GB1446564A - Supports for laminar elements - Google Patents

Supports for laminar elements

Info

Publication number
GB1446564A
GB1446564A GB4975573A GB4975573A GB1446564A GB 1446564 A GB1446564 A GB 1446564A GB 4975573 A GB4975573 A GB 4975573A GB 4975573 A GB4975573 A GB 4975573A GB 1446564 A GB1446564 A GB 1446564A
Authority
GB
United Kingdom
Prior art keywords
wafer
pallet
rods
support
laminar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4975573A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1446564A publication Critical patent/GB1446564A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D43/00—Feeding, positioning or storing devices combined with, or arranged in, or specially adapted for use in connection with, apparatus for working or processing sheet metal, metal tubes or metal profiles; Associations therewith of cutting devices
    • B21D43/003—Positioning devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Jigs For Machine Tools (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

1446564 Support for laminar elements INTERNATIONAL BUSINESS MACHINES CORP 25 Oct 1973 [24 Nov 1972] 49755/73 Heading G2X A support for a laminar element 11 comprises a pallet 20 supporting means for gripping one side of the laminar element at different places, means to individually adjust the positions of the gripping means relative to the pallet to bring the opposite side of the element to a desired contour, and means to lock the gripping means in position to maintain the desired contour. Specifically, the laminar element is a semi-conductor wafer 11 having its upper surface (11 B) coated with photo-resist which is to be photographically contact-exposed. The support and wafer are placed in a frame 12 of an apparatus (10) in which the contours of the upper surface (11 B) are sensed by a series of sensors 13 connected to a series of comparators (14) which indicate differences between the actual contour of surface 11 B and the desired contour and cause the wafer to be deformed accordingly by rods 22 having suction discs 24, via means 16. The rods are then locked relative to pallet 20 by collets 37 which are pressed against the rods by fluid-pressure in tubes 44, 44A, (47) or by spring-brassed collets (65) which are releasable by fluid-pressure, Fig. 4 (not shown). The pedestal with the deformed wafer may then be removed from apparatus 10 for processing by releasing dowel pins 50 and clamps 53.
GB4975573A 1972-11-24 1973-10-25 Supports for laminar elements Expired GB1446564A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30940872A 1972-11-24 1972-11-24

Publications (1)

Publication Number Publication Date
GB1446564A true GB1446564A (en) 1976-08-18

Family

ID=23198112

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4975573A Expired GB1446564A (en) 1972-11-24 1973-10-25 Supports for laminar elements

Country Status (7)

Country Link
US (1) US3786660A (en)
JP (1) JPS5314425B2 (en)
CA (1) CA996144A (en)
DE (1) DE2356954C2 (en)
FR (1) FR2207783B1 (en)
GB (1) GB1446564A (en)
IT (1) IT993601B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113356559A (en) * 2021-06-13 2021-09-07 湖南金峰金属构件有限公司 Cold extrusion scaffold positioning and filling seat die

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110355294A (en) * 2019-07-17 2019-10-22 江西理工大学 A kind of punching processing machinery recruitment clamps

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1384278A (en) * 1918-09-26 1921-07-12 Pilkington Brothers Ltd Apparatus for grinding and polishing plate-glass
US2338603A (en) * 1937-12-04 1944-01-04 Paul I Schultz Pressure supporting mechanism
US2729040A (en) * 1954-02-10 1956-01-03 Boeing Co Vacuum chuck jigs
US3180011A (en) * 1960-09-01 1965-04-27 Olin Mathieson Hollow article manufacture by fluid pressure
US3244779A (en) * 1962-06-29 1966-04-05 Levey John Selective heating and drawing of plastics
CH416495A (en) * 1964-10-29 1966-06-30 Schoenauer Paul Workbench with clamping device
US3496744A (en) * 1966-02-05 1970-02-24 Sumitomo Light Metal Ind Method and apparatus for controlling the contours of rolling mill rolls to obtain metal sheet or strip of superior flatness
GB1200213A (en) * 1966-08-19 1970-07-29 Yawata Iron & Steel Co Fluid gauges
US3487133A (en) * 1967-02-20 1969-12-30 John Lindsay Method for making relief maps
BE704898A (en) * 1967-10-10 1968-02-15
US3542354A (en) * 1968-06-12 1970-11-24 Micromatic Hone Corp Nondistortive work holding fixture
US3564568A (en) * 1968-08-22 1971-02-16 Mallory & Co Inc P R Method of locating and holding semiconductor wafer
US3599288A (en) * 1969-01-23 1971-08-17 Lab For Electronics Inc Scan average memory control system
FR2097216A5 (en) * 1970-05-27 1972-03-03 Anvar
US3729966A (en) * 1972-02-02 1973-05-01 Ibm Apparatus for contouring the surface of thin elements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113356559A (en) * 2021-06-13 2021-09-07 湖南金峰金属构件有限公司 Cold extrusion scaffold positioning and filling seat die
CN113356559B (en) * 2021-06-13 2024-05-14 湖南金峰金属构件有限公司 Cold extrusion scaffold positioning filling seat die

Also Published As

Publication number Publication date
CA996144A (en) 1976-08-31
IT993601B (en) 1975-09-30
DE2356954A1 (en) 1974-05-30
JPS5314425B2 (en) 1978-05-17
FR2207783A1 (en) 1974-06-21
DE2356954C2 (en) 1984-04-05
US3786660A (en) 1974-01-22
FR2207783B1 (en) 1978-08-04
JPS4984374A (en) 1974-08-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee