plate-glass
US2338603A (en) * 1937-12-04 1944-01-04 Paul I Schultz Pressure supporting mechanism
US2729040A (en) * 1954-02-10 1956-01-03 Boeing Co Vacuum chuck jigs
US3180011A (en) * 1960-09-01 1965-04-27 Olin Mathieson Hollow article manufacture by fluid pressure
US3244779A (en) * 1962-06-29 1966-04-05 Levey John Selective heating and drawing of plastics
CH416495A (de) * 1964-10-29 1966-06-30 Schoenauer Paul Werkbank mit Spannvorrichtung
US3496744A (en) * 1966-02-05 1970-02-24 Sumitomo Light Metal Ind Method and apparatus for controlling the contours of rolling mill rolls to obtain metal sheet or strip of superior flatness
GB1200213A (en) * 1966-08-19 1970-07-29 Yawata Iron & Steel Co Fluid gauges
US3487133A (en) * 1967-02-20 1969-12-30 John Lindsay Method for making relief maps
BE704898A (de) * 1967-10-10 1968-02-15
US3542354A (en) * 1968-06-12 1970-11-24 Micromatic Hone Corp Nondistortive work holding fixture
US3564568A (en) * 1968-08-22 1971-02-16 Mallory & Co Inc P R Method of locating and holding semiconductor wafer
US3599288A (en) * 1969-01-23 1971-08-17 Lab For Electronics Inc Scan average memory control system
FR2097216A5 (de) * 1970-05-27 1972-03-03 Anvar
US3729966A (en) * 1972-02-02 1973-05-01 Ibm Apparatus for contouring the surface of thin elements

Also Published As

Publication number Publication date
JPS5314425B2 (de) 1978-05-17
FR2207783B1 (de) 1978-08-04
DE2356954A1 (de) 1974-05-30
GB1446564A (en) 1976-08-18
DE2356954C2 (de) 1984-04-05
US3786660A (en) 1974-01-22
JPS4984374A (de) 1974-08-13
FR2207783A1 (de) 1974-06-21
IT993601B (it) 1975-09-30

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